TSV and backside power distribution structure
A semiconductor device includes an electronic circuit within a device layer; wherein the device layer is between a thin layer of wiring for signal connections having a first thickness and a thick layer of wiring for power having a second thickness, the second thickness being greater than the first thickness; a silicon layer above the device layer, the thin layer of wiring, and the thick layer of wiring; a first via connection from a top of the semiconductor device to the thin layer of wiring; a second via connection from the top of the semiconductor device to the thick layer of wiring; and a packaging substrate with a connection to the thick layer of wiring.
1. A via within an electronic structure, the via comprising:
a power though silicon via (TSV) extending entirely through a first silicon; and
a super via connected to the power TSV and extending entirely through a first back end of line, and entirely through a second silicon,
wherein the super via has a height that is greater than the power TSV, and
wherein the second silicon includes a chip and a nano-TSV connected to the chip.
2. The via of claim 1 , wherein a bottom surface of the super via is connected to a second back end of line, and wherein the first back end of line is thinner than the second back end of line.
3. The via of claim 1 , wherein the first silicon is thicker than the second silicon.
4. The via of claim 2 , wherein the second back end of line terminates in a controlled collapse chip connection or copper interconnection to a packaging substrate.
5. The via of claim 1 , wherein the power TSV and the super via are filled with copper.
6. The via of claim 2 , wherein the super via lands on a copper level of the second back end of line.
7. The via of claim 1 , wherein the via is etched through the first silicon, then through the first back end of line, and then through the second silicon.
8. The via of claim 1 , wherein a plurality of keep out zones are created before the via is etched in the first silicon, the first back end of line, and the second silicon.
9. The via of claim 1 , wherein the via draws power from a packaging.
10. The via of claim 1 , wherein the via connects a top die of the electronic structure and the first back end of line.