Polishing pad with concentric or approximately concentric polygon groove pattern
View Patent ↗Polishing pads with concentric or approximately concentric polygon groove patterns are described. Methods of fabricating polishing pads with concentric or approximately concentric polygon groove patterns are also described.
1. A polishing pad for polishing a substrate, the polishing pad comprising:
a polishing body having a polishing surface and a back surface, the polishing surface having a pattern of grooves comprising concentric or approximately concentric polygons, the pattern of grooves having no radial groove continuous from the inner most polygon to the outer most polygon, wherein all internal angles of each polygon are greater than 90 degrees, wherein each of the polygons has the same number of edges, and wherein the number of edges is determined by the diameter of the polishing pad or by the diameter of the substrate.
2. The polishing pad of claim 1 , wherein the diameter of the polishing pad is approximately 30 inches, the diameter of the substrate is approximately 12 inches, and the polygons are hexadecagons.
3. The polishing pad of claim 1 , wherein the diameter of the polishing pad is approximately 20 inches, the diameter of the substrate is approximately 8 inches, and the polygons are decagons.
4. The polishing pad of claim 1 , wherein the length of each edge of the outer most polygon is approximately in the range of 50-60% of the length of the diameter of the substrate.
5. The polishing pad of claim 1 , wherein the pattern of grooves has no radial grooves.
6. The polishing pad of claim 1 , wherein the pattern of grooves further comprises a radial groove between two successive polygons of the concentric or approximately concentric polygons.
7. The polishing pad of claim 1 , wherein each polygon of the concentric or approximately concentric polygons has no degree of rotation relative to its successive polygon.
8. The polishing pad of claim 1 , wherein one or more of the polygons has a degree of rotation relative to its successive polygon.
9. The polishing pad of claim 8 , wherein the degree of rotation is determined by the total number of concentric or approximately concentric polygons in the pattern of grooves.
10. The polishing pad of claim 8 , wherein the one or more polygons has a clockwise rotation relative to the successive polygon.
11. The polishing pad of claim 8 , wherein the one or more polygons has a counter-clockwise rotation relative to the successive polygon.
12. The polishing pad of claim 1 , wherein the polygons are concentric and the center of the concentric polygons is located at the center of the polishing pad.
13. The polishing pad of claim 1 , wherein the polygons are concentric and the center of the concentric polygons is offset from the center of the polishing pad.
14. The polishing pad of claim 1 , wherein the pattern of grooves further comprises one or more circular grooves interrupting the concentric polygons, the polygons are concentric, and the center of each circular groove is located at the center of the concentric polygons.
15. The polishing pad of claim 1 , wherein one or more of the polygons is distorted.
16. The polishing pad of claim 1 , further comprising:
a local area transparency (LAT) region disposed in the polishing body, the LAT region interrupting the pattern of grooves.
17. The polishing pad of claim 1 , the polishing surface further comprising an indication region indicating the location of a detection region disposed in the back surface of the polishing pad, the indication region interrupting the pattern of grooves.
18. The polishing pad of claim 1 , wherein the polishing body is a homogeneous polishing body comprising a thermoset polyurethane material.
19. The polishing pad of claim 1 , wherein the polishing body is a molded polishing body.