Semiconductor device and method for manufacturing the same
A semiconductor device is provided. The semiconductor device includes a substrate having a trench and a gate structure in the trench. The trench includes an upper gate electrode, a capping layer on the upper gate electrode and a first dielectric layer partially disposed between the upper gate electrode and the capping layer.
1. A semiconductor device, comprising:
a substrate having a trench; and
a gate structure in the trench, wherein the gate structure comprising:
an upper gate electrode;
a capping layer on the upper gate electrode; and
a first dielectric layer partially disposed between the upper gate electrode and the capping layer;
wherein the gate structure further comprises:
a lower gate electrode spaced apart from the upper gate electrode;
a second dielectric layer partially disposed between the upper gate electrode and the lower gate electrode; and
a third dielectric layer disposed between the substrate and the lower gate electrode, wherein the second dielectric layer is disposed between the first dielectric layer and the third dielectric layer.
2. The semiconductor device of claim 1 , wherein a distance between the capping layer and the substrate is greater than a distance between the upper gate electrode and the substrate, and a width of the capping layer is less than a width of the upper gate electrode.
3. The semiconductor device of claim 1 , wherein the upper gate electrode is disposed between the first dielectric layer and the second dielectric layer.
4. The semiconductor device of claim 1 , wherein a thickness of the first dielectric layer and a thickness of the second dielectric layer are substantially equal.
5. The semiconductor device of claim 4 , wherein the thickness of the first dielectric layer and the thickness of the second dielectric layer are between about 1.5 nanometers (nm) and about 3.0 nm.
6. The semiconductor device of claim 1 , wherein a thickness of the first dielectric layer is substantially double a thickness of the second dielectric layer, and the thickness of the first dielectric layer is about 3.0 nm and the thickness of the second dielectric layer is about 1.5 nm.
7. The semiconductor device of claim 1 , wherein a thickness of the second dielectric layer is substantially double a thickness of the first dielectric layer, and the thickness of the second dielectric layer is about 3.0 nm and the thickness of the first dielectric layer is about 1.5 nm.
8. The semiconductor device of claim 1 , wherein a thickness of the third dielectric layer is substantially constant, and the thickness of the third dielectric layer is about 4.0 nm.
9. The semiconductor device of claim 1 , wherein the gate structure is disposed in an active region of the substrate.
10. The semiconductor device of claim 1 , wherein the gate structure is disposed in an isolation region of the substrate.