Method of manufacturing a FinFET with merged epitaxial source/drain regions
A device includes a first fin and a second fin extending from a substrate, the first fin including a first recess and the second fin including a second recess, an isolation region surrounding the first fin and surrounding the second fin, a gate stack over the first fin and the second fin, and a source/drain region in the first recess and in the second recess, the source/drain region adjacent the gate stack, wherein the source/drain region includes a bottom surface extending from the first fin to the second fin, wherein a first portion of the bottom surface that is below a first height above the isolation region has a first slope, and wherein a second portion of the bottom surface that is above the first height has a second slope that is greater than the first slope.
1. A method comprising:
forming a plurality of fins protruding from a semiconductor substrate;
forming an isolation region surrounding the plurality of fins;
forming a gate structure over the plurality of fins; and
forming an epitaxial source/drain region adjacent the gate structure and extending over the plurality of fins, comprising:
performing a first deposition process to deposit a first epitaxial material on the plurality of fins, wherein bottom surfaces of the first epitaxial material on adjacent fins merge at a first height above the isolation region;
performing an etching process on the first epitaxial material, wherein the etching process etches bottom surfaces of the first epitaxial material; and
after performing the etching process, performing a second deposition process to deposit a second epitaxial material on the first epitaxial material, the epitaxial source/drain region comprising the first epitaxial material and the second epitaxial material, wherein after performing the second deposition process, bottom surfaces of the epitaxial source/drain region between adjacent fins extend a second height above the isolation region that is greater than the first height.
2. The method of claim 1 , wherein the etching process etches {110} surfaces at a greater rate than {111} surfaces.
3. The method of claim 1 , wherein after performing the second deposition process, surfaces of the epitaxial source/drain region extending from the isolation region to a third height are {111} facets, wherein the third height is less than the first height.
4. The method of claim 1 , wherein the etching process reduces a lateral width of the first epitaxial material.
5. The method of claim 1 , wherein the etching process comprises an anisotropic dry etching process.
6. The method of claim 1 , wherein a top surface of the second epitaxial material is level.
7. The method of claim 1 , wherein upper surfaces of the first epitaxial material and bottom surfaces of the first epitaxial material are {111} facets.
8. The method of claim 1 , wherein laterally outermost surfaces of the first epitaxial material comprise {110} facets.
9. A method comprising:
forming a first fin and a second fin protruding from a semiconductor substrate;
performing a first epitaxial growth process to form a first epitaxial region on the first fin and a second epitaxial region on the second fin, wherein the upper surfaces and lower surfaces of the first epitaxial region and the second epitaxial region are {111} facets, wherein middle surfaces of the first epitaxial region and the second epitaxial region that are between the upper surfaces and the lower surfaces comprise {110} facets;
performing an anisotropic etching process to preferentially etch the {110} facets of the first epitaxial region and the second epitaxial region; and
performing a second epitaxial growth process to form a third epitaxial region on the first epitaxial region and the second epitaxial region, wherein the third epitaxial region continuously extends from the first epitaxial region to the second epitaxial region.
10. The method of claim 9 , wherein, after performing the first epitaxial growth process, the first epitaxial region and the second epitaxial region are merged at a first height above the semiconductor substrate.
11. The method of claim 10 , wherein, after performing the anisotropic etching process, the first epitaxial region and the second epitaxial region are unmerged.
12. The method of claim 10 , wherein, after performing the second epitaxial growth process, the first epitaxial region and the second epitaxial region are merged at a second height above the semiconductor substrate greater than the first height.
13. The method of claim 9 , wherein the middle surfaces comprise {111} facets.
14. The method of claim 9 , wherein the middle surfaces have a greater slope than the upper surfaces and the lower surfaces.
15. The method of claim 9 , wherein the anisotropic etching process etches the upper surfaces of the first epitaxial region and the second epitaxial region.
16. A method comprising:
forming a first fin and a second fin on a substrate;
forming a first epitaxial source/drain region on the first fin;
forming a second epitaxial source/drain region on the second fin, wherein the first epitaxial source/drain region and the second epitaxial source/drain region merge at a first height above the substrate;
etching upper surfaces and side surfaces of the first epitaxial source/drain region and the second epitaxial source/drain region using an etching process; and
depositing an epitaxial material on the first epitaxial source/drain region and the second epitaxial source/drain region to form an epitaxial structure comprising the first epitaxial source/drain region, the second epitaxial source/drain region, and the epitaxial material, wherein a bottom surface of the epitaxial structure has a slope turning point that is a second height above the substrate less than the first height, wherein the bottom surface has a first slope below the slope turning point and a second slope above the slope turning point that is greater than the first slope.
17. The method of claim 16 , wherein the second slope is in the range of 54.7° to 90°.
18. The method of claim 16 , wherein, after depositing the epitaxial material, the first epitaxial source/drain region and the second epitaxial source/drain region merge at a second height above the substrate that is greater than the first height.
19. The method of claim 18 , wherein the laterally outermost surface of the epitaxial structure is a third height above the substrate that is less than the second height.
20. The method of claim 16 , wherein the bottom surface below the slope turning point is a {111} facet.