IP Library › Granted Patent US 12,744,183
Granted Patent B2
US 12,744,183 · App. 18/413,975 · Granted Sep 22, 2026

Efficient energy recovery in a nanosecond pulser circuit

Inventors: James Prager (Seattle, WA); Timothy Ziemba (Bainbridge Island, WA); Kenneth Miller (Seattle, WA); Ilia Slobodov (Seattle, WA); Morgan Quinley (Seattle, WA)
Assignee: Eagle Harbor Technologies, Inc.
H01J37/32146H01J37/32091H01J37/32128H01J37/32174H01J37/32715H10P72/722
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Quick Facts
Patent No.
US 12,744,183
App. No.
18/413,975
Granted
Sep 22, 2026
Kind
B2
Abstract

Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.

Claims (13)

1 . A method comprising:

closing one or more switches to create a first pulse, the one or more switches are coupled with an energy storage capacitor and a primary side of a transformer, wherein the first pulse has a voltage greater than about 1 kV and pulse width less than about 1,000 ns, and the first pulse is introduced into a plasma deposition chamber via a secondary side of the transformer;

opening the one or more switches for period of time less than about 100 microseconds and allowing charge from the plasma deposition chamber to flow through an energy recovery circuit to the energy storage capacitor;

closing the one or more switches to create a second pulse that is introduced into the plasma deposition chamber via a secondary side of the transformer; and

opening the one or more switches for period of time less than about 100 microseconds and allowing charge from the plasma deposition chamber to flow through the energy recovery circuit to the energy storage capacitor.

2 . The method according to claim 1 , wherein the energy recovery circuit comprises an inductor and a diode in series.

3 . The method according to claim 1 , wherein charge flows from the plasma deposition chamber to the energy storage capacitor when the charge t of the plasma deposition chamber is greater than the charge of the energy storage capacitor.

4 . The method according to claim 1 , further comprising:

opening a bias compensation switch that is electrically coupled with the secondary side of the transformer and the plasma deposition chamber at substantially the same time when the one or more switches are closed; and

closing the bias compensation switch at substantially the same time when the one or more switches are open.

5 . The method according to claim 1 , further comprising:

opening an energy recovery switch within the energy recovery circuit at substantially the same time when the one or more switches are closed; and

closing the energy recovery switch at substantially the same time when the one or more switches are open.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2024
From: MILLER, KENNETH; PRAGER, JAMES; ZIEMBA, TIMOTHY; QUINLEY, MORGAN; SLOBODOV, ILIA
To: EAGLE HARBOR TECHNOLOGIES, INC.
Reel/Frame 066422/0517 →
Continuity (18)
Continuation 17667531 · Feb 8, 2022
Continuation 16737615 · Jan 8, 2020
Continuation In Part 16697173 · Nov 26, 2019
Continuation In Part 16524967 · Jul 29, 2019
Continuation 16523840 · Jul 26, 2019
Continuation In Part 16523840 · Jul 26, 2019
Provisional Application 62789523 · Jan 8, 2019
Provisional Application 62789526 · Jan 8, 2019
Provisional Application 62774078 · Nov 30, 2018
Provisional Application 62717523 · Aug 10, 2018
Provisional Application 62711464 · Jul 27, 2018
Provisional Application 62711406 · Jul 27, 2018
Provisional Application 62711334 · Jul 27, 2018
Provisional Application 62711468 · Jul 27, 2018
Provisional Application 62711347 · Jul 27, 2018
Provisional Application 62711457 · Jul 27, 2018
Provisional Application 62711467 · Jul 27, 2018
Related Publication 20240304417A1 · Sep 12, 2024
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