METHOD AND SYSTEM FOR CHEMICAL INJECTION IN SILICON WAFER PROCESSING

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⬇ PDF	Date ▼	Code	Description	Pages	PDF
	2004-06-09	IFEE	Issue Fee Payment (PTO-85B)	1	View
	2004-03-10	NOA	Notice of Allowance and Fees Due (PTOL-85)	3	View
	2004-03-10	NOA	Notice of Allowance and Fees Due (PTOL-85)	4	View
	2004-03-10	892	List of references cited by examiner	1	View
	2004-03-10	1449	List of References cited by applicant and considered by examiner	1	View
	2004-03-10	FWCLM	Index of Claims	1	View
	2004-03-10	IIFW	Issue Information including classification, examiner, name, claim, renumbering, etc.	1	View
	2004-03-10	SRFW	Search information including classification, databases and other search related notes	1	View
	2004-03-04	SRNT	Examiner's search strategy and results	4	View
	2004-03-01	SRNT	Examiner's search strategy and results	1	View
	2003-12-16	ELC.	Response to Election / Restriction Filed	5	View
	2003-11-17	CTRS	Requirement for Restriction/Election	4	View
	2002-06-13	IDS	Information Disclosure Statement (IDS) Form (SB08)	2	View
	2002-04-17	LET.	Miscellaneous Incoming Letter	1	View
	2002-04-17	TRNA	Transmittal of New Application	2	View
	2002-04-17	DRW	Drawings-only black and white line drawings	1	View
	2002-02-27	CTMS	Miscellaneous Action with shortened statutory period (SSP)	1	View
	2002-01-18	WFEE	Fee Worksheet (SB06)	1	View
	2002-01-18	WFEE	Fee Worksheet (SB06)	1	View
	2002-01-18	WCLM	Claims Worksheet (PTO-2022)	1	View
	2002-01-18	TRNA	Transmittal of New Application	3	View
	2002-01-18	SPEC	Specification	7	View
	2002-01-18	CLM	Claims	4	View
	2002-01-18	ABST	Abstract	1	View
	2002-01-18	DRW	Drawings-only black and white line drawings	1	View
	2002-01-18	OATH	Oath or Declaration filed	8	View
	2002-01-18	LET.	Miscellaneous Incoming Letter	1	View

Parent Claims priority from a provisional application

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App. 60/282,364

Filed 2001-04-06 · Provisional Application Expired