IP Library › Granted Patent US 12,125,737
Granted Patent B1
US 12,125,737 · App. 18/736,423 · Granted Oct 22, 2024

3D semiconductor device and structure with metal layers and memory cells

Inventors: Zvi Or-Bach (Haifa, IL); Brian Cronquist (Klamath Falls, OR); Deepak C. Sekar (Sunnyvale, CA)
Assignee: Monolithic 3D Inc.
H01L21/6835G11C8/16H01L21/743H01L21/76254H01L21/76898H01L21/8221H01L21/823828H01L21/84H01L23/481H01L23/5252H01L27/0207H01L27/0688H01L27/092H01L27/10H01L27/105H01L27/11807H01L27/11898H01L27/1203H01L29/4236H01L29/66272H01L29/66621H01L29/66825H01L29/66833H01L29/66901H01L29/78H01L29/7841H01L29/7843H01L29/7881H01L29/792H10B10/00H10B10/125H10B12/053H10B12/09H10B12/20H10B12/50H10B20/00H10B41/20H10B41/40H10B41/41H10B43/20H10B43/40H01L23/3677H01L24/13H01L24/16H01L24/45H01L24/48H01L25/0655H01L25/0657H01L25/50H01L27/1214H01L27/1266H01L2221/68368H01L2223/5442H01L2223/54426H01L2224/131H01L2224/16145H01L2224/16146H01L2224/16227H01L2224/16235H01L2224/32145H01L2224/32225H01L2224/45124H01L2224/45147H01L2224/48091H01L2224/48227H01L2224/73204H01L2224/73253H01L2224/73265H01L2224/81005H01L2224/83894H01L2225/06513H01L2225/06541H01L2924/00011H01L2924/01002H01L2924/01004H01L2924/01013H01L2924/01018H01L2924/01019H01L2924/01029H01L2924/01046H01L2924/01066H01L2924/01068H01L2924/01077H01L2924/01078H01L2924/01322H01L2924/10253H01L2924/10329H01L2924/12032H01L2924/12033H01L2924/12036H01L2924/12042H01L2924/1301H01L2924/1305H01L2924/13062H01L2924/13091H01L2924/14H01L2924/1461H01L2924/15311H01L2924/1579H01L2924/16152H01L2924/181H01L2924/19041H01L2924/30105H01L2924/3011H01L2924/3025H10B12/05H10B20/20
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Quick Facts
Patent No.
US 12,125,737
App. No.
18/736,423
Granted
Oct 22, 2024
Kind
B1
Abstract

A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where each of the first transistors includes a single crystal channel; a first metal layer; a second metal layer overlaying the first metal layer; a second level including second transistors, first memory cells including at least one second transistor, and overlaying the second metal layer, a third level including third transistors and overlaying the second level, a fourth level including fourth transistors, second memory cells including at least one fourth transistor, and overlaying the third level, where the first level includes memory control circuits which control writing to the second memory cells, and at least one Phase-Lock-Loop (“PLL”) circuit or at least one Digital-Lock-Loop (“DLL”) circuit.

Claims (82)

1. A 3D semiconductor device, the device comprising:

a first level comprising a first single crystal layer, said first level comprising first transistors,

wherein each of said first transistors comprises a single crystal channel;

a first metal layer;

a second metal layer overlaying said first metal layer;

a second level comprising a plurality of second transistors, said second level overlaying said first level;

a third level comprising a plurality of third transistors, said third level overlaying said second level;

a fourth level comprising a plurality of fourth transistors, said fourth level overlaying said third level,

wherein said second level comprises a plurality of first memory cells,

wherein each of said plurality of first memory cells comprises at least one of said second transistors,

wherein said fourth level comprises a plurality of second memory cells,

wherein each of said plurality of second memory cells comprises at least one of said fourth transistors,

wherein said first level comprises memory control circuits, and

wherein said memory control circuits control writing to said plurality of second memory cells; and

at least one Phase-Lock-Loop (“PLL”) circuit or at least one Digital-Lock-Loop (“DLL”) circuit.

2. The device according to claim 1 , further comprising:

metal pads and metal pins for connecting said second level to said first level.

3. The device according to claim 1 ,

wherein said first level comprises a plurality of Serializer and Deserializer (“SerDes”) circuits.

4. The device according to claim 1 ,

wherein said first level comprises a plurality of Through Silicon Via (“TSV”).

5. The device according to claim 1 ,

wherein said memory cells are DRAM type memory cells.

6. The device according to claim 1 ,

wherein at least one of said first transistors controls power delivery for at least one of said third transistors.

7. The device according to claim 1 , further comprising:

pads for connecting inputs and outputs of said device to an external device,

wherein said pads are disposed underneath said first single crystal layer.

8. A 3D semiconductor device, the device comprising:

a first level comprising a first single crystal layer, said first level comprising first transistors,

wherein each of said first transistors comprises a single crystal channel;

a first metal layer;

a second metal layer overlaying said first metal layer;

a second level comprising a plurality of second transistors, said second level overlaying said first level;

a third level comprising a plurality of third transistors, said third level overlaying said second level;

a fourth level comprising a plurality of fourth transistors, said fourth level overlaying said third level,

wherein said second level comprises a plurality of first memory cells,

wherein each of said plurality of first memory cells comprises at least one of said second transistors,

wherein said fourth level comprises a plurality of second memory cells,

wherein each of said plurality of second memory cells comprises at least one of said fourth transistors,

wherein said first level comprises memory control circuits, and

wherein said memory control circuits control writing to said plurality of second memory cells; and

a plurality of Serializer and Deserializer (“SerDes”) circuits.

9. The device according to claim 8 , further comprising:

metal pads and metal pins for connecting said second level to said first level.

10. The device according to claim 8 , further comprising:

at least one Phase-Lock-Loop (“PLL”) circuit or at least one Digital-Lock-Loop (“DLL”) circuit.

11. The device according to claim 8 ,

wherein said first level comprises a plurality of Through Silicon Via (“TSV”).

12. The device according to claim 8 ,

wherein said memory cells are DRAM type memory cells.

13. The device according to claim 8 ,

wherein at least one of said first transistors controls power delivery for at least one of said third transistors.

14. The device according to claim 8 , further comprising:

pads for connecting inputs and outputs of said device to an external device,

wherein said pads are disposed underneath said first single crystal layer.

15. A 3D semiconductor device, the device comprising:

a first level comprising a first single crystal layer, said first level comprising first transistors,

wherein each of said first transistors comprises a single crystal channel;

a first metal layer;

a second metal layer overlaying said first metal layer;

a second level comprising a plurality of second transistors, said second level overlaying said first level;

a third level comprising a plurality of third transistors, said third level overlaying said second level; and

a fourth level comprising a plurality of fourth transistors, said fourth level overlaying said third level,

wherein said second level comprises a plurality of first memory cells,

wherein each of said plurality of first memory cells comprises at least one of said second transistors,

wherein said fourth level comprises a plurality of second memory cells,

wherein each of said plurality of second memory cells comprises at least one of said fourth transistors,

wherein said first level comprises memory control circuits,

wherein said memory control circuits control writing to said plurality of second memory cells, and

wherein said first level comprises a plurality of Through Silicon Via (“TSV”).

16. The device according to claim 15 , further comprising:

metal pads and metal pins for connecting said second level to said first level.

17. The device according to claim 15 , further comprising:

at least one Phase-Lock-Loop (“PLL”) circuit or at least one Digital-Lock-Loop (“DLL”) circuit.

18. The device according to claim 15 ,

wherein said memory cells are DRAM type memory cells.

19. The device according to claim 15 ,

wherein at least one of said first transistors controls power delivery for at least one of said third transistors.

20. The device according to claim 15 , further comprising:

pads for connecting inputs and outputs of said device to an external device,

wherein said pads are disposed underneath said first single crystal layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 6, 2024
From: OR-BACH, ZVI, MR.; CRONQUIST, BRIAN, MR.; SEKAR, DEEPAK C., DR.
To: MONOLITHIC 3D INC.
Reel/Frame 067649/0918 →
Continuity (24)
Continuation In Part 18677553 · May 29, 2024
Continuation In Part 18424790 · Jan 27, 2024
Continuation In Part 18382468 · Oct 20, 2023
Continuation In Part 18228675 · Aug 1, 2023
Continuation In Part 18092337 · Jan 1, 2023
Continuation In Part 17942109 · Sep 9, 2022
Continuation In Part 17340004 · Jun 5, 2021
Continuation In Part 16537564 · Aug 10, 2019
Continuation In Part 15460230 · Mar 16, 2017
Continuation In Part 14821683 · Aug 7, 2015
Continuation In Part 13492395 · Jun 8, 2012
Continuation 13273712 · Oct 14, 2011
Continuation In Part 13016313 · Jan 28, 2011
Continuation In Part 12970602 · Dec 16, 2010
Continuation In Part 12949617 · Nov 18, 2010
Continuation In Part 17147320 · Jan 12, 2021
Continuation In Part 16537564 · Aug 10, 2019
Continuation In Part 15460230 · Mar 16, 2017
Continuation In Part 14821683 · Aug 7, 2015
Continuation In Part 13492395 · Jun 8, 2012
Continuation 13273712 · Oct 14, 2011
Continuation In Part 13016313 · Jan 28, 2011
Continuation In Part 12970602 · Dec 16, 2010
Continuation In Part 12949617 · Nov 18, 2010
Cited By (3)
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