IP Library › Granted Patent US 12,532,738
Granted Patent B2
US 12,532,738 · App. 17/818,437 · Granted Jan 20, 2026

Chip package structure with heat conductive layer

Inventors: Shin Chi (Hsinchu County, TW); Chien Hao Hsu (Zhubei, TW); Kuo-Chin Chang (Chiayi, TW); Cheng-Nan Lin (Hsinchu, TW); Mirng-Ji Lii (Sinpu Township, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H01L23/3735H01L21/4857H01L21/563H01L21/76877H01L23/3107H01L23/3675H01L24/13H01L24/14H01L24/29H01L24/32H01L2224/13026H01L2224/32225
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Quick Facts
Patent No.
US 12,532,738
App. No.
17/818,437
Granted
Jan 20, 2026
Kind
B2
Abstract

A chip package structure is provided. The chip package structure includes a substrate. The chip package structure includes a chip over the substrate. The chip package structure includes a first heat conductive layer between the heat-spreading wall structure and the chip. The chip package structure includes a second heat conductive layer over the chip and surrounded by the first heat conductive layer. The chip package structure includes a heat-spreading lid over the substrate and covering the heat-spreading wall structure, the first heat conductive layer, the second heat conductive layer, and the chip. The heat-spreading lid is bonded to the substrate, the heat-spreading wall structure, the first heat conductive layer, and the second heat conductive layer.

Claims (46)

1 . A chip package structure, comprising:

a substrate;

a chip over the substrate;

a heat-spreading wall structure over the substrate and spaced apart from the chip;

a first heat conductive layer between the heat-spreading wall structure and the chip, wherein the first heat conductive layer is made of a combination of polymer and metal;

a second heat conductive layer over the chip and surrounded by the first heat conductive layer, wherein the first heat conductive layer and the second heat conductive layer are made of different materials;

a heat-spreading lid over the substrate and covering the heat-spreading wall structure, the first heat conductive layer, the second heat conductive layer, and the chip, wherein the heat-spreading lid is bonded to the substrate, the heat-spreading wall structure, the first heat conductive layer, and the second heat conductive layer,

the heat-spreading lid comprises a top plate and a lid sidewall structure, the top plate is over the substrate, the heat-spreading wall structure, the first heat conductive layer, the second heat conductive layer, and the lid sidewall structure, the lid sidewall structure surrounds the heat-spreading wall structure, the first heat conductive layer, and the second heat conductive layer, a thickness of the lid sidewall structure continuously increases from the top plate toward the substrate, the lid sidewall structure has an inner wall and an outer wall, the inner wall faces heat-spreading wall structure, the outer wall faces away from the heat-spreading wall structure, the inner wall is perpendicular to a top surface of the substrate, and the outer wall is inclined; and

an interfacial layer between the second heat conductive layer and the chip, wherein the interfacial layer is thinner than the second heat conductive layer.

2 . The chip package structure as claimed in claim 1 , wherein a portion of the first heat conductive layer is between the second heat conductive layer and the heat-spreading wall structure.

3 . The chip package structure as claimed in claim 1 , wherein the entire second heat conductive layer is embedded in the first heat conductive layer.

4 . The chip package structure as claimed in claim 1 , further comprising:

a bump between the chip and the substrate; and

an underfill layer between the chip and the substrate and surrounding the bump, wherein the first heat conductive layer is between the underfill layer and the heat-spreading wall structure.

5 . The chip package structure as claimed in claim 4 , wherein a width of the first heat conductive layer decreases toward the substrate.

6 . The chip package structure as claimed in claim 1 , wherein the heat-spreading wall structure has a ring shape in a top view of the heat-spreading wall structure.

7 . The chip package structure as claimed in claim 1 , wherein the heat-spreading wall structure has a U-shape in a top view of the heat-spreading wall structure.

8 . The chip package structure as claimed in claim 1 , wherein the heat-spreading wall structure has a first portion and a second portion spaced apart from each other, and the chip is between the first portion and the second portion.

9 . The chip package structure as claimed in claim 8 , wherein the first portion has a first strip shape, and the second portion has a second strip shape.

10 . The chip package structure as claimed in claim 1 , wherein the first heat conductive layer is spaced apart from the chip.

11 . The chip package structure as claimed in claim 1 , wherein the first heat conductive layer is made of a silver paste.

12 . A chip package structure, comprising:

a substrate;

a chip over the substrate;

a heat-spreading wall structure over the substrate and spaced apart from the chip;

a first heat conductive layer between the heat-spreading wall structure and the chip;

a second heat conductive layer over the chip and embedded in the first heat conductive layer, wherein a first thermal conductivity of the second heat conductive layer is greater than a second thermal conductivity of the first heat conductive layer;

a heat-spreading lid bonded to the substrate, the heat-spreading wall structure, the first heat conductive layer, and the second heat conductive layer;

an interfacial layer between the second heat conductive layer and the heat-spreading lid, wherein the interfacial layer is thinner than the second heat conductive layer, the interfacial layer is a multilayer structure, and the interfacial layer comprises a nickel layer and a gold layer sequentially stacked over a lower surface of the heat-spreading lid; and

an adhesive layer between a top surface of the heat-spreading wall structure and the lower surface of the heat-spreading lid, wherein a first bottom surface of the interfacial layer is higher than a second bottom surface of the adhesive layer, the first bottom surface face the chip, and the second bottom surface face the top surface of the heat-spreading wall structure.

13 . The chip package structure as claimed in claim 12 , wherein a third thermal conductivity of the heat-spreading wall structure is greater than the second thermal conductivity of the first heat conductive layer.

14 . The chip package structure as claimed in claim 12 , wherein the first heat conductive layer is softer than the second heat conductive layer.

15 . The chip package structure as claimed in claim 12 , wherein the first heat conductive layer is in direct contact with the adhesive layer.

16 . The chip package structure as claimed in claim 12 , wherein there is an air gap between the heat-spreading wall structure and the heat-spreading lid.

17 . A chip package structure, comprising:

a substrate;

a chip over the substrate;

a heat-spreading wall structure over the substrate and spaced apart from the chip;

a first heat conductive layer between the heat-spreading wall structure and the chip;

a second heat conductive layer over the chip and embedded in the first heat conductive layer, wherein the first heat conductive layer is softer than the second heat conductive layer;

a heat-spreading lid covering the substrate, the heat-spreading wall structure, the first heat conductive layer, and the second heat conductive layer, wherein the heat-spreading lid comprises a top plate and a lid sidewall structure, the top plate is over the substrate, the heat-spreading wall structure, the first heat conductive layer, the second heat conductive layer, and the lid sidewall structure, and the lid sidewall structure surrounds the heat-spreading wall structure, the first heat conductive layer, and the second heat conductive layer, a thickness of the lid sidewall structure continuously increases from the top plate toward the substrate, the lid sidewall structure has an inner wall and an outer wall, the inner wall faces the heat-spreading wall structure, the outer wall faces away from the heat-spreading wall structure, the inner wall is perpendicular to the top surface of the substrate, and the outer wall is inclined;

an interfacial layer between the second heat conductive layer and the chip, wherein a width of the first heat conductive layer continuously decreases from a bottom surface of the interfacial layer to a top surface of the substrate;

a first adhesive layer between and in direct contact with the heat-spreading wall structure and the substrate; and

a second adhesive layer between and in direct contact with the heat-spreading lid and the substrate, wherein a first top surface of the first adhesive layer is lower than a second top surface of the second adhesive layer.

18 . The chip package structure as claimed in claim 17 , wherein a third top surface of the second heat conductive layer is lower than a fourth top surface of the first heat conductive layer.

19 . The chip package structure as claimed in claim 17 , wherein the first heat conductive layer contains silver.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2022
From: CHI, SHIN; HSU, CHIEN HAO; CHANG, KUO-CHIN; LIN, CHENG-NAN; LII, MIRNG-JI
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 060755/0294 →
Continuity (2)
Division 16654198 · Oct 16, 2019
Related Publication 20220384286A1 · Dec 1, 2022
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