Semiconductor structure having high breakdown voltage etch-stop layer
View Patent ↗The present disclosure relates to a method of forming a semiconductor structure. The method includes depositing an etch-stop layer (ESL) over a first dielectric layer. The ESL layer deposition can include: flowing a first precursor over the first dielectric layer; purging at least a portion of the first precursor; flowing a second precursor over the first dielectric layer to form a sublayer of the ESL layer; and purging at least a portion of the second precursor. The method can further include depositing a second dielectric layer on the ESL layer and forming a via in the second dielectric layer and through the ESL layer.
1. A semiconductor structure, comprising:
a first dielectric layer;
a first conductive structure in the first dielectric layer;
an aluminum oxide layer disposed on the first dielectric layer and on a top surface of the first conductive structure, wherein the aluminum oxide layer comprises a dielectric constant between about 7 and about 8.5;
a second dielectric layer disposed on the aluminum oxide layer; and
a second conductive structure disposed on the first conductive structure through the second dielectric layer and the aluminum oxide layer.
2. The semiconductor structure of claim 1 , wherein the aluminum oxide layer comprises an atomic concentration of aluminum between about 30% and about 45%.
3. The semiconductor structure of claim 1 , wherein the aluminum oxide layer comprises an atomic concentration of oxygen between about 55% and about 70%.
4. The semiconductor structure of claim 1 , wherein the aluminum oxide layer comprises an atomic concentration of hydrogen between about 0.5% and about 3%.
5. The semiconductor structure of claim 1 , wherein a thickness of the aluminum oxide layer is between about 5 angstroms and about 50 angstroms.
6. The semiconductor structure of claim 1 , wherein an atomic ratio of oxygen to aluminum of the aluminum oxide layer is between about 1.2 and about 2.3.
7. The semiconductor structure of claim 1 , further comprising a barrier layer disposed on sidewalls of the second conductive structure.
8. The semiconductor structure of claim 1 , further comprising a nitride layer disposed between the aluminum oxide layer and the second conductive structure.
9. The semiconductor structure of claim 1 , wherein the first conductive structure comprises a first metal and the second conductive structure comprises a second metal different from the first metal.
10. The semiconductor structure of claim 1 , wherein the first conductive structure comprises cobalt and the second conductive structure comprises copper.
11. A semiconductor structure, comprising:
a first dielectric layer;
a first conductive structure in the first dielectric layer;
an etch stop layer disposed on the first dielectric layer and on a top surface of the first conductive structure, wherein the etch stop layer comprises:
an oxide layer,
an oxycarbide layer, and
a dielectric constant between about 7 and about 8.5;
a second dielectric layer disposed on the etch stop layer; and
an array of second conductive structures disposed on the etch stop layer, wherein bottom surfaces of the second conductive structures of the array of second conductive structures are in contact with a top surface of the etch stop layer.
12. The semiconductor structure of claim 11 , further comprising an other etch stop layer disposed on and in contact with top surfaces of the second conductive structures of the array of second conductive structures, wherein the other etch stop layer comprises a dielectric constant between about 7 and about 8.5.
13. The semiconductor structure of claim 11 , wherein the etch stop layer comprises an aluminum oxide layer and a silicon oxycarbide layer.
14. The semiconductor structure of claim 11 , further comprising a gate structure of a transistor, wherein the first conductive structure is disposed on the gate structure.
15. The semiconductor structure of claim 11 , wherein the first conductive structure comprises a first metal and the second conductive structures of the array of second conductive structures comprise a second metal different from the first metal.
16. The semiconductor structure of claim 11 , wherein the first conductive structure comprises cobalt and the second conductive structures of the array of second conductive structures comprise copper.
17. A semiconductor structure, comprising:
a first dielectric layer;
a first conductive structure in the first dielectric layer;
a metal oxide layer disposed on the first dielectric layer, wherein the metal oxide layer comprises a dielectric constant between about 7 and about 8.5 and an atomic concentration of hydrogen between about 0.5% and about 3%;
a second dielectric layer disposed on the metal oxide layer; and
a second conductive structure disposed on the first conductive structure through the second dielectric layer and the metal oxide layer.
18. The semiconductor structure of claim 17 , wherein the metal oxide layer comprises a first metal oxide layer with a first thickness and a second metal oxide layer with a second thickness different from the first thickness.
19. The semiconductor structure of claim 17 , wherein the first conductive structure comprises cobalt and the second conductive structure comprises copper.
20. The semiconductor structure of claim 17 , further comprising a source/drain region of a transistor, wherein the first conductive structure is disposed on the source/drain region.