Grooved CMP pads
View Patent ↗CMP pads having novel groove configurations are described. For example, described herein are CMP pads comprising primary grooves, secondary grooves, a groove pattern center, and an optional terminal groove. The CMP pads may be made from polyurethane or poly (urethane-urea), and the grooves produced therein may be made by a method from the group consisting of molding, laser writing, water jet cutting, 3-D printing, thermoforming, vacuum forming, micro-contact printing, hot stamping, and mixtures thereof.
1. A CMP pad, comprising:
a) primary grooves; and
b) secondary grooves;
wherein said primary grooves are radial and said secondary grooves transect sectors as defined, in part, by the primary grooves and wherein the primary grooves are selected from straight grooves, curved grooves, or any combinations or portions thereof and the secondary grooves are on-set or off-set sinusoidal waveform grooves, or portions thereof.
2. The CMP pad of claim 1 , wherein the sectors are further defined by the outer edge of the CMP pad.
3. The CMP pad of claim 1 , wherein the sectors are further defined by an outermost terminal groove.
4. The CMP pad of claim 3 , wherein the outermost terminal groove is a circular groove sharing the same center as that of the CMP pad.
5. The CMP pad of claim 1 , wherein the primary grooves are straight.
6. The CMP pad of claim 1 , wherein the primary grooves are curved and are selected from logarithmic grooves, sinusoidal grooves, non-sinusoidal grooves, or any combinations or portions thereof.