IP Library › Granted Patent US 6,649,018
Granted Patent Utility Small
US 6,649,018 · Confirmation No. 3189

SYSTEM FOR REMOVAL OF PHOTORESIST USING SPARGER

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2003-07-31 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-01-17 TRNA Transmittal of New Application 3 View
2002-01-17 SPEC Specification 8 View
2002-01-17 CLM Claims 2 View
2002-01-17 ABST Abstract 1 View
2002-01-17 DRW Drawings-only black and white line drawings 1 View
2002-01-17 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,649,018
App. No.
10/052,823
Filed
2002-01-17
Granted
2003-11-18
Pub. No.
US20030134518A1
Art Unit
1763
PTA
0 days