Optically enhanced probe alignment
View Patent ↗A novel probe card that comprises a set of fiducials and a method for using the same are disclosed. The set of fiducials comprises a first fiducial and a second fiducial fixed relative to the probe card substrate. Comparing the relative positions of the fiducials determines whether the probes are in proper alignment. This can be performed by the unaided eye or by using a low powered microscope. This novel probe card may also be used with computer vision alignment methods, thus enhancing the speed and accuracy of the computer vision method.
1. A probe card for testing semiconductor wafers, comprising:
a substrate;
a probe structure connected to the substrate;
a fiducial set for determining alignment of the probe structure, wherein the set contains a first fiducial and a second fiducial;
the first fiducial comprises the probe structure;
the second fiducial comprises a pattern spaced apart from the first fiducial, and wherein the second fiducial is fixed relative to the substrate; and
wherein alignment is determined by comparing the location of the first fiducial to the location of the second fiducial.
2. The probe card of claim 1 , wherein the first fiducial further comprises an additional alignment structure, wherein the additional alignment structure's primary purpose is to assist in determining alignment.
3. A probe card for testing semiconductor wafers, comprising:
a substrate;
a fiducial set, wherein the set comprises a first fiducial and a second fiducial, wherein the second fiducial is fixed relative to the substrate and spaced apart from the first fiducial;
wherein alignment is determined by comparing the location of the first fiducial to the location of the second fiducial.
4. The probe card of claim 3 wherein the first fiducial is comprised of the probe structure.
5. The probe card of claim 3 wherein the first fiducial is comprised of an additional alignment structure.
6. The probe card of claim 5 , wherein the additional alignment structure is comprised of more than one structure.
7. The probe card of claim 3 wherein second fiducial is comprised of a photolithographically incorporated pattern.
8. The probe card of claim 7 wherein the pattern's primary purpose is to assist in determining alignment.
9. The probe card of claim 3 wherein the fiducial set is symmetrical.
10. The probe card of claim 7 wherein the fiducial set implements one-dimensional constructive interference patterns, wherein these interference patterns assist in determining alignment.
11. The probe card of claim 7 wherein the fiducial set implements two-dimensional constructive interference patterns, wherein these interference patterns assist in determining alignment.
12. The probe card of claim 11 wherein the interference patterns further assist in determining the degree of alignment.
13. The probe card of claim 7 further wherein the first fiducial is comprised of a first pattern that repeats with a first period; wherein the photolithographic pattern repeats with a second period; wherein the first period is different from the second period; and wherein the difference between the periods assist in determining alignment.
14. The probe card of claim 13 wherein the periods further assist in determining the degree of alignment.
15. The probe card of claim 3 further comprising:
a computer vision system, wherein the computer vision system uses the first and second fiducials to determine alignment.
16. A computer vision system for determining the alignment of a probe card that comprises a set of fiducials, the system comprising:
a video input device;
software that implements a probe alignment program, wherein the program uses as an input the location of the set of fiducials, wherein the set of fiducials is comprised of:
a first fiducial;
a second fiducial fixed relative to a substrate and spaced apart from the first fiducial;
wherein the program calculates a centroid using the location of the set of fiducials.
17. The computer vision system of claim 16 wherein the program further compares the location of the first fiducial to the location of the second fiducial to determine a degree of alignment.
18. A method of determining the degree of alignment of a probe card comprising:
(a) providing a probe card that comprises a first fiducial and a second fiducial fixed relative to a substrate and spaced apart from the first fiducial; and
(b) determining alignment by comparing the location of the first fiducial to the location of the second fiducial.
19. The method of claim 18 wherein the determination step (b) further comprises using a low powered microscope.
20. The method of claim 18 wherein the determination step (b) further comprises using a computer vision system.
21. The method of claim 18 wherein the first fiducial is comprised of the probe structure.
22. The method of claim 18 wherein the first fiducial is comprised of an additional alignment structure.
23. The method of claim 18 wherein the second fiducial is comprised of a photolithographically incorporated pattern.