Member for semiconductor manufacturing apparatus and method for manufacturing the same
A member for semiconductor manufacturing apparatus includes: an upper plate that has a wafer placement surface, contains no electrode, and is a ceramic material plate; an intermediate plate that is provided on a surface of the upper plate, opposite to the wafer placement surface, that is used as an electrostatic electrode, and that is a conductive material plate; and a lower plate that is joined to a surface of the intermediate plate, opposite to the surface on which the upper plate is provided, and that is a ceramic material plate.
1. A member for semiconductor manufacturing apparatus, comprising:
an upper plate that has a wafer placement surface, contains no electrode, and is a ceramic material plate;
an intermediate plate that is provided on a surface of the upper plate, opposite to the wafer placement surface, that functions as an electrostatic electrode and an RF electrode, and that is a conductive material plate; and
a lower plate that is joined to a surface of the intermediate plate, opposite to a surface on which the upper plate is provided, and that is a ceramic plate;
wherein the intermediate plate is a metal plate comprising titanium or molybdenum or a metal-ceramic-composite (metal matrix composite) material plate;
wherein the lower plate contains a heater electrode; and
wherein the lower plate contains a shield electrode between a surface on which the intermediate plate is provided and the heater electrode.
2. The member for semiconductor manufacturing apparatus according to claim 1 ,
wherein a thickness of the upper plate is not less than 0.05 mm and not more than 1.5 mm.
3. The member for semiconductor manufacturing apparatus according to claim 1 ,
wherein a diameter of the intermediate plate is larger than a diameter of the upper plate.
4. The member for semiconductor manufacturing apparatus according to claim 1 ,
wherein an outwardly exposed face of the intermediate plate is covered with an insulating film.
5. The member for semiconductor manufacturing apparatus according to claim 1 ,
wherein the lower plate and the upper plate are same ceramic material plates.
6. The member for semiconductor manufacturing apparatus according to claim 1 ,
wherein the member for semiconductor manufacturing apparatus has a through-hole that penetrates the member for semiconductor manufacturing apparatus in a thickness direction, and
electrical discharge prevention treatment is already performed on the through-hole.
7. The member for semiconductor manufacturing apparatus according to claim 1 ,
wherein the metal-ceramic-composite (metal matrix composite) material plate comprises SiSiCTi or a SiC porous body impregnated with aluminum, silicon, or a combination thereof.
8. A method for manufacturing a member for semiconductor manufacturing apparatus, the method comprising:
(a) a step of preparing an upper plate that has a wafer placement surface, contains no electrode, and is a ceramic material plate, a lower plate that is a ceramic plate including a heater electrode and a shield electrode, and an intermediate plate that functions as an electrostatic electrode and an RF electrode and that is a conductive material plate, wherein the conductive material plate is a metal plate comprising titanium or molybdenum or a metal-ceramic-composite (metal matrix composite) material plate;
wherein the shield electrode in the lower plate is between a surface on which the intermediate plate is provided and the heater electrode; and
(b) a step of disposing a first metal joining material between an upper surface of the intermediate plate and a surface of the upper plate, opposite to the wafer placement surface, disposing a second metal joining material between a lower surface of the intermediate plate and an upper surface of the lower plate, and obtaining a joined body by applying heat under pressure in a current state and cooling to a room temperature.
9. The method according to claim 8 ,
wherein the metal-ceramic-composite (metal matrix composite) material plate comprises SiSiCTi or a SiC porous body impregnated with aluminum, silicon, or a combination thereof.
10. A method for manufacturing a member for semiconductor manufacturing apparatus, the method comprising:
(a) a step of forming an upper plate that contains no electrode and that is a ceramic material plate by thermal spray on an upper surface of an intermediate plate that functions as an electrostatic electrode and an RF electrode and that is a conductive material plate,
wherein the conductive material plate is a metal plate comprising titanium or molybdenum or a metal-ceramic-composite (metal matrix composite) material plate; and
(b) a step of disposing a metal joining material between a lower surface of the intermediate plate and an upper surface of a lower plate that is a ceramic material plate including a heater electrode and a shield electrode, wherein the shield electrode in the lower plate is between a surface on which the intermediate plate is provided and the heater electrode; and obtaining a joined body by applying heat under pressure in a current state and cooling to a room temperature.
11. The method according to claim 10 ,
wherein the metal-ceramic-composite (metal matrix composite) material plate comprises SiSiCTi or a SiC porous body impregnated with aluminum, silicon, or a combination thereof.