IP Library › Granted Patent US 12,265,136
Granted Patent B2
US 12,265,136 · App. 18/825,962 · Granted Apr 1, 2025

Method and system for thermal control of devices in electronics tester

Inventors: Jovan Jovanovic (Santa Clara, CA); Kenneth W. Deboe (Santa Clara, CA); Steven C. Steps (Saratoga, CA)
Assignee: AEHR TEST SYSTEMS
G01R31/50G01R31/003G01R31/2831G01R31/2875H01L21/324H01L21/67103H01L21/67109H01L21/67248H01L21/68785H01L22/26G01R1/0491
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Quick Facts
Patent No.
US 12,265,136
App. No.
18/825,962
Granted
Apr 1, 2025
Kind
B2
Abstract

A tester apparatus is provided. Slot assemblies are removably mounted to a frame. Each slot assembly allows for individual heating and temperature control of a respective cartridge that is inserted into the slot assembly. A closed loop air path is defined by the frame and a heater and cooler are located in the closed loop air path to cool or heat the cartridge with air. Individual cartridges can be inserted or be removed while other cartridges are in various stages of being tested or in various stages of temperature ramps.

Claims (33)

1. A tester apparatus, comprising:

a portable cartridge that includes:

a cartridge body including first and second components for holding a substrate therebetween, the substrate carrying a microelectronic circuit and having a plurality of substrate terminals connected to a microelectronic circuit;

a plurality of portable cartridge contacts on the second component, the portable cartridge contacts matching the substrate terminals for making contact to the substrate terminals;

a first electrical interface on the portable cartridge body and connected to the portable cartridge contacts; and

an area seal between the first and second components, the area seal between the first and second components forming an enclosed area defined between the first component, the second component and the area seal between the first and second components;

a frame, the portable cartridge body being receivable to be held by the frame and being removable from the frame;

a second electrical interface on the frame, the second electrical interface being connected to the first electrical interface when the portable cartridge is held by the frame, and being disconnected from the first electrical interface when the portable cartridge body is removed from the frame;

an electrical tester connected through the second electrical interface, the first electrical interface, and the portable cartridge contacts to the substrate terminals so that signals are transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit;

a gas interface secured to the frame; and

a passage connecting the gas interface to the area defined between the first component, the second component and the area seal between the first and second components when the portable cartridge body is held by the frame.

2. The tester apparatus of claim 1 , wherein the gas interface connects to the area defined between the first component, the second component and the area seal between the first and second components when the portable cartridge body is received by the frame.

3. The tester apparatus of claim 1 , wherein the gas interface disconnects from the area defined between the first component, the second component and the area seal between the first and second components when the portable cartridge body is removed from the frame.

4. The tester apparatus of claim 1 , wherein the portable cartridge is a first portable cartridge, further comprising:

a second portable cartridge, wherein each portable cartridge includes:

a cartridge body including first and second components for holding a substrate therebetween, the substrate carrying a microelectronic circuit and having a plurality of substrate terminals connected to a microelectronic circuit;

a plurality of portable cartridge contacts on the second component, the portable cartridge contacts matching the substrate terminals for making contact to the substrate terminals;

a first electrical interface on the portable cartridge body and connected to the portable cartridge contacts; and

an area seal between the first and second components, the area seal between the first and second components forming an enclosed area defined between the first component, the second component and the area seal between the first and second components,

wherein the passage is a first passage, the frame further including:

a second passage connecting the gas interface to the area defined between the first component, the second component and the area seal between the first and second components of the second portable cartridge when the portable cartridge body of the second portable cartridge is held by the frame.

5. A method of testing a microelectronic circuit held by a substrate, comprising:

holding a substrate between first and second components of a cartridge body forming part of a portable cartridge, the second component having cartridge contacts against substrate terminals of the substrate connected to a microelectronic circuit;

locating an area seal between the first and second components, the area seal between the first and second components forming an enclosed area defined between the first component, the second component and the area seal between the first and second components;

receiving the portable cartridge by a frame with a first electrical interface on the portable cartridge body connected to a second electrical interface on the frame, the second electrical interface being connected to an electrical tester;

connecting a gas interface secured to a frame through a passage to the area defined between the first component, the second component and the area seal between the first and second components such that the gas interface is connected to the area defined between the first component, the second component and the area seal between the first and second components when the portable cartridge body is held by the frame;

transmitting signals between the electrical tester and the microelectronic circuit sequentially through the substrate terminals, cartridge contacts, and first and second electrical interfaces to test the microelectronic circuit when the portable cartridge body is held by the frame; and

removing the portable cartridge from the frame with the gas interface disconnected from the area defined between the first component, the second component and the area seal between the first and second components and the first electrical interface on the portable cartridge body disconnected from the second electrical interface on the frame.

6. The method of claim 5 , wherein the gas interface connects to the area defined between the first component, the second component and the area seal between the first and second components when the portable cartridge body is received by the frame.

7. The method of claim 5 , wherein the gas interface disconnects from the area defined between the first component, the second component and the area seal between the first and second components when the portable cartridge body is removed from the frame.

8. The method of claim 5 , further comprising:

maintaining a pressure within the area defined between the first component, the second component and the area seal between the first and second components through the gas interface.

9. The method of claim 8 , wherein the pressure that is maintained is a vacuum pressure.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2024
From: JOVANOVIC, JOVAN; DEBOE, KENNETH W.; STEPS, STEVEN C.
To: AEHR TEST SYSTEMS
Reel/Frame 069011/0920 →
Continuity (6)
Continuation 18648873 · Apr 29, 2024
Continuation 17532298 · Nov 22, 2021
Division 16576555 · Sep 19, 2019
Division 15400771 · Jan 6, 2017
Provisional Application 62276746 · Jan 8, 2016
Related Publication 20240426938A1 · Dec 26, 2024
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