IP Library Granted Patent US 12,369,347
Granted Patent B2
US 12,369,347 · App. 18/778,978 · Granted Jul 22, 2025

3D semiconductor device and structure with metal layers and a power delivery path

Inventor: Zvi Or-Bach (Haifa, IL)
Assignee: Monolithic 3D Inc.
H10D30/60G11C11/404G11C11/4097G11C16/02H10B10/12H10B12/20H10B43/20H10B63/30H10B69/00H10D30/711G11C11/412G11C16/0483G11C2213/71
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Quick Facts
Patent No.
US 12,369,347
App. No.
18/778,978
Granted
Jul 22, 2025
Kind
B2
Abstract

A 3D semiconductor device, the device including: a first level including single crystal first transistors, a first metal layer, and a first isolation layer; a second level including second transistors and a second isolation layer, where the first level is overlaid by the second level; a third level including single crystal third transistors, where the second level is overlaid by the third level, where the third level includes a third isolation layer, and where the third level is bonded to the second level; a power delivery path to the second transistors, where at least a portion of the power delivery path is connected to at least one of the first transistors; and a plurality of capacitors, where the plurality of capacitors include functioning as a decoupling capacitor to mitigate power supply noise.

Claims (75)

1. A 3D semiconductor device, the device comprising:

a first level comprising single crystal first transistors, a first metal layer, and a first isolation layer;

a second level comprising second transistors and a second isolation layer,

wherein said first level is overlaid by said second level;

a third level comprising single crystal third transistors,

wherein said second level is overlaid by said third level,

wherein said third level comprises a third isolation layer, and

wherein said third level is bonded to said second level;

a power delivery path to said second transistors,

wherein at least a portion of said power delivery path is connected to at least one of said first transistors; and

a plurality of capacitors,

wherein said plurality of capacitors comprise functioning as a decoupling capacitor to mitigate power supply noise.

2. The device according to claim 1 , further comprising:

a plurality of vias disposed through said second level,

wherein at least one of said plurality of vias comprises tungsten.

3. The device according to claim 1 ,

wherein at least one of said second transistors comprises hafnium oxide.

4. The device according to claim 1 ,

wherein said second level is bonded to said first level.

5. The device according to claim 1 ,

wherein said second level comprises a plurality of DRAM memory cells.

6. The device according to claim 1 ,

wherein at least one of said second transistors comprises a two-sided gate.

7. The device according to claim 1 ,

wherein said first level comprises at least one digital to analog converter circuit.

8. A 3D semiconductor device, the device comprising:

a first level comprising single crystal first transistors, a first metal layer, and a first isolation layer;

a second level comprising second transistors and a second isolation layer,

wherein said first level is overlaid by said second level;

a third level comprising third transistors;

a fourth level comprising a single crystal layer,

wherein said second level is overlaid by said third level,

wherein said third level is overlaid by said fourth level,

wherein said third level comprises a third isolation layer, and

wherein said third level is bonded to said second level;

a power delivery path to said second transistors,

wherein at least a portion of said power delivery path is connected to at least one of said single crystal first transistors; and

a thermal conductive path from said second transistors to an external surface of said 3D semiconductor device.

9. The device according to claim 8 , further comprising:

a plurality of capacitors,

wherein said plurality of capacitors comprise functioning as a decoupling capacitor to mitigate power supply noise.

10. The device according to claim 8 ,

wherein at least one of said second transistors comprises hafnium oxide.

11. The device according to claim 8 ,

wherein said second level is bonded to said first level.

12. The device according to claim 8 ,

wherein said second level comprises a plurality of DRAM memory cells.

13. The device according to claim 8 ,

wherein at least one of said second transistors comprises a two-sided gate.

14. The device according to claim 8 ,

wherein said first level comprises at least one digital to analog converter circuit.

15. A 3D semiconductor device, the device comprising:

a first level comprising single crystal first transistors, a first metal layer, and a first isolation layer;

a second level comprising second transistors and a second isolation layer,

wherein said first level is overlaid by said second level;

a third level comprising third transistors;

a fourth level comprising a single crystal layer,

wherein said second level is overlaid by said third level,

wherein said third level is overlaid by said fourth level,

wherein said third level comprises a third isolation layer, and

wherein said third level is bonded to said second level;

a power delivery path to said second transistors,

wherein at least a portion of said power delivery path is connected to at least one of said first transistors; and

a global power distribution metal layer comprising a metal thickness twice thicker than said first metal layer.

16. The device according to claim 15 , further comprising:

a plurality of capacitors,

wherein said plurality of capacitors comprise functioning as a decoupling capacitor to mitigate power supply noise.

17. The device according to claim 15 , further comprising:

a thermal conductive path from said second transistors to an external surface of said 3D semiconductor device.

18. The device according to claim 15 ,

wherein said second level is bonded to said first level.

19. The device according to claim 15 ,

wherein said second level comprises a plurality of DRAM memory cells.

20. The device according to claim 15 ,

wherein said first level comprises at least one digital to analog converter circuit.

Continuity (15)
Continuation In Part 18429202 · Jan 31, 2024
Continuation In Part 18388852 · Nov 12, 2023
Continuation In Part 18227183 · Jul 27, 2023
Continuation In Part 18125053 · Mar 22, 2023
Continuation In Part 18092727 · Jan 3, 2023
Continuation In Part 17961565 · Oct 7, 2022
Continuation 17384992 · Jul 26, 2021
Continuation 17222784 · Apr 5, 2021
Continuation 17176146 · Feb 15, 2021
Continuation 16226628 · Dec 19, 2018
Continuation 15727592 · Oct 7, 2017
Continuation 15351389 · Nov 14, 2016
Continuation 14506160 · Oct 3, 2014
Continuation 13792202 · Mar 11, 2013
Related Publication 20240379837A1 · Nov 14, 2024
References Cited (2)
US 11410912B2 · Or-Bach · 2022 [cited by examiner]
US 11677021B2 · Or-Bach · 2023 [cited by examiner]