IP Library Granted Patent US 12,523,431
Granted Patent B2
US 12,523,431 · App. 16/539,848 · Granted Jan 13, 2026

Polymer-based microfabricated thermal ground plane

Inventors: Ryan John Lewis (Boulder, CO); Yung-Cheng Lee (Boulder, CO); Li-Anne Liew (Westminster, CO); Yunda Wang (Denver, CO)
Assignee: Kelvin Thermal Technologies, Inc.
F28D15/046B81B1/00B81C1/00476F28F21/06H05K7/20336B81C2201/0107B81C2201/013F28F2245/02F28F2245/04F28F2255/08F28F2260/00
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Quick Facts
Patent No.
US 12,523,431
App. No.
16/539,848
Granted
Jan 13, 2026
Kind
B2
Abstract

Embodiments described herein relate to the concept and designs of a polymer-based thermal ground plane. In accordance with one embodiment, a polymer is utilized as the material to fabricate the thermal ground plane. Other embodiments include am optimized wicking structure design utilizing two arrays of micropillars, use of lithography-based microfabrication of the TGP using copper/polymer processing, micro-posts, throttled releasing holes embedded in the micro-posts, atomic layer deposition (ALD) hydrophilic coating, throttled fluid charging structure and sealing method, defect-free ALD hermetic coating, and compliant structural design.

Claims (22)

1 . A thermal ground plane system comprising:

a bottom layer;

a top layer, wherein the top layer and the bottom layer are sealed together along at least one edge of the top layer and at least one edge of the bottom layer;

a wicking layer comprising a plurality of microposts that are disposed on the bottom layer, and the plurality of the microposts comprises two different array geometries of microposts in two different regions, the two different array geometries comprise a difference in a cross-sectional area of the microposts along the bottom layer in the two different regions and a difference in a space between adjacent microposts in the two different regions;

a vapor core comprising a plurality of pillars disposed on a top layer, wherein the plurality of pillars are separate and distinct from the plurality of microposts; and

a printed circuit board coupled with the bottom layer of the thermal ground plane.

2 . The thermal ground plane according to claim 1 , wherein vias pass through one or more of the plurality of pillars.

3 . The thermal ground plane according to claim 1 , wherein thermal vias pass through the one or more of the plurality of pillars.

4 . The thermal ground plane according to claim 1 , wherein the printed circuit board comprises several flexible circuit boards, and wherein the several flexible circuit boards are integrated with the thermal ground plane.

5 . The thermal ground plane according to claim 1 , wherein the wicking layer includes a first subset of the plurality of microposts disposed on the bottom layer in a first geometry forming an evaporator region and a second subset of the plurality of microposts disposed on the bottom layer in a second geometry forming a condenser region, the second geometry being different than the first geometry.

6 . The thermal ground plane according to claim 1 , wherein either or both the top layer or the bottom layer comprise a wavy structure.

7 . The thermal ground plane according to claim 1 , wherein

the wicking layer are disposed on the bottom layer in a first geometry forming an evaporator region and a second plurality of microposts disposed on the bottom layer in a second geometry forming a condenser region, the second geometry being different than the first geometry.

8 . The thermal ground plane according to claim 7 , wherein the cross-sectional area of the first geometry is greater than cross-sectional area of the second geometry.

9 . The thermal ground plane according to claim 7 , wherein the cross-sectional area of the first geometry is wider than cross-sectional area of the second geometry.

10 . The thermal ground plane according to claim 7 , wherein the space between adjacent microposts in the first geometry is greater than the space between adjacent microposts in the second geometry.

11 . The thermal ground plane according to claim 1 , wherein the microposts comprise a polymer and are disposed on a glass substrate.

12 . The thermal ground plane according to claim 1 , wherein the thermal ground plane is fabricated using sacrificial layer.

13 . The thermal ground plane according to claim 12 , wherein the sacrificial layer comprises release holes sealed by material comprising polymer, glass, or metal.

14 . The thermal ground plane according to claim 7 , wherein the printed circuit board comprises several flexible circuit boards, and wherein the several flexible circuit boards are integrated with the thermal ground plane.

15 . The thermal ground plane according to claim 1 , wherein the mesh includes a plurality of return arteries.

16 . The thermal ground plane according to claim 15 , wherein each of the plurality of return arteries includes pillars.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 19, 2020
From: LEWIS, RYAN JOHN; LIEW, LI-ANNE; LEE, YUNG-CHENG; WANG, YUNDA
To: THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE
Reel/Frame 054423/0378 →
Continuity (6)
Continuation In Part 14857567 · Sep 17, 2015
Continuation In Part 14853833 · Sep 14, 2015
Provisional Application 62069564 · Oct 28, 2014
Provisional Application 62051761 · Sep 17, 2014
Provisional Application 62050519 · Sep 15, 2014
Related Publication 20190390919A1 · Dec 26, 2019
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