Multi-gradient raised frame in bulk acoustic wave device
Aspects of this disclosure relate to a bulk acoustic wave device with a multi-gradient raised frame. The bulk acoustic wave device includes a first electrode, a second electrode, a piezoelectric layer positioned between the first electrode and the second electrode, and a multi-gradient raised frame structure. The multi-gradient raised frame structure includes a first raised frame layer and a second raised frame layer. The second raised frame layer extends beyond the first raised frame layer. The second raised frame layer is tapered on opposing sides.
1. A bulk acoustic wave device with a multi-gradient raised frame, the bulk acoustic wave device comprising:
a first electrode;
a second electrode;
a piezoelectric layer positioned between the first electrode and the second electrode; and
a multi-gradient raised frame structure including a first raised frame layer and a second raised frame layer, the second raised frame layer extending beyond the first raised frame layer, and the second raised frame layer being tapered on opposing sides, and the bulk acoustic wave device being configured to generate a bulk acoustic wave.
2. The bulk acoustic wave device of claim 1 wherein the second raised frame layer extends beyond the first raised frame layer on the opposing sides, and the opposing sides include a first side toward a main acoustically active region of the bulk acoustic wave device and a second side away from the main acoustically active region.
3. The bulk acoustic wave device of claim 1 wherein the first raised frame layer has a lower acoustic impedance than the piezoelectric layer.
4. The bulk acoustic wave device of claim 1 wherein the first raised frame layer includes an oxide, and the second raised frame layer includes a metal.
5. The bulk acoustic wave device of claim 4 wherein the second raised frame layer incudes one or more of ruthenium, molybdenum, tungsten, platinum, or iridium.
6. The bulk acoustic wave device of claim 1 wherein the first raised frame layer includes a metal.
7. The bulk acoustic wave device of claim 1 wherein the first raised frame layer includes a polymer.
8. The bulk acoustic wave device of claim 1 wherein the multi-gradient raised frame structure has a non-gradient portion between two gradient portions.
9. The bulk acoustic wave device of claim 1 wherein the first raised frame layer is positioned between the first electrode and the second electrode.
10. The bulk acoustic wave device of claim 1 wherein the second electrode is positioned between the second raised frame layer and the first raised frame layer.
11. The bulk acoustic wave device of claim 10 wherein the first raised frame layer is positioned between the piezoelectric layer and the second electrode.
12. The bulk acoustic wave device of claim 1 wherein the second raised frame layer has a first taper angle on a first side and a second taper angle on a second side, and the first and second taper angles are each greater than 5 degrees and less than 45 degrees.
13. The bulk acoustic wave device of claim 1 wherein the second raised frame layer is a convex structure relative to a surface of the piezoelectric layer.
14. The bulk acoustic wave device of claim 1 wherein the multi-gradient raised frame structure surrounds a main acoustically active region of the bulk acoustic wave device in plan view.
15. The bulk acoustic wave device of claim 1 wherein the bulk acoustic wave device is a film bulk acoustic resonator.
16. An acoustic wave filter comprising:
a bulk acoustic wave device including a first electrode, a second electrode, a piezoelectric layer positioned between the first electrode and the second electrode, and a multi-gradient raised frame structure including a first raised frame layer and a second raised frame layer, the second raised frame layer extending beyond the first raised frame layer, and the second raised frame layer being tapered on opposing sides; and
at least one additional acoustic wave device, the bulk acoustic wave device and the at least one additional acoustic wave device together arranged to filter a radio frequency signal.
17. The acoustic wave filter of claim 16 wherein the at least one additional acoustic wave device includes a second bulk acoustic wave device that includes a second multi-gradient raised frame structure that is tapered on opposing sides.
18. A packaged radio frequency module comprising:
an acoustic wave filter including a bulk acoustic wave device, the bulk acoustic wave device including a first electrode, a second electrode, a piezoelectric layer positioned between the first electrode and the second electrode, and a multi-gradient raised frame structure including a first raised frame layer and a second raised frame layer, the second raised frame layer extending beyond the first raised frame layer, and the second raised frame layer being tapered on opposing sides, the acoustic wave filter configured to filter a radio frequency signal;
a radio frequency circuit element; and
a package structure enclosing the acoustic wave filter and the radio frequency circuit element.
19. The packaged radio frequency module of claim 18 wherein the radio frequency circuit element is a radio frequency switch.
20. The packaged radio frequency module of claim 18 wherein the radio frequency circuit element is a radio frequency amplifier.