Magnetoresistive random access memory
A semiconductor device includes: a substrate comprising a magnetic tunneling junction (MTJ) region and a logic region; a first MTJ on the MTJ region; a first metal interconnection on the logic region; and a cap layer extending from a sidewall of the first MTJ to a sidewall of the first metal interconnection. Preferably, the cap layer on the MTJ region and the cap layer on the logic region comprise different thicknesses.
1. A semiconductor device, comprising:
a substrate comprising a magnetic tunneling junction (MTJ) region and a logic region;
a first MTJ on the MTJ region;
a first metal interconnection on the logic region;
a cap layer extending from a sidewall of the first MTJ to a sidewall of the first metal interconnection; and
a passivation layer around the first MTJ and the second MTJ, wherein the passivation layer between the first MTJ and the second MTJ comprises a V-shape.
2. The semiconductor device of claim 1 , further comprising:
a first inter-metal dielectric (IMD) layer on the substrate;
a second metal interconnection and a third metal interconnection on the MTJ region, wherein the first MTJ is on the second metal interconnection and a second MTJ is on the third metal interconnection.
3. The semiconductor device of claim 2 , wherein the cap layer on the first IMD layer between the first MTJ and the second MTJ and the cap layer on the logic region comprise different thicknesses.
4. The semiconductor device of claim 3 , wherein a thickness of the cap layer on the first IMD layer on the logic region is less than a thickness of the cap layer on the first IMD layer between the first MTJ and the second MTJ.
5. The semiconductor device of claim 1 , further comprising a second IMD layer on the cap layer around the passivation layer.
6. The semiconductor device of claim 5 , wherein top surfaces of the second IMD layer and the passivation layer are coplanar.
7. The semiconductor device of claim 5 , wherein top surfaces of the second IMD layer and the first metal interconnection are coplanar.
8. The semiconductor device of claim 1 , wherein a thickness of the cap layer on the logic region is less than a thickness of the cap layer on the MTJ region.