IP Library › Granted Patent US 12,178,055
Granted Patent B2
US 12,178,055 · App. 18/592,383 · Granted Dec 24, 2024

3D semiconductor memory devices and structures

Inventors: Zvi Or-Bach (Haifa, IL); Jin-Woo Han (San Jose, CA)
Assignee: Monolithic 3D Inc.
H10B80/00H01L24/08H01L24/80H01L25/0657H01L25/18H01L25/50H01L2224/08145H01L2224/80895H01L2224/80896H01L2924/1431H01L2924/14511
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Quick Facts
Patent No.
US 12,178,055
App. No.
18/592,383
Granted
Dec 24, 2024
Kind
B2
Abstract

A 3D semiconductor device, the device including: a first level including a first single crystal layer and a memory control circuit, the memory control circuit including a plurality of first transistors; a first metal layer overlaying the first single crystal layer; a second metal layer overlaying the first metal layer; a plurality of second transistors disposed atop the second metal layer; a third metal layer disposed atop the plurality of third transistors; and a memory array including word-lines and memory cells, where the memory array includes at least four memory mini arrays, where at least one of the plurality of second transistors includes a metal gate, where each of the memory cells includes at least one of the plurality of second transistors, where the memory control circuit includes at least one digital to analog converter circuit, and where the device includes a hybrid bonding layer.

Claims (110)

1. A 3D semiconductor device, the device comprising:

a first level comprising a first single crystal layer and a memory control circuit, said memory control circuit comprising a plurality of first transistors;

a first metal layer overlaying said first single crystal layer;

a second metal layer overlaying said first metal layer;

a plurality of second transistors disposed atop said second metal layer;

a third metal layer disposed atop said plurality of second transistors; and

a memory array comprising word-lines and memory cells,

wherein said memory array comprises at least four memory mini arrays,

wherein at least one of said plurality of second transistors comprises a metal gate,

wherein each of said memory cells comprises at least one of said plurality of second transistors, and

wherein said memory control circuit comprises at least one digital to analog converter circuit, and

wherein said device comprises a hybrid bonding layer.

2. The 3D semiconductor device according to claim 1 , further comprising:

a plurality of third transistors disposed atop said plurality of second transistors,

wherein at least one of said plurality of second transistors is self-aligned to at least one of said plurality of third transistors, being processed following a same lithography step.

3. The 3D semiconductor device according to claim 1 , further comprising:

an upper level disposed atop said third metal layer,

wherein said upper level comprises a mono-crystalline silicon layer.

4. A 3D semiconductor device, the device comprising:

a first level comprising a first single crystal layer and a memory control circuit, said memory control circuit comprising a plurality of first transistors;

a first metal layer overlaying said first single crystal layer;

a second metal layer overlaying said first metal layer;

a plurality of second transistors disposed atop said second metal layer;

a third metal layer disposed atop said plurality of second transistors;

a memory array comprising word-lines and memory cells,

wherein said memory array comprises at least four memory mini arrays,

wherein at least one of said plurality of second transistors comprises a metal gate,

wherein each of said memory cells comprises at least one of said plurality of second transistors, and

wherein said memory control circuit comprises at least one digital to analog converter circuit; and

an upper level disposed atop said third metal layer,

wherein said upper level comprises a mono-crystalline silicon layer.

5. The 3D semiconductor device according to claim 4 , further comprising:

a plurality of third transistors disposed atop said plurality of second transistors,

wherein at least one of said plurality of second transistors is self-aligned to at least one of said plurality of third transistors, being processed following a same lithography step.

6. The 3D semiconductor device according to claim 4 ,

wherein said device comprises a hybrid bonding layer.

7. A 3D semiconductor device, the device comprising:

a first level comprising a single crystal layer and a memory control circuit, said memory control circuit comprising a plurality of first transistors;

a first metal layer overlaying said first single crystal layer;

a second metal layer overlaying said first metal layer;

a plurality of second transistors disposed atop said second metal layer;

a third metal layer disposed atop said plurality of second transistors;

a memory array comprising word-lines and memory cells,

wherein said memory array comprises at least four memory mini arrays,

wherein at least one of said plurality of second transistors comprises a metal gate,

wherein each of said memory cells comprises at least one of said plurality of second transistors, and

wherein said memory control circuit comprises at least one cache memory circuit; and

a plurality of third transistors disposed atop said plurality of second transistors,

wherein at least one of said plurality of second transistors is self-aligned to at least one of said plurality of third transistors, being processed following a same lithography step.

8. The 3D semiconductor device according to claim 7 ,

wherein said device comprises a hybrid bonding layer.

9. The 3D semiconductor device according to claim 7 , further comprising:

an upper level disposed atop said third metal layer,

wherein said upper level comprises a mono-crystalline silicon layer.

10. A 3D semiconductor device, the device comprising:

a first level comprising a single crystal layer and a memory control circuit, said memory control circuit comprising a plurality of first transistors;

a first metal layer overlaying said first single crystal layer;

a second metal layer overlaying said first metal layer;

a plurality of second transistors disposed atop said second metal layer;

a third metal layer disposed atop said plurality of second transistors;

a memory array comprising word-lines and memory cells,

wherein said memory array comprises at least four memory mini arrays,

wherein at least one of said plurality of second transistors comprises a metal gate,

wherein each of said memory cells comprises at least one of said plurality of second transistors, and

wherein said memory control circuit comprises at least one cache memory circuit; and

an upper level disposed atop said third metal layer,

wherein said upper level comprises a mono-crystalline silicon layer.

11. The 3D semiconductor device according to claim 10 , further comprising:

a plurality of third transistors disposed atop said plurality of second transistors,

wherein at least one of said plurality of second transistors is self-aligned to at least one of said plurality of third transistors, being processed following a same lithography step.

12. The 3D semiconductor device according to claim 10 ,

wherein said device comprises a hybrid bonding layer.

13. A 3D semiconductor device, the device comprising:

a first level comprising a single crystal layer and a memory control circuit, said memory control circuit comprising a plurality of first transistors;

a first metal layer overlaying said first single crystal layer;

a second metal layer overlaying said first metal layer;

a plurality of second transistors disposed atop said second metal layer;

a third metal layer disposed atop said plurality of second transistors; and

a memory array comprising word-lines and memory cells,

wherein said memory array comprises at least four memory mini arrays,

wherein at least one of said plurality of second transistors comprises a metal gate,

wherein each of said memory cells comprises at least one of said plurality of second transistors,

wherein said memory control circuit comprises at least one cache memory circuit, and

wherein said device comprises a hybrid bonding layer.

14. The 3D semiconductor device according to claim 13 , further comprising:

a plurality of third transistors disposed atop said plurality of second transistors,

wherein at least one of said plurality of second transistors is self-aligned to at least one of said plurality of third transistors, being processed following a same lithography step.

15. The 3D semiconductor device according to claim 13 , further comprising:

an upper level disposed atop said third metal layer,

wherein said upper level comprises a mono-crystalline silicon layer.

16. A 3D semiconductor device, the device comprising:

a first level comprising a single crystal layer and a memory control circuit, said memory control circuit comprising a plurality of first transistors;

a first metal layer overlaying said first single crystal layer;

a second metal layer overlaying said first metal layer;

a plurality of second transistors disposed atop said second metal layer;

a plurality of third transistors disposed atop said plurality of second transistors;

a third metal layer disposed atop said plurality of third transistors; and

a memory array comprising word-lines,

wherein said memory array comprises at least four memory mini arrays,

wherein each of said at least four memory mini arrays comprises at least four rows by at least four columns of memory cells,

wherein at least one of said plurality of second transistors comprises a metal gate,

wherein each of said memory cells comprises at least one of said plurality of second transistors,

wherein said memory control circuit comprises at least one logic counter circuit, and

wherein said device comprises a hybrid bonding layer.

17. The 3D semiconductor device according to claim 16 , further comprising:

an upper level disposed atop said third metal layer,

wherein said upper level comprises a mono-crystalline silicon layer.

18. The 3D semiconductor device according to claim 16 , further comprising:

a plurality of third transistors disposed atop said plurality of second transistors,

wherein at least one of said plurality of second transistors is self-aligned to at least one of said plurality of third transistors, being processed following a same lithography step.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 2, 2024
From: OR-BACH, ZVI, MR.; HAN, JIN-WOO, DR.
To: MONOLITHIC 3D INC.
Reel/Frame 066627/0203 →
Continuity (15)
Continuation In Part 18385383 · Oct 31, 2023
Continuation In Part 17367385 · Jul 4, 2021
Continuation In Part 16786060 · Feb 10, 2020
Continuation In Part 16377238 · Apr 7, 2019
Continuation In Part 15911071 · Mar 2, 2018
Continuation In Part 15344562 · Nov 6, 2016
Continuation In Part 16797231 · Feb 21, 2020
Continuation In Part 16224674 · Dec 18, 2018
Continuation In Part 15761426
Provisional Application 62297857 · Feb 20, 2016
Provisional Application 62269950 · Dec 19, 2015
Provisional Application 62258433 · Nov 21, 2015
Provisional Application 62252448 · Nov 7, 2015
Provisional Application 62221618 · Sep 21, 2015
Related Publication 20240251572A1 · Jul 25, 2024
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