IP Library Granted Patent US 9,406,670
Granted Patent B1
US 9,406,670 · App. 14/514,386 · Granted Aug 2, 2016

System comprising a semiconductor device and structure

Inventors: Zvi Or-Bach (San Jose, CA); Brian Cronquist (San Jose, CA); Israel Beinglass (Sunnyvale, CA); Jan Lodewijk de Jong (Cupertino, CA); Deepak C. Sekar (San Jose, CA); Zeev Wurman (Palo Alto, CA)
Assignee: MONOLITHIC 3D INC.
H01L27/0688H01L23/367H01L23/528H01L23/5226H01L23/53214H01L23/53228H01L27/088
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Quick Facts
Patent No.
US 9,406,670
App. No.
14/514,386
Granted
Aug 2, 2016
Kind
B1
Abstract

A semiconductor device, including: a first layer including first transistors, the first transistors are interconnected by at least one metal layer including copper or aluminum; a second layer including second transistors, the first layer is overlaid by the second layer, where the second layer includes a plurality of through layer vias having a diameter of less than 200 nm, where the second transistors include a source contact, the source contact including a silicide, and where the silicide has a sheet resistance of less than 15 ohm/sq.

Claims (56)

1. A semiconductor device, comprising:

a first layer comprising first transistors, said first transistors are interconnected by at least one metal layer comprising copper or aluminum;

a second layer comprising second transistors, said first layer is overlaid by said second layer,

wherein said second layer comprises a plurality of through layer vias having a diameter of less than 200 nm,

wherein said second transistors comprise a source contact, said source contact comprising a silicide, and

wherein said silicide has a sheet resistance of less than 15 ohm/sq.

2. A semiconductor device according to claim 1 ,

wherein at least two of said second transistors comprise connected gates.

3. A semiconductor device according to claim 1 ,

wherein at least two of said second transistors comprise a common source or a common drain.

4. A semiconductor device according to claim 1 ,

wherein said second transistors are lithographically aligned to said first transistors.

5. A semiconductor device according to claim 1 ,

wherein said first transistors are down-looking transistors and said second transistors are up-looking transistors.

6. A semiconductor device according to claim 1 ,

wherein said second transistors comprise a high k metal gate.

7. A semiconductor device according to claim 1 , further comprising:

a re-useable donor wafer as a source of said second layer.

8. A semiconductor device according to claim 1 , further comprising:

an isolation layer disposed between said first layer and said second layer.

9. A semiconductor device, comprising:

a first layer comprising first transistors, said first transistors are interconnected by at least one metal layer comprising copper or aluminum;

a second layer comprising second transistors, said first layer is overlaid by said second layer,

wherein said second layer comprises a plurality of through layer vias having a diameter of less than 200 nm, and

wherein at least two of said second transistors comprise connected gates.

10. A semiconductor device according to claim 9 ,

wherein said second transistors comprise a source contact, said source contact comprises a silicide.

11. A semiconductor device according to claim 9 ,

wherein at least two of said second transistors comprise a common source or a common drain.

12. A semiconductor device according to claim 9 ,

wherein said second transistors are lithographically aligned to said first transistors.

13. A semiconductor device according to claim 9 ,

wherein said first transistors are down-looking transistors and said second transistors are up-looking transistors.

14. A semiconductor device according to claim 9 ,

wherein said second transistors comprise a high k metal gate.

15. A semiconductor device according to claim 9 , further comprising:

a re-useable donor wafer as a source of said second layer.

16. A semiconductor device according to claim 9 , further comprising:

an isolation layer disposed between said first layer and said second layer.

17. A semiconductor device, comprising:

a first layer comprising first transistors, said first transistors are interconnected by at least one metal layer comprising copper or aluminum;

a second layer comprising second transistors, said first layer is overlaid by said second layer,

wherein said second layer comprises a plurality of through layer vias having a diameter of less than 200 nm, and

wherein at least two of said second transistors comprise a common source or a common drain.

18. A semiconductor device according to claim 17 ,

wherein said second transistors comprise a source contact, said source contact comprises a silicide.

19. A semiconductor device according to claim 17 ,

wherein at least two of said second transistors comprise connected gates.

20. A semiconductor device according to claim 17 ,

wherein said second transistors are lithographically aligned to said first transistors.

21. A semiconductor device according to claim 17 ,

wherein said first transistors are down-looking transistors and said second transistors are up-looking transistors.

22. A semiconductor device according to claim 17 , further comprising:

a re-useable donor wafer as a source of said second layer.

23. A semiconductor device according to claim 17 , further comprising:

an isolation layer disposed between said first layer and said second layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 20, 2014
From: OR-BACH, ZVI; CRONQUIST, BRIAN; SEKAR, DEEPAK; BEINGLASS, ISRAEL; DEJONG, JAN LODEWIJK; WURMAN, ZEEV
To: MONOLITHIC 3D INC.
Reel/Frame 033979/0720 →
Continuity (11)
Continuation 13492382 · Jun 8, 2012
Continuation 13246384 · Sep 27, 2011
Continuation 12900379 · Oct 7, 2010
Continuation In Part 12859665 · Aug 19, 2010
Continuation In Part 12849272 · Aug 3, 2010
Continuation In Part 12847911 · Jul 30, 2010
Continuation In Part 12792673 · Jun 2, 2010
Continuation In Part 12797493 · Jun 9, 2010
Continuation In Part 12706520 · Feb 16, 2010
Continuation In Part 12577532 · Oct 12, 2009
Continuation In Part 12577532 · Oct 12, 2009