Semiconductor structure and method for manufacturing same
A semiconductor structure includes a substrate, bit line structures located on the substrate, capacitor contact holes located on each of two opposite sides of the bit line structure, and isolation side walls, each of the isolation side walls is located between a respective bit line structure and the capacitor contact holes on one side of the bit line structure. A gap isolation layer is provided between the isolation side walls located on two opposite sides of the bit line structure. The gap isolation layer is located on the bit line structure, and a first gap is provided inside the gap isolation layer. A second gap is provided between the isolation side wall and the gap isolation layer.
1. A semiconductor structure, comprising:
a substrate, bit line structures located on the substrate, and capacitor contact holes located on each of two opposite sides of the bit line structure;
isolation side walls, each of which is located between a respective bit line structure and the capacitor contact holes on one side of the bit line structure, wherein a gap isolation layer is provided between the isolation side walls located on two opposite sides of the bit line structure; the gap isolation layer is located on the bit line structure, and a first gap is provided inside the gap isolation layer; and a second gap is provided between one of the isolation side walls and the gap isolation layer; wherein
a top surface of the gap isolation layer is lower than a top surface of the isolation side wall.
2. The semiconductor structure of claim 1 , wherein
the second gap is also located between the isolation side wall and the bit line structure.
3. The semiconductor structure of claim 1 , further comprising:
a sacrificial side wall located between the isolation side wall and the bit line structure, wherein the sacrificial side wall covers a side wall of a conductive layer of the bit line structure; and the second gap exposes a top surface of the sacrificial side wall.
4. The semiconductor structure of claim 1 , wherein
the first gap and the second gap extend in an extending direction parallel to the bit line structure.
5. The semiconductor structure of claim 1 , wherein
in a direction perpendicular to a surface of the substrate, a thickness of the first gap is less than or equal to 100 nm.
6. A method for manufacturing a semiconductor structure, comprising:
providing a substrate and bit line structures located on the substrate, wherein each of the bit line structures comprises a top dielectric layer, and is provided with capacitor contact holes in each of two opposite sides of the bit line structure;
forming a sacrificial side wall covering a side wall of the top dielectric layer;
removing at least part of the top dielectric layer to form a first gap;
performing a deposition process to form a gap isolation layer with the first gap; and
forming an isolation side wall covering the sacrificial side wall, and removing at least part of the sacrificial side wall to form a second gap located between the isolation side wall and the gap isolation layer;
wherein
a top surface of the gap isolation layer is lower than a top surface of the isolation side wall;
and
after the second gap is formed, a second sealing layer that blocks a top opening of the second gap is formed; and the second sealing layer covers the top surface of the gap isolation layer.
7. The method for manufacturing a semiconductor structure of claim 6 , wherein
forming the gap isolation layer comprises: forming an enveloping layer covering the top surface of the top dielectric layer and a side wall of the sacrificial side wall, wherein the first gap is provided inside the enveloping layer; and forming a first sealing layer that blocks a top opening of the first gap, wherein the first sealing layer and the enveloping layer constitute the gap isolation layer.
8. The method for manufacturing a semiconductor structure of claim 7 , wherein
a deposition rate for forming the first sealing layer is greater than a deposition rate for forming the enveloping layer.
9. The method for manufacturing a semiconductor structure of claim 6 , wherein
removing at least part of the sacrificial side wall comprises: removing part of the sacrificial side wall, wherein remaining part of the sacrificial side wall covers a side wall of a conductive layer of the bit line structure.
10. The method for manufacturing a semiconductor structure of claim 6 , wherein
providing the bit line structures located on the substrate comprises:
providing, on the substrate, a bottom dielectric film, a first conductive film, a second conductive film, a top dielectric film, a first mask layer, a second mask layer and a third mask layer;
partially etching the second mask layer; and
etching the top dielectric film, the second conductive film, the first conductive film and the bottom dielectric film through the partially etched second mask layer to form the bit line structures.
11. The method for manufacturing a semiconductor structure of claim 10 , wherein
a hardness of the first mask layer is greater than a hardness of the second mask layer.
12. The method for manufacturing a semiconductor structure of claim 10 , wherein
the third mask layer is configured to define positions of the bit line structures.
13. The method for manufacturing a semiconductor structure of claim 12 , wherein
providing the bit line structures located on the substrate further comprises:
forming a fourth mask layer covering a top surface and side walls of the third mask layer and covering a top surface of the second mask layer to define, in a direction parallel to the substrate, a width of each bit line structure.