Method of forming probe card assembly
A probe card assembly has a probe contactor substrate having a plurality of probe contactor tips thereon and a probe card wiring board with an interposer disposed between the two. Support posts contacting the probe contactor substrate are vertically adjustable until secured by a locking mechanism which is coupled to the probe card wiring board. When the posts are secured in a fixed position, the position is one in which the plane of the plurality of probe contactor substrates is substantially parallel to a predetermined reference plane.
1. A method of assembling a probe card assembly comprising:
providing a probe card wiring board;
providing a first probe contactor substrate having a first plurality of tips and a second probe contactor substrate having a second plurality of tips;
disposing a sub-mount between the probe card wiring board and the first and second probe contactor substrates;
adjusting a first support structure for the first probe contactor substrate so that a plane of the first plurality of the probe contactor tips is substantially co-planar with a plane of the second plurality of probe contactor tips;
securing an end of the first support structure in a first locked position, wherein the first locked position is one in which a plane of the first plurality of probe contactor tips is co-planar with a plane of the second plurality of probe contactor tips;
vertically adjusting a second support structure for the sub-mount; and
securing an end of the second support structure in a second locked position, wherein the second locked position is one in which a plane of the first plurality of probe contactor tips is substantially parallel to a reference plane.
2. A method of assembling a probe card comprising:
providing a probe card wiring board;
determining a reference plane;
providing a first probe contactor substrate having a first plurality of tips and a second probe contactor substrate having a second plurality of tips;
disposing a sub-mount between the probe card wiring board and the first and second probe contactor substrates;
providing a plurality of support posts for adjusting the first and second probe contactor substrates and the sub-mount;
adjusting a first support post until a plane of the first plurality of probe contactor tips is substantially co-planar with a plane of the second plurality of probe contactor tips;
securing the first support post at a fixed position, wherein the first position is one in which a plane of the first plurality of probe contactor tips is co-planar with a plane of the second plurality of probe contactor tips;
vertically adjusting a second support post for the sub-mount; and
securing an end of the second support post in a second position, wherein the second position is one in which a plane of the first plurality of probe contactor tips is substantially parallel to the predetermined reference plane.
3. The method of claim 2 wherein securing the plurality of support posts includes securing the support post in a lock.
4. The method of claim 3 wherein the lock is coupled to the probe card wiring board.
5. The method of claim 3 wherein the lock is coupled to a stiffener, and the stiffener is coupled to the probe card wiring board.
6. The method of claim 2 wherein the adjusting is accomplished using a micrometer positioner.
7. The method of claim 2 wherein the securing includes applying an adhesive to the support post.
8. The method of claim 2 wherein the securing includes applying a set screw to the support post.
9. The method of claim 2 further including removably coupling the plurality of support post to the first and second probe contactor substrates.
10. A method of assembling a probe card assembly comprising:
coupling a plurality of probe contactors to a plurality of probe contactor substrates;
disposing a sub-mount between a probe card wiring board and the plurality of probe contactor coupled to the plurality of probe contactor substrates;
making the plurality of probe contactors coplanar by adjusting a first plurality of support structures on the plurality of probe contactor substrates;
fixedly securing the plurality of support structures in a first plurality of locks;
vertically adjusting a second plurality of support structures for the sub-mount; and
securing the second plurality of support structures in a second plurality of locks, wherein the second plurality of locks fixedly secure the plurality of probe contactors substantially parallel to a reference plane.
11. A method of assembling a probe card comprising:
aligning a sub-mount having a plurality of locks thereon such that it is aligned to a glass mask having a plurality of fiducial marks thereon;
aligning a diagonally opposed first contactor tip pattern on a first probe contactor substrate to a first pattern of the plurality of fiducial marks on the glass mask;
fixedly securing a first plurality of support posts on the first probe contactor substrate to at least a first portion of the plurality of locks;
aligning a diagonally opposed second contactor tip pattern on a second probe contactor substrate to a second pattern of the plurality of fiducial marks on the glass mask;
fixedly securing a second plurality of support posts on the second probe contactor substrate to at least a second portion of the plurality of locks.
12. The method of claim 3 , wherein the lock includes a collet.