Selective dual silicide formation using a maskless fabrication process flow
A first dielectric layer is selectively formed such that the first dielectric layer is formed over a source/drain region of a first type of transistor but not over a source/drain region of a second type of transistor. The first type of transistor and the second type of transistor have different types of conductivity. A first silicide layer is selectively formed such that the first silicide layer is formed over the source/drain region of the second type of transistor but not over the source/drain region of the first type of transistor. The first dielectric layer is removed. A second silicide layer is formed over the source/drain region of the first type of transistor.
1. A semiconductor device, comprising:
a first transistor having a first type of conductivity, wherein the first transistor includes: a first source/drain, a first silicide disposed over the first source/drain, a nitride layer disposed over the first silicide, and a first conductive contact disposed over the nitride layer; and
a second transistor having a second type of conductivity that is different from the first type of conductivity, wherein the second transistor includes: a second source/drain, a second silicide disposed over the second source/drain, and a second conductive contact disposed over the second silicide, wherein the first silicide and the second silicide have different geometric profiles in a cross-sectional side view, wherein the second conductive contact has a same material composition as the first conductive contact, and wherein a first number of layers that exist between the first silicide and the first conductive contact is different than a second number of layers that exist between the second silicide and the second conductive contact.
2. The semiconductor device of claim 1 , wherein the first transistor further includes an epi-layer disposed between the first source/drain and the first silicide.
3. The semiconductor device of claim 1 , wherein a bottom surface of the second silicide is more curved than a bottom surface of the first silicide in the cross-sectional side view.
4. The semiconductor device of claim 1 , wherein a bottom surface of the second silicide has a lower vertical elevation than a bottom surface of the first silicide in the cross-sectional side view.
5. The semiconductor device of claim 1 , wherein the second silicide is wider than the second conductive contact.
6. The semiconductor device of claim 1 , wherein the second silicide is in direct physical contact with the second conductive contact.
7. The semiconductor device of claim 1 , wherein the nitride layer is in direct physical contact with the first conductive contact.
8. The semiconductor device of claim 1 , wherein the nitride layer includes titanium nitride.
9. The semiconductor device of claim 1 , wherein the second conductive contact has a more rounded bottom surface than the first conductive contact.
10. The semiconductor device of claim 1 , wherein:
the first transistor further includes a first gate structure, wherein a bottom surface of the first gate structure is substantially co-planar with an upper surface of the first source/drain in the cross-sectional side view; and
the second transistor further includes a second gate structure, wherein a bottom surface of the second gate structure has a higher vertical elevation than an upper surface of the second source/drain in the cross-sectional side view.
11. A semiconductor device, comprising:
an N-type transistor that includes: a first source/drain component, an epi-layer located over the first source/drain component, a first silicide layer located over the epi-layer, a nitride layer located over the first silicide layer, and a first conductive contact located over the nitride layer; and
a P-type transistor that includes: a second source/drain component, a second silicide layer located over the second source/drain component, and a second conductive contact located over the second silicide layer, wherein the second silicide layer has a substantially curved top surface and a substantially curved bottom surface in a cross-sectional side view;
wherein a maximum lateral dimension of the second silicide layer is greater than a maximum lateral dimension of the second conductive contact in the cross-sectional side view, and a maximum lateral dimension of the first silicide layer is substantially equal to a maximum lateral dimension of the first conductive contact in the cross-sectional side view.
12. The semiconductor device of claim 11 , wherein:
the nitride layer is in direct contact with the first conductive contact in the cross-sectional side view; and
the second silicide layer is in direct contact with the second conductive contact in the cross-sectional side view.
13. The semiconductor device of claim 11 , wherein the second silicide layer protrudes downwardly into the second source/drain component in the cross-sectional side view.
14. A semiconductor device, comprising:
an N-type transistor that includes: a first source/drain, a first silicide layer disposed over the first source/drain, a nitride layer disposed over the first silicide layer, and a first conductive contact disposed over the nitride layer, wherein the first silicide layer has a substantially straight bottom surface in a cross-sectional side view; and
a P-type transistor that includes: a second source/drain, a second silicide layer formed over the second source/drain, and a second conductive contact formed over the second silicide layer, wherein the second silicide layer has a substantially curved bottom surface in the cross-sectional side view, and wherein a top surface of the second silicide layer is less curved than the bottom surface of the second silicide layer in the cross-sectional side view.
15. The semiconductor device of claim 14 , wherein the N-type transistor further includes:
an epi-layer disposed between the first source/drain and the first silicide layer; and
a third silicide layer disposed between the nitride layer and the first conductive contact.
16. The semiconductor device of claim 15 , wherein:
the third silicide layer is in direct contact with the first conductive contact; and
the second silicide layer is in direct contact with the second conductive contact.
17. The semiconductor device of claim 14 , wherein:
the N-type transistor further includes a first gate structure, wherein a bottom surface of the first gate structure is substantially co-planar with an upper surface of the first source/drain in the cross-sectional side view; and
the P-type transistor further includes a second gate structure, wherein a bottom surface of the second gate structure is more elevated vertically than a bottom surface of the second silicide layer in the cross-sectional side view.
18. The semiconductor device of claim 14 , wherein the second silicide layer has a substantially flat upper surface in the cross-sectional side view.
19. The semiconductor device of claim 14 , wherein the nitride layer includes titanium nitride.
20. The semiconductor device of claim 11 , where the second silicide layer has a more curved profile in the cross-sectional side view than the first silicide layer.