Post and tip design for a probe contact
View Patent ↗The present invention relates to A microfabricated tip and post structure comprising a post having a rough top surface that diffuses incident light and a cross-section, and a tip, lithographically plated on the rough top surface of the post, having a smooth reflective surface appropriate for automatic vision recognition, and having a cross-section that is less than the cross-section of the post.
1. A microfabricated structure comprising a tip lithographically pattern-plated on a post, wherein the tip has a smooth surface suitable for automatic vision recognition and the post has a surface that has at least one property that aids an automatic vision recognition system in identifying the tip.
2. The microfabricated structure of claim 1 wherein the property is one of diffusing, diffracting, or absorbing light.
3. A microfabricated structure, comprising:
a post having a rough top surface with a surface area and the top surface having a property of diffusing, diffracting, or absorbing incident light; and
a tip, lithographically pattern-plated on the rough top surface of the post, having a smooth reflective surface suitable for machine recognition systems, and having a contact surface area that is less than the surface area of the top surface of the post.
4. The microfabricated structure of claim 3 , wherein the top surface includes metal plated at a high current.
5. The microfabricated structure of claim 4 , wherein the metal is one of Ni, NiCo, NiW, NiFe, CoW, Cr, or NiMn.
6. The microfabricated structure of claim 5 , wherein the at least one additive is a grain refiner.
7. The microfabricated structure of claim 3 , wherein the top surface is etched to a rough finish.
8. The microfabricated tip and post structure of claim 3 , wherein the top surface is metal plated with at least one additive to provide roughness.
9. The microfabricated structure of claim 8 , wherein the at least one additive is Mn salt in a Ni Sufamate bath.
10. The microfabricated structure of claim 3 , wherein the tip is non-centered on the post.
11. The microfabricated structure of claim 3 , wherein the post is approximately 28 um in height.
12. The microfabricated structure of claim 3 , wherein the tip is composed of either PdCo or Rh.
13. The microfabricated structure of claim 3 , wherein the tip is approximately 11 um in height.
14. The microfabricated structure of claim 3 , wherein the top surface has at least one peak and at least one valley.
15. The microfabricated structure of claim 14 , wherein the at least one peak rises between approximately 0.1 um and 5 um above the at least one valley.
16. The microfabricated structure of claim 15 , wherein the at least one peak rises approximately 1 um above the at least one valley.
17. A microfabricated structure, comprising:
a post having a top surface with an area;
a tip having side walls and a top surface, said top surface having a smooth reflective surface appropriate for machine vision recognition of tip position and size, said tip being plated on the top surface of the post, and having an area less than the area of the top surface of the post such that once plated on the top surface, the top surface has an exposed portion and an unexposed portion; and
a skirt plated over the exposed portion of the top surface of the post and over at least a portion of the side walls of the tip, said skirt having a property of at least one of diffusing, diffracting or absorbing light.
18. The microfabricated structure of claim 17 , wherein the skirt provides mechanical support to the tip.
19. The microfabricated structure of claim 17 , wherein the skirt overhangs the top surface of the post.
20. The microfabricated structure of claim 17 , wherein the skirt includes metal plated at high current.
21. The microfabricated structure of claim 20 , wherein the metal is one of Ni, NiMn, NiCo, NiW, NiFe, CoW, or Cr.
22. The microfabricated structure of claim 17 , wherein the skirt includes at least one additive.
23. The microfabricated structure of claim 22 , wherein the additive includes a Mn salt in a bath of Ni Sufamate.
24. The microfabricated structure of claim 17 , wherein the skirt has at least one peak and at least one valley.
25. The microfabricated structure of claim 24 , wherein the at least one peak rises between approximately 0.1 um and 5 um above the at least one valley.
26. The microfabricated structure of claim 25 , wherein the at least one peak rises approximately 1 um above the at least one valley.