Method of forming semiconductor memory device
A method of forming a semiconductor memory device includes the following steps. First of all, a substrate is provided, and a plurality of gates is formed in the substrate, along a first direction. Next, a semiconductor layer is formed on the substrate, covering the gates, and a plug is then in the semiconductor layer, between two of the gates. Then, a deposition process is performed to from a stacked structure on the semiconductor layer. Finally, the stacked structure is patterned to form a plurality of bit lines, with one of the bit lines directly in contact with the plug.
1. A method of forming a semiconductor memory device, comprising:
providing a substrate;
forming a semiconductor layer on the substrate;
forming a protection layer on the semiconductor layer;
forming a plug hole in the semiconductor layer;
forming a conductive primary layer on the semiconductor layer to fill in the plug hole;
performing an etching process, to partially remove the conductive primary layer to form a conductive layer in the plug hole;
forming a conductive layer in the plug hole, wherein a peripheral top surface of the conductive layer is higher than a central top surface the conductive layer;
removing the protection layer after the etching process;
wherein the peripheral top surface of the conductive layer comprises a tapered protrusion after removing the protection layer, the tapered protrusion is protruded from the semiconductor layer, without directly contacting the semiconductor layer;
oxidizing the peripheral top surface and the central top surface of the conductive layer, to form an oxide layer; and
removing the oxide layer using a wet chemical cleaning process, to form a plug in the plug hole, wherein the plug comprises a planar top surface being coplanar with a top surface of the semiconductor layer.
2. The method of forming a semiconductor memory device according 10 to claim 1 , wherein oxidizing the peripheral top surface is performed after removing the protection layer.
3. The method of forming a semiconductor memory device according to claim 1 , further comprising: oxidizing the semiconductor layer while oxidizing the conductive layer, wherein the oxide layer is also formed on the semiconductor layer.
4. The method of forming a semiconductor memory device according to claim 3 , wherein oxidizing the semiconductor layer and the conductive layer is carried out by performing an oxygen treatment process.
5. The method of forming a semiconductor memory device according to claim 4 , wherein removing the oxide layer is carried out by performing the wet chemical cleaning process using hydrofluoric acid.
6. The method of forming a semiconductor memory device according to claim 1 , further comprising:
forming a stacked structure on the top surface of the semiconductor layer and the planar top surface of the plug; and patterning the stacked structure to form a plurality of bit lines, wherein one of the bit lines directly contacts the planar top surface of the plug.
7. The method of forming a semiconductor memory device according to claim 1 , before forming the semiconductor layer, further comprising:
forming a plurality of gates in the substrate, wherein the plug is formed between two adjacent ones of the gates.