Method of manufacturing a semiconductor device and a semiconductor device
In a method, a first dielectric layer is formed over semiconductor fins, a second dielectric layer is formed over the first dielectric layer, the second dielectric layer is recessed below a top of each of the semiconductor fins, a third dielectric layer is formed over the recessed second dielectric layer, and the third dielectric layer is recessed below the top of the semiconductor fin, thereby forming a wall fin. The wall fin includes the recessed third dielectric layer and the recessed second dielectric layer disposed over the recessed third dielectric layer. The first dielectric layer is recessed below a top of the wall fin, a fin liner layer is formed, the fin liner layer is recessed and the semiconductor fins are recessed, and source/drain epitaxial layers are formed over the recessed semiconductor fins, respectively. The source/drain epitaxial layers are separated by the wall fin from each other.
1. A semiconductor device comprising:
a first semiconductor fin and a second semiconductor fin disposed over a semiconductor substrate and extending in a first direction;
an isolation insulating layer disposed between the first semiconductor fin and the second semiconductor fin;
a wall fin extending in the first direction; and
a first source/drain epitaxial layer disposed over a source/drain region of the first semiconductor fin and a second source/drain epitaxial layer disposed over a source/drain region of the second semiconductor fin, wherein:
the first source/drain epitaxial layer and the second source/drain epitaxial layer are separated by the wall fin,
the wall fin includes a lower dielectric layer and an upper dielectric layer disposed over the lower dielectric layer and made of a different material than the lower dielectric layer, and
the upper dielectric layer includes a dielectric material having a dielectric constant higher than the lower dielectric layer and the isolation insulating layer.
2. The semiconductor device of claim 1 , wherein the upper dielectric layer includes at least one selected from the group consisting of HfO 2 , HfSiO, HfSiON, HfTaO, HfTiO, HfZrO, zirconium oxide, aluminum oxide, titanium oxide, and a hafnium dioxide-alumina (HfO 2 —Al 2 O 3 ) alloy.
3. The semiconductor device of claim 2 , wherein an interface between the lower dielectric layer and the upper dielectric layer in the wall fin is located above an upper surface of the isolation insulating layer.
4. The semiconductor device of claim 3 , wherein
a gate structure is disposed over a channel region of the first semiconductor fin and a channel region of the second semiconductor fin and extending in a second direction crossing the first direction, and
the interface between the lower dielectric layer and the upper dielectric layer in the wall fin is located below a level where at least one of first source/drain epitaxial layer and the second source/drain epitaxial layer has a widest width along the second direction.
5. The semiconductor device of claim 2 , wherein an interface between the lower dielectric layer and the upper dielectric layer in the wall fin is located below an upper surface of the isolation insulating layer.
6. The semiconductor device of claim 1 , wherein the lower dielectric layer includes at least one selected from the group consisting of silicon nitride, silicon oxynitride, SiOC and SiOCN.
7. The semiconductor device of claim 1 , wherein a top of the wall fin is located below a top of the channel region of each of the first semiconductor fin and the second semiconductor fin.
8. The semiconductor device of claim 1 , wherein an interface between the source/drain region of the first semiconductor fin and the first source/drain epitaxial layer is located below an upper surface of the isolation insulating layer.
9. A semiconductor device comprising:
a first semiconductor fin and a second semiconductor fin disposed over a semiconductor substrate;
an isolation insulating layer disposed between the first semiconductor fin and the second semiconductor fin;
a wall fin extending in the first direction, wherein a lower portion of the wall fin is embedded in the isolation insulating layer and an upper portion of the wall fin protrudes from the isolation insulating layer;
a gate structure disposed over a channel region of the first semiconductor fin and a channel region of the second semiconductor fin;
a first source/drain epitaxial layer disposed over a source/drain region of the first semiconductor fin and a second source/drain epitaxial layer disposed over a source/drain region of the second semiconductor fin; and
a first fin liner layer disposed on a bottom part of the first source/drain epitaxial layer, and a second fin liner layer disposed on a bottom part of the second source/drain epitaxial layer, wherein:
the first source/drain epitaxial layer and the second source/drain epitaxial layer are separated by the wall fin,
the wall fin includes a lower dielectric layer and an upper dielectric layer disposed over the lower dielectric layer and made of a different material than the lower dielectric layer, and
the upper dielectric layer, the lower dielectric layer and the isolation insulating layer are made of different material from each other.
10. The semiconductor device of claim 9 , wherein the upper dielectric layer includes doped or non-doped hafnium oxide.
11. The semiconductor device of claim 10 , wherein the lower dielectric layer includes silicon nitride.
12. The semiconductor device of claim 11 , wherein the fin liner layers include silicon nitride.
13. The semiconductor device of claim 9 , wherein an interface between the lower dielectric layer and the upper dielectric layer in the wall fin is located above an upper surface of the isolation insulating layer.
14. The semiconductor device of claim 13 , wherein the interface between the lower dielectric layer and the upper dielectric layer in the wall fin is located above a top of the fin liner layers.
15. The semiconductor device of claim 13 , wherein the interface between the lower dielectric layer and the upper dielectric layer in the wall fin is located below a level where at least one of the first source/drain epitaxial layer and the second source/drain epitaxial layer has a widest width along a gate extending direction.
16. The semiconductor device of claim 9 , wherein the first and second source/drain epitaxial layers are in contact with the upper portion of the wall fin.
17. The semiconductor device of claim 9 , wherein no void is formed below the lower dielectric layer in the wall fin.
18. A semiconductor device comprising:
semiconductor fins disposed over a semiconductor substrate and extending in a first direction;
an isolation insulating layer disposed over the semiconductor substrate;
wall fins disposed over the substrate, wherein a lower portion of each of the wall fins is embedded in the isolation insulating layer and an upper portion of the wall fin protrudes from the isolation insulating layer;
a gate structure disposed over a channel region of each of the semiconductor fins; and
source/drain epitaxial layers disposed over source/drain regions of the semiconductor fins, respectively, wherein:
the source/drain epitaxial layers are separated by the wall fins, respectively, from an adjacent source/drain epitaxial layer,
each of the wall fins includes a lower dielectric layer and an upper dielectric layer disposed over the lower dielectric layer and made of a different material than the lower dielectric layer, and
the upper dielectric layer includes a dielectric material having a dielectric constant higher than the lower dielectric layer and the isolation insulating layer.
19. The semiconductor device of claim 18 , wherein the gate structure is disposed over the wall fins.
20. The semiconductor device of claim 18 , wherein the upper dielectric layer includes doped or non-doped hafnium oxide.