Semiconductor package including support member
There is provided a semiconductor package in which warpage of an interposer is prevented to improve product reliability. The semiconductor package includes a first substrate including a first insulating layer, and a first conductive pattern disposed in the first insulating layer, a semiconductor chip disposed on the first substrate, an interposer disposed on the semiconductor chip, wherein the interposer includes a second insulating layer, and a second conductive pattern disposed in the second insulating layer, a support member disposed on a bottom surface of the second insulating layer and in contact with an upper surface of the semiconductor chip, wherein the support member includes a first lower pad and a bump disposed under the first lower pad and a first connection member disposed between the first substrate and the interposer so as to connect the first conductive pattern and the second conductive pattern to each other.
1 . A semiconductor package comprising:
a first substrate including a first insulating layer, and a first conductive pattern disposed in the first insulating layer;
a semiconductor chip disposed on the first substrate;
an interposer disposed on the semiconductor chip,
wherein the interposer includes a second insulating layer, and a second conductive pattern disposed in the second insulating layer;
a support member disposed on a bottom surface of the second insulating layer and contacting an upper surface of the semiconductor chip,
wherein the support member includes a first lower pad and a bump disposed under the first lower pad; and
a first connection member disposed between the first substrate and the interposer and connecting the first conductive pattern to the second conductive pattern.
2 . The semiconductor package of claim 1 ,
wherein the bump includes a first end having a first area and a second end having a second area, the first end contacting the first lower pad, and the second end contacting the upper surface of the semiconductor chip,
wherein a first width of the first area is greater than a second width of the second area, and
wherein the first and second widths are measured in a direction parallel to the upper surface of the semiconductor chip.
3 . The semiconductor package of claim 1 ,
wherein the bump is sized to have a decreasing width in a direction from the interposer to the first substrate, and
wherein a width of the bump is measured in a direction parallel to an upper surface of the first substrate.
4 . The semiconductor package of claim 1 ,
wherein a distance from the upper surface of the semiconductor chip to a bottom surface of the interposer is selected from a range of 15 μm to 45 μm.
5 . The semiconductor package of claim 4 ,
wherein a distance from the upper surface of the first substrate to a bottom surface of the semiconductor chip is selected from a range of 15 μm to 45 μm.
6 . The semiconductor package of claim 1 ,
wherein a thickness of the interposer is selected from a range of 100 μm to 220 μm, and
wherein the thickness of the interposer is measured in a direction perpendicular to an upper surface of the first substrate.
7 . The semiconductor package of claim 1 ,
wherein the bump includes at least one of copper (Cu), copper alloy, nickel (Ni), nickel alloy, palladium (Pd), platinum (Pt), gold (Au), and cobalt (Co).
8 . The semiconductor package of claim 1 ,
wherein the bump includes a first end having a first area, and a second end having a second area,
wherein the first end contacts the first lower pad and the second end contacts the upper surface of the semiconductor chip,
wherein the first area has a first width and the second area has a second width,
wherein a third width of the first lower pad is equal to the first width of the first area,
wherein the second width of the second area is smaller than the first width of the first area, and
wherein the first to third widths are measured in a direction parallel to an upper surface of the first substrate.
9 . The semiconductor package of claim 1 ,
wherein the first substrate includes:
an upper passivation film covering an upper surface of the first insulating layer; and
a first upper pad disposed on the upper surface of the first insulating layer and exposed via an opening of the upper passivation film,
wherein the interposer includes:
a lower passivation film covering the bottom surface of the second insulating layer; and
a second lower pad disposed on the bottom surface of the second insulating layer and exposed via an opening of the lower passivation film, and
wherein the first connection member contacts the first upper pad and the second lower pad.
10 . The semiconductor package of claim 1 ,
wherein a distance from the upper surface of the semiconductor chip to a bottom surface of the interposer is smaller than or equal to a distance from an upper surface of the first substrate to a bottom surface of the semiconductor chip.
11 . A semiconductor package comprising:
a first substrate including a first insulating layer, and a first conductive pattern disposed in the first insulating layer;
a first semiconductor chip disposed on the first substrate;
a plurality of bumps, each bump including a first end having a first area and a second end having a second area,
wherein the second end contacts an upper surface of the first semiconductor chip and is disposed between the first end and the first semiconductor chip,
wherein a first width of the first area is greater than a second width of the second area, and
wherein the first and second widths are measured in a direction parallel to an upper surface of the first substrate;
an interposer disposed on the plurality of bumps, wherein the interposer includes a second insulating layer, and a second conductive pattern disposed in the second insulating layer; and
a first connection member disposed between the interposer and the first substrate, wherein the first connection member is spaced apart from the first semiconductor chip,
wherein the first connection member electrically connects the first conductive pattern to the second conductive pattern.
12 . The semiconductor package of claim 11 ,
further comprising:
a plurality of first lower pads, each first lower pad being disposed between the interposer and a first end of a corresponding bump of the plurality of bumps.
13 . The semiconductor package of claim 11 ,
wherein the interposer includes:
a lower passivation film covering a bottom surface of the second insulating layer; and
a first lower pad disposed on the bottom surface of the second insulating layer and exposed by an opening of the lower passivation film, and
wherein the first end protrudes in a direction from the interposer to the first semiconductor chip beyond a bottom surface of the lower passivation film.
14 . The semiconductor package of claim 11 ,
wherein each bump of the plurality of bumps includes at least one of copper (Cu), copper alloy, nickel (Ni), nickel alloy, palladium (Pd), platinum (Pt), gold (Au), and cobalt (Co).
15 . The semiconductor package of claim 11 ,
wherein the first connection member includes a plurality of first connection members that are arranged between the interposer and the first substrate, and
wherein a distance between adjacent two first connection members of the plurality of first connection members is different from a distance between adjacent two bumps of the plurality of bumps.
16 . The semiconductor package of claim 11 ,
wherein the plurality of bumps are disposed on the first semiconductor chip and arranged in at least one direction.
17 . The semiconductor package of claim 11 , further comprising:
a second semiconductor chip disposed on the interposer; and
a second connection member electrically connecting the second semiconductor chip to the second conductive pattern.
18 . A semiconductor package comprising:
a first substrate including a first insulating layer, and a first conductive pattern disposed in the first insulating layer;
a first semiconductor chip mounted on the first substrate;
an interposer disposed on the first substrate, and spaced apart from the first semiconductor chip, wherein the interposer includes a second insulating layer, and a second conductive pattern disposed in the second insulating layer;
a support member disposed on a bottom surface of the second insulating layer and contacting an upper surface of the first semiconductor chip, wherein the support member includes a first lower pad and a bump disposed under the first lower pad;
a first connection member disposed between the first substrate and the interposer, and spaced apart from the first semiconductor chip, wherein the first connection member connects the first conductive pattern to the second conductive pattern;
a second substrate disposed on the interposer; and
a second semiconductor chip mounted on the second substrate,
wherein the bump includes a first end having a first area, and a second end having a second area disposed under the first end,
wherein the first end of the bump contacts the first lower pad,
wherein a first width of the first area is greater than a second width of the second area, and
wherein the first and second widths of the bump are measured in a direction parallel to an upper surface of the first substrate.
19 . The semiconductor package of claim 18 ,
wherein a spacing from the upper surface of the first semiconductor chip to a bottom surface of the interposer is selected from a range of 5 μm to 45 μm, and
wherein a thickness of the interposer is selected from a range of 100 μm to 220 μm, the thickness of the interposer being measured in a direction perpendicular to the upper surface of the first substrate.