Method of manufacturing a structure by asymmetrical ion bombardment of a capped underlying layer
A method of fabricating semiconductor fins, including, patterning a film stack to produce one or more sacrificial mandrels having sidewalls, exposing the sidewall on one side of the one or more sacrificial mandrels to an ion beam to make the exposed sidewall more susceptible to oxidation, oxidizing the opposite sidewalls of the one or more sacrificial mandrels to form a plurality of oxide pillars, removing the one or more sacrificial mandrels, forming spacers on opposite sides of each of the plurality of oxide pillars to produce a spacer pattern, removing the plurality of oxide pillars, and transferring the spacer pattern to the substrate to produce a plurality of fins.
1 . A method comprising:
forming a layer stack above a semiconductor substrate, comprising:
forming an underlying layer, wherein the underlying layer is an amorphous layer or a polycrystalline layer; and
forming a capping layer on the underlying layer;
forming a photoresist on the layer stack;
forming a pattern in the photoresist;
transferring the pattern in the photoresist to the capping layer and to the underlying layer to expose sidewalls of the underlying layer; and
asymmetrically bombarding portions of the underlying layer, comprising:
directing ions at a non-orthogonal angle with respect to a surface of the semiconductor substrate, wherein:
the directed ions bombard a first portion of the sidewalls of the underlying layer; and
a second portion of the sidewalls of the underlying layer is protected from ion bombardment by the capping layer.
2 . The method of claim 1 , wherein the capping layer protects an upper surface of the underlying layer.
3 . The method of claim 1 , wherein the underlying layer is an amorphous layer.
4 . The method of claim 1 , wherein the underlying layer is a polycrystalline layer.
5 . The method of claim 1 , wherein the underlying layer is an undoped amorphous layer.
6 . The method of claim 1 , wherein the underlying layer is a temporary layer that does not remain in a finished integrated circuit.
7 . The method of claim 1 , further comprising: oxidizing the underlying layer, wherein oxidation through the first portion of the sidewalls of the underlaying layer proceeds at a faster rate than oxidation through the second portion of the sidewalls of the underlaying layer.
8 . The method of claim 7 , further comprising: removing non-oxidized portions of the underlying layer.
9 . The method of claim 8 , further comprising: forming spacers on the semiconductor substrate, wherein the spacers are separated by widths defined by the oxidized portions of the underlying layer.
10 . The method of claim 9 , further comprising: using the spacers as a mask to transfer a pattern formed by the spacers into fins.
11 . A method of patterning a semiconductor structure comprising:
forming a layer stack above a semiconductor substrate, comprising:
forming an underlying layer, wherein the underlying layer is an amorphous layer or a polycrystalline layer; and
forming a capping layer on the underlying layer; and
asymmetrically modifying the underlying layer, comprising:
etching the layer stack to form a plurality of features in a first pattern, each feature having opposite first and second underlying layer sidewalls, wherein:
the features in the first pattern have a first pitch and a first spacing in a first direction parallel to a surface of the semiconductor substrate; and
each feature has a vertical axis of symmetry orthogonal to the semiconductor substrate; and
directing ions at a non-orthogonal angle with respect to the surface of the semiconductor substrate, wherein:
the directed ions bombard the first underlying layer sidewalls; and
the second underlying layer sidewalls are protected from ion bombardment by the capping layer, such that unbombarded portions of the underlying layer form sub-features in a second pattern, wherein:
the sub-features in the second pattern have the first pitch and a second spacing in the first direction greater than the first spacing;
each sub-feature has a vertical axis of symmetry orthogonal to the semiconductor substrate; and
the vertical axes of symmetry of the sub-features are laterally shifted from the vertical axes of symmetry of the features.
12 . The method of claim 11 , wherein the capping layer protects an upper surface of the underlying layer.
13 . The method of claim 11 , wherein the underlying layer is an amorphous layer.
14 . The method of claim 11 , wherein the underlying layer is a polycrystalline layer.
15 . The method of claim 11 , wherein the underlying layer is an undoped amorphous layer.
16 . The method of claim 11 , wherein the underlying layer is a temporary layer that does not remain in a finished integrated circuit.
17 . The method of claim 11 , further comprising: oxidizing the underlying layer, wherein oxidation through the first underlying layer sidewalls proceeds at a faster rate than oxidation through the second underlying layer sidewalls.
18 . The method of claim 17 , further comprising: removing non-oxidized portions of the underlying layer.
19 . The method of claim 18 , further comprising: forming spacers on the semiconductor substrate, wherein the spacers are separated by widths defined by the oxidized portions of the underlying layer.
20 . The method of claim 19 , further comprising: using the spacers as a mask to transfer a pattern formed by the spacers into fins.
21 . A method comprising:
forming a layer stack above a semiconductor substrate, comprising:
forming a dielectric layer;
forming an underlying layer on the dielectric layer; and
forming a capping layer on the underlying layer;
forming a photoresist on the layer stack;
forming a pattern in the photoresist;
transferring the pattern in the photoresist to the capping layer and to the underlying layer to expose sidewalls of the underlying layer; and
asymmetrically bombarding portions of the underlying layer, comprising:
directing ions at a non-orthogonal angle with respect to a surface of the semiconductor substrate, wherein:
the directed ions bombard a first portion of the sidewalls of the underlying layer along a vertical length extending between the capping layer and the dielectric layer; and
a second portion of the sidewalls of the underlying layer is protected from ion bombardment by the capping layer.
22 . A method comprising:
forming a layer stack above a semiconductor substrate, comprising:
forming an underlying layer, wherein the underlying layer is a temporary layer that does not remain in a finished integrated circuit; and
forming a capping layer on the underlying layer;
forming a photoresist on the layer stack;
forming a pattern in the photoresist;
transferring the pattern in the photoresist to the capping layer and to the underlying layer to expose sidewalls of the underlying layer; and
asymmetrically bombarding portions of the underlying layer, comprising:
directing ions at a non-orthogonal angle with respect to a surface of the semiconductor substrate, wherein:
the directed ions bombard a first portion of the sidewalls of the underlying layer; and
a second portion of the sidewalls of the underlying layer is protected from ion bombardment by the capping layer.