Layout to reduce noise in semiconductor devices
View Patent ↗In some embodiments, a semiconductor device is provided. The semiconductor device includes an isolation structure disposed in a semiconductor substrate, where an inner perimeter of the isolation structure demarcates a device region of the semiconductor substrate. A gate is disposed over the device region, where an outer perimeter of the gate is disposed within the inner perimeter of the isolation structure. A first source/drain region is disposed in the device region and on a first side of the gate. A second source/drain region is disposed in the device region and on a second side of the gate opposite the first side. A silicide blocking structure partially covers the gate, partially covers the first source/drain region, and partially covers the isolation structure, where a first sidewall of the silicide blocking structure is disposed between first opposite sidewalls of the gate.
1 . A semiconductor device, comprising:
an isolation structure in a semiconductor substrate and demarcating a device region of the semiconductor substrate;
a first source/drain region in the device region;
a second source/drain region in the device region and spaced from the first source/drain region in a direction; and
a gate overlying the device region and between and bordering the first source/drain region and the second source/drain region,
wherein the gate has a maximum width less than a maximum width of the first source/drain region, wherein the maximum width of the gate extends laterally transverse to the direction, and wherein the maximum width of the first source/drain region extends laterally transverse to the direction from a first sidewall of the isolation structure to a second sidewall of the isolation structure that faces the first sidewall of the isolation structure.
2 . The semiconductor device according to claim 1 , wherein the maximum width of the first source/drain region is the same as a maximum width of the device region.
3 . The semiconductor device according to claim 1 , further comprising:
a silicide layer atop the first source/drain region, wherein a maximum width of the silicide layer is less than the maximum width of the gate.
4 . The semiconductor device according to claim 1 , further comprising:
a silicide layer atop the gate, wherein a maximum width of the silicide layer is less than the maximum width of the gate.
5 . The semiconductor device according to claim 1 , further comprising:
a silicide layer atop the gate and having a cross-shaped top layout.
6 . The semiconductor device according to claim 1 , further comprising:
four silicide blocking structures each overlying the isolation structure and a different corner of the gate.
7 . The semiconductor device according to claim 1 , wherein the maximum width of the gate and the maximum width of the first source/drain region extend laterally orthogonal to the direction.
8 . A semiconductor device, comprising:
an isolation structure in a semiconductor substrate and demarcating a device region of the semiconductor substrate;
a first source/drain region and a second source/drain region spaced from each other in a first direction and in the device region, and further extending from a first sidewall of the isolation structure to a second sidewall of the isolation structure in a second direction transverse to the first direction;
a silicide layer atop the first source/drain region and spaced from the first and second sidewalls of the isolation structure;
a gate overlying the device region, wherein the gate is between and borders the first and second source/drain regions and is between and spaced from the first and second sidewalls of the isolation structure when viewed top down.
9 . The semiconductor device according to claim 8 , further comprising an additional silicide layer atop the second source/drain region and spaced from the first and second sidewalls of the isolation structure.
10 . The semiconductor device according to claim 8 , further comprising:
an additional silicide layer directly between the gate and the first sidewall of the isolation structure when viewed top down, wherein the additional silicide layer is spaced from the silicide layer.
11 . The semiconductor device according to claim 8 , further comprising:
a contact via having a bottom surface recessed relative to a top surface of the gate and directly between the first sidewall of the isolation structure and the gate when viewed top down.
12 . The semiconductor device according to claim 8 , wherein the isolation structure has a third sidewall directly contacting the first source/drain region and extending from the first sidewall of the isolation structure to the second sidewall of the isolation structure.
13 . The semiconductor device according to claim 8 , further comprising:
a silicide blocking structure directly between the gate and the first sidewall of the isolation structure when viewed top down.
14 . The semiconductor device according to claim 8 , wherein the isolation structure comprises a shallow trench isolation (STI) structure.
15 . A semiconductor device, comprising:
an isolation structure in a semiconductor substrate and demarcating a device region of the semiconductor substrate;
a first source/drain region in the device region;
a second source/drain region in the device region and spaced from the first source/drain region;
a gate overlying the device region and between and bordering the first source/drain region and the second source/drain region; and
a first pickup region in the device region, wherein the first pickup region is between and borders the first and second source/drain regions and is between and borders the isolation structure and the gate.
16 . The semiconductor device according to claim 15 , wherein the first pickup region has a first doping type, and wherein the first and second source/drain regions have a second doping type opposite the first doping type.
17 . The semiconductor device according to claim 15 , further comprising:
a second pickup region in the device region, wherein the second pickup region is on an opposite side of the gate as the first pickup region, and wherein the second pickup region is between and borders the first and second source/drain regions and is between and borders the isolation structure and the gate.
18 . The semiconductor device according to claim 15 , wherein the gate comprises a gate dielectric layer and a gate electrode overlying the gate dielectric layer, and wherein the gate dielectric layer is spaced from the isolation structure.
19 . The semiconductor device according to claim 15 , wherein the gate comprises doped polysilicon, wherein corner portions of the gate at corners of the gate when viewed top down have a first doping type, and wherein a center portion of the gate at a center of the gate when viewed top down have a second doping type opposite the first doping type.
20 . The semiconductor device according to claim 19 , wherein the center portion has a cross shape when viewed top down.