Method for forming recesses in a substrate by etching dummy fins
An integrated circuit structure includes a semiconductor substrate having a plurality of semiconductor strips, a first recess being formed by two adjacent semiconductor strips among the plurality of semiconductor strips, a second recess being formed within the first recess, and an isolation region being provided in the first recess and the second recess. The second recess has a lower depth than the first recess.
1. A method comprising:
forming a first semiconductor strip and a second semiconductor strip protruding higher than a top surface of a bulk portion of a semiconductor substrate, wherein the first semiconductor strip comprises:
a base; and
a plurality of additional semiconductor strips over and joining to the base;
forming a lithography mask extending into a gap between the first semiconductor strip and the second semiconductor strip, wherein the lithography mask fills gaps between the plurality of additional semiconductor strips, wherein sidewalls of the first semiconductor strip and the second semiconductor strip are in physical contact with the lithography mask; and
removing the first semiconductor strip through etching to form a first recess, wherein the first recess extends from the top surface of the bulk portion down into the bulk portion, wherein the etching is performed using the lithography mask to define patterns, wherein before the first semiconductor strip is etched, a top surface of the base is at a top surface level, and wherein after the first semiconductor strip is etched, the lithography mask comprises a top surface lower than the top surface level.
2. The method of claim 1 , wherein the forming the first semiconductor strip is performed using a hard mask over the first semiconductor strip, wherein the lithography mask covers the hard mask, and wherein the method further comprises:
removing the hard mask and simultaneously etching a lower portion of the lithography mask downwardly.
3. The method of claim 1 , wherein the lithography mask comprises an under layer and an upper layer over the under layer, wherein when the first semiconductor strip is being removed through etching, the under layer is simultaneously etched downwardly.
4. The method of claim 1 , wherein at a time after the first recess is formed, the lithography mask protects sidewalls of the second semiconductor strip.
5. The method of claim 1 , wherein the first recess comprises a plurality of divots having a total count equal to a total count of the plurality of additional semiconductor strips.
6. The method of claim 1 , wherein the bulk portion of the semiconductor substrate comprises:
first portions directly underlying the plurality of additional semiconductor strips; and
second portions directly underlying the base and vertically offset from the plurality of additional semiconductor strips, wherein the first portions are etched deeper than the second portions.
7. The method of claim 1 , wherein the bulk portion of the semiconductor substrate comprises:
first portions directly underlying the plurality of additional semiconductor strips; and
second portions directly underlying the base and vertically offset from the plurality of additional semiconductor strips, wherein the first portions are etched shallower than the second portions.
8. The method of claim 1 further comprising:
after the first recess is formed, removing the lithography mask; and
filling a dielectric material into the first recess.
9. The method of claim 1 further comprising, when the first recess is formed, simultaneously forming a second recess, wherein a first one of the first recess has a U-shaped bottom, and a second one of the second recess has a V-shaped bottom.
10. A method comprising:
etching a semiconductor substrate to form:
a first semiconductor strip comprising a base and a plurality of semiconductor strips directly over the base, wherein the semiconductor substrate comprises a bulk portion directly underlying the first semiconductor strip, and wherein the first semiconductor strip comprises a first sidewall; and
a second semiconductor strip;
forming a patterned etching mask, wherein the patterned etching mask comprises a second sidewall contacting the first sidewall;
removing the first semiconductor strip using the patterned etching mask to define patterns;
etching the bulk portion of the semiconductor substrate to form a recess, wherein the recess is formed as comprising a plurality of divots; and
forming a dielectric region to fill the recess.
11. The method of claim 10 , wherein during the removing the first semiconductor strip, the patterned etching mask comprises a first top surface, and a second top surface lower than the first top surface, with both of the first top surface and the second top surface of the patterned etching mask being simultaneously recessed downwardly.
12. The method of claim 11 , wherein at a time the recess has been formed, the second top surface remains, and a portion of the patterned etching mask having the second top surface is on a sidewall of the second semiconductor strip.
13. The method of claim 12 , wherein at the time the recess has been formed, the second top surface is at a level between a top surface and a bottom surface of the base.
14. The method of claim 10 , wherein a portion of the patterned etching mask extends to a level lower than a top surface of the base of the first semiconductor strip.
15. The method of claim 14 , wherein the patterned etching mask extends to a bottom of the first semiconductor strip.
16. A method comprising:
forming a first semiconductor strip and a second semiconductor strip, and a semiconductor base directly underlying the first semiconductor strip and the second semiconductor strip, wherein the semiconductor base protrudes higher than a bulk portion of a semiconductor substrate;
forming a third semiconductor strip over the bulk portion of the semiconductor substrate;
performing an etching process to remove the first semiconductor strip, the second semiconductor strip, and the semiconductor base, wherein the etching process is performed using an etching mask, wherein the etching mask extends into gaps between the first semiconductor strip and the second semiconductor strip, and wherein during the etching process, both of a first top surface and a second top surface of the etching mask are recessed simultaneously, and wherein the second top surface is lower than the first top surface;
forming a dielectric region comprising a first portion extending into a recess left by the first semiconductor strip, the second semiconductor strip, and the semiconductor base;
recessing the dielectric region, with a top portion of the third semiconductor strip protruding higher than top surfaces of remaining portions of the dielectric region to form a semiconductor fin; and
forming a gate stack on the semiconductor fin.
17. The method of claim 16 further comprising continuing the etching process to remove a part of the bulk portion of the semiconductor substrate directly underlying the semiconductor base, so that the recess extends into the bulk portion of the semiconductor substrate, wherein the recess is formed as having a plurality of divots.
18. The method of claim 17 , wherein a first total count of the divots is equal to a second total count of semiconductor strips over the semiconductor base.
19. The method of claim 16 , wherein at a first intermediate time during the etching process, a portion of the etching mask is left between the first semiconductor strip and the second semiconductor strip, and wherein the portion of the etching mask covers a part of the semiconductor base.
20. The method of claim 19 , wherein at a second intermediate time during the etching process, the portion of the etching mask is removed.