Method for fabricating handling wafer
A method for fabricating handling wafer includes providing a substrate, having a front side and a back side. The front side of the substrate is disposed on a supporting pin. A first oxide layer is formed surrounding the substrate. A portion of the first oxide layer is removed to expose the front side of the substrate. An alignment mark is formed on the front side of the substrate.
1. A method for fabricating handling wafer, comprising:
providing a substrate, having a front side and a back side;
disposing the front side of the substrate on a supporting pin;
forming a first oxide layer, surrounding the substrate;
removing a portion of the first oxide layer to expose the front side of the substrate; and
forming an alignment mark on the front side of the substrate,
wherein in the step of disposing the front side of the substrate on the supporting pin, the substrate is flipped up-side-down at a first time, and
wherein in the step of removing the portion of the first oxide layer, the substrate is flipped up-side-down at a second time with respect to the first time.
2. The method for fabricating handling wafer as recited in claim 1 , wherein the step of removing the portion of the first oxide layer comprises a wet cleaning process.
3. The method for fabricating handling wafer as recited in claim 1 , wherein the first oxide layer is formed by a thermal oxidation process.
4. The method for fabricating handling wafer as recited in claim 1 , wherein the substrate is a silicon on insulator (SOI) substrate.
5. The method for fabricating handling wafer as recited in claim 1 , after removing the portion of the first oxide to forming the alignment mark, further comprising:
performing an implantation process on the front side of the substrate;
forming a photoresist layer with an alignment opening to expose the substrate at the front side; and
etching the substrate at the front side through the alignment opening, to form the alignment mark.
6. The method for fabricating handling wafer as recited in claim 5 , further comprising:
forming a second oxide layer at least on the front side of the substrate before performing the implantation process; and
removing the second oxide layer at the front side of the substrate after performing the implantation process.
7. The method for fabricating handling wafer as recited in claim 6 , the second oxide layer is surrounding over the front side and the back side of the substrate.
8. The method for fabricating handling wafer as recited in claim 1 , further comprising forming a nitride layer on the first oxide layer at the back side of the substrate.
9. The method for fabricating handling wafer as recited in claim 8 , after removing the portion of the first oxide to forming the alignment mark, further comprising:
performing an implantation process on the front side of the substrate;
forming a photoresist layer with an alignment opening to expose the substrate at the front side; and
etching the substrate at the front side through the alignment opening, to form the alignment mark.
10. The method for fabricating handling wafer as recited in claim 9 , further comprising:
forming a second oxide layer on the front side of the substrate before performing the implantation process; and
removing the second oxide layer at the front side of the substrate after performing the implantation process.
11. A method for fabricating handling wafer, comprising:
providing a substrate, having a front side and a back side;
disposing the front side of the substrate on a supporting pin;
forming a first oxide layer, surrounding the substrate;
forming a nitride layer on the first oxide layer at the back side of the substrate;
removing a portion of the first oxide layer to expose the front side of the substrate; and
forming an alignment mark on the front side of the substrate,
wherein in the step of disposing the front side of the substrate on the supporting pin, the substrate is flipped up-side-down at a first time, and
wherein in the step of removing the portion of the first oxide layer, the substrate is flipped up-side-down at a second time with respect to the first time.