Post and tip design for a probe contact
View Patent ↗The present invention relates to A microfabricated tip and post structure comprising a post having a rough top surface that diffuses incident light and a cross-section, and a tip, lithographically plated on the rough top surface of the post, having a smooth reflective surface appropriate for automatic vision recognition, and having a cross-section that is less than the cross-section of the post.
1. The method of creating a microfabricated structure, comprising:
lithographically pattern-plating a post on a surface of a microfabricated probe structure;
rough plating a top surface of the post to form a roughened surface, said roughened surface having an area, and said roughened surface having a property of at least one of diffusing, diffracting, or absorbing light;
lithographically pattern-plating a tip having a smaller area than the area of the roughened surface of the post on the top surface of the post, said tip having a reflective surface suitable for machine vision recognition.
2. The method of claim 1 , wherein the rough plating includes high current plating of a metal.
3. The method of claim 2 , wherein the metal is one of Ni, NiMn, NiCo, NiW, NiFe, CoW, or Cr.
4. The method of claim 1 , wherein the rough plating includes incorporating at least one additive into the plating.
5. The method of claim 4 , wherein the at least one additive comprises a Mn salt in a Ni Sufamate bath.
6. The method of claim 4 , wherein the at least one additive is a grain refiner.
7. The method of claim 1 , wherein the reflective surface is smooth.
8. A method of forming a microfabricated structure, comprising:
lithographically pattern-plating a post on a surface of a microfabricated probe structure;
lithographically pattern-plating a tip having a smaller area than the area of the top surface of the post on the top surface of the post creating an exposed portion of the top surface of the post and an unexposed portion of the top surface of the post, said tip having a smooth reflective surface appropriate for automatic vision recognition and side walls; and
plating a skirt over the exposed portion of the top surface of the post and at least over a portion of the side walls of the tip, said skirt having a property of one of diffusing light or absorbing light.
9. The method of claim 8 , further including plating the skirt so that it overhangs the top surface of the post.
10. The method of claim 8 , wherein the plating the skirt includes plating metal at a high current.
11. The method of claim 10 , wherein the metal is one of Ni, NiMn, NiCo, NiW, NiFe, CoW, or Cr.
12. The method of claim 8 , wherein the plating the skirt includes incorporating at least one additive into the plating.
13. The method of claim 12 , wherein the at least one additive comprises a Mn salt in a Ni Sufamate bath.
14. The method of claim 12 , wherein the at least one additive is a grain refiner.