Semiconductor device and method of forming pre-molded substrate to reduce warpage during die molding
View Patent ↗A semiconductor device has a substrate with a plurality of conductive vias formed through the substrate and conductive layer formed over the substrate. A first encapsulant is deposited over the substrate outside a die attach area of the substrate. The first encapsulant surrounds each die attach area over the substrate and the die attach area is devoid of the first encapsulant. A channel connecting adjacent die attach areas is also devoid of the first encapsulant. A first semiconductor die is mounted over the substrate within the die attach area after forming the first encapsulant. A second semiconductor die is mounted over the first die within the die attach area. An underfill material can be deposited under the first and second die. A second encapsulant is deposited over the first and second die and first encapsulant. The first encapsulant reduces warpage of the substrate during die mounting.
1. A semiconductor device, comprising:
a substrate including a die attach area;
a first encapsulant disposed over a surface of the substrate with the die attach area devoid of the first encapsulant;
a first semiconductor die disposed over the die attach area and electrically connected to the substrate; and
a second encapsulant deposited on the die attach area of the substrate and over and around the first encapsulant and first semiconductor die, wherein the second encapsulant extends under the first semiconductor die.
2. The semiconductor device of claim 1 , further including an underfill material deposited between the first semiconductor die and substrate.
3. The semiconductor device of claim 1 , further including a second semiconductor die disposed over the first semiconductor die.
4. The semiconductor device of claim 3 , further including a plurality of conductive vias formed through the first semiconductor die and electrically connected to the second semiconductor die.
5. The semiconductor device of claim 1 , further including a channel through the first encapsulant connecting adjacent die attach areas.
6. A semiconductor device, comprising:
a substrate;
a first encapsulant disposed over a surface of the substrate outside a die attach area of the substrate;
a first semiconductor die disposed over the substrate;
a plurality of bumps disposed in the die attach area and electrically connected to the semiconductor die; and
a second encapsulant deposited over the first semiconductor die and over and around the first encapsulant.
7. The semiconductor device of claim 6 , further including an underfill material deposited between the first semiconductor die and substrate.
8. The semiconductor device of claim 6 , wherein the second encapsulant extends under the first semiconductor die.
9. The semiconductor device of claim 6 , further including a second semiconductor die disposed over the first semiconductor die.
10. The semiconductor device of claim 6 , further including a channel through the first encapsulant connecting adjacent die attach areas.
11. The semiconductor device of claim 10 , further including:
a plurality of conductive vias formed through the first semiconductor die; and
a second semiconductor die disposed over the first semiconductor die and electrically connected to the conductive vias.
12. The semiconductor device of claim 6 , wherein a thickness of the first encapsulant is equal to or less than a height of the first semiconductor die.
13. A semiconductor device, comprising:
a substrate including conductive vias;
a first encapsulant deposited over the substrate and outside a die attach area of the substrate;
a first semiconductor die disposed within the die attach area and electrically connected to the conductive vias; and
an underfill material deposited between the first semiconductor die and substrate.
14. The semiconductor device of claim 13 , further including a channel through the first encapsulant connecting adjacent die attach areas.
15. The semiconductor device of claim 13 , further including a second encapsulant deposited over the first semiconductor die.
16. The semiconductor device of claim 15 , wherein the second encapsulant extends under the first semiconductor die.
17. The semiconductor device of claim 13 , further including a second semiconductor die disposed over the first semiconductor die.
18. The semiconductor device of claim 17 , further including a plurality of second conductive vias formed through the first semiconductor die and electrically connected to the second semiconductor die.
19. A semiconductor device, comprising:
a substrate;
a first encapsulant disposed over a surface of the substrate outside a die attach area of the substrate, wherein the die attach area is devoid of the first encapsulant; and
a channel through the first encapsulant connecting adjacent die attach areas.
20. The semiconductor device of claim 19 , further including:
a first semiconductor die disposed over the substrate within the die attach area; and
a second encapsulant deposited over the first semiconductor die.
21. The semiconductor device of claim 20 , further including an underfill material deposited between the first semiconductor die and substrate.
22. The semiconductor device of claim 20 , wherein the second encapsulant extends under the first semiconductor die.
23. A semiconductor device, comprising:
a substrate;
a first encapsulant disposed over a surface of the substrate outside a die attach area of the substrate with a channel through the first encapsulant connecting adjacent die attach areas; and
a second encapsulant deposited in the die attach area.
24. The semiconductor device of claim 23 , further including a first semiconductor die disposed over the substrate within the die attach area.
25. The semiconductor device of claim 24 , further including a second semiconductor die disposed over the first semiconductor die.
26. The semiconductor device of claim 24 , further including:
a plurality of conductive vias formed through the first semiconductor die; and
a second semiconductor die disposed over the first semiconductor die and electrically connected to the conductive vias.