Semiconductor substrate and method of dicing the same
There is provided a method of dicing a semiconductor wafer, which includes providing a semiconductor substrate having a plurality of integrated circuit regions on an active surface of the semiconductor substrate, a dicing regions provided between adjacent integrated circuit regions of the plurality of integrated circuit regions, and a metal shield layer provided on the active surface across at least a portion of the adjacent integrated circuit regions and the dicing region, forming a modified layer by irradiating laser to an inside of the semiconductor substrate along the dicing region, propagating a crack from the modified layer in a direction perpendicular to a major-axial direction of the metal shield layer by polishing an inactive surface opposing the active surface of the semiconductor substrate and forming semiconductor chips by separating the adjacent integrated circuit regions, respectively, based on the crack propagating from the modified layer.
1. A method of dicing a semiconductor wafer, the method comprising:
providing a semiconductor substrate having a plurality of integrated circuit regions on an active surface of the semiconductor substrate, a dicing region provided between adjacent integrated circuit regions of the plurality of integrated circuit regions, and a metal shield layer provided on the active surface across at least a portion of the adjacent integrated circuit regions and the dicing region;
forming a modified layer by irradiating laser to an inside of the semiconductor substrate along the dicing region;
propagating a crack from the modified layer in a direction perpendicular to a major-axial direction of the metal shield layer by polishing an inactive surface opposing the active surface of the semiconductor substrate; and
forming semiconductor chips by separating the adjacent integrated circuit regions, respectively, based on the crack propagating from the modified layer,
wherein the method comprises forming a plurality of vertical metal structures directly on the metal shield layer, the plurality of vertical metal structures extending in a minor-axial direction that is perpendicular to the active surface,
wherein, prior to the dicing, the metal shield layer is a continuous thin flat plate-type structure having a bottom side surface in direct contact with an upper surface of the semiconductor substrate, and all other side surfaces in direct contact with a semiconductor device layer formed on the semiconductor substrate, except for a portion of one of the side surface contacting the plurality of vertical metal structures, and
wherein the plurality of vertical metal structures continuously extend in the minor-axial direction through a plurality of dielectric layers and metal wiring layers.
2. The method of claim 1 , wherein,
the forming of the modified layer by irradiating the laser comprises preventing a spot generated due to leakage or scattering of the laser from spreading to the adjacent integrated circuit regions using the metal shield layer.
3. The method of claim 1 , wherein,
in the providing of the semiconductor substrate, a bottom surface of the metal shield layer is arranged to directly contact the active surface.
4. The method of claim 1 , wherein
the adjacent integrated circuit regions include a first integrated circuit region and a second integrated circuit region that are adjacent to each other,
the metal shield layer comprises a first metal shield layer corresponding to the first integrated circuit region and a second metal shield layer corresponding to the second integrated circuit region,
the first metal shield layer and the second metal shield layer are spaced apart from each other by a first interval, and
the first interval is less than a width of the dicing region.
5. The method of claim 4 , wherein
each of the first metal shield layer and the second metal shield layer includes a major axis that is parallel to the active surface and a minor axis that is perpendicular to the active surface, and
a ratio of a length of each of the first metal shield layer and the second metal shield layer in the major axis to a length of each of the first metal shield layer and the second metal shield layer in the minor axis is about 50:1 to about 200:1.
6. The method of claim 1 , wherein,
in a planar view, the metal shield layer is continuous across the adjacent integrated circuit regions with the dicing region therebetween, and
the crack penetrates the metal shield layer located in the dicing region.
7. The method of claim 6 , wherein
the metal shield layer covers the active surface corresponding to the dicing region.
8. The method of claim 1 , wherein,
in the providing of the semiconductor substrate, the metal shield layer includes single metal, and
a melting point of material forming the metal shield layer is higher than about 600° C.
9. The method of claim 1 , wherein
the semiconductor substrate is provided to include a plurality of metal vertical structures for inducing propagation of the crack are arranged on the metal shield layer.
10. The method of claim 9 , wherein,
in a planar view, the direction of the crack and a major-axial direction of each of the plurality of metal vertical structures are parallel to each other.
11. The method of claim 1 , wherein the plurality of dielectric layers and metal wiring layers form a stacked layer including a plurality of inter-layer insulating film and a plurality of metal wires alternatively arranged.
12. A method of dicing a semiconductor wafer, the method comprising:
providing a semiconductor substrate having a plurality of integrated circuit regions on an active surface of the semiconductor substrate, a dicing region provided between adjacent integrated circuit regions of the plurality of integrated circuit regions, and a metal shield layer formed on the active surface across at least a portion of the integrated circuit regions and the dicing region;
forming a modified layer by irradiating laser to an inside of the semiconductor substrate along the dicing region;
propagating a crack from the modified layer in a direction perpendicular to a major-axial direction of the metal shield layer by polishing an inactive surface opposing the active surface of the semiconductor substrate; and
forming semiconductor chips by separating the adjacent integrated circuit regions, respectively, based on the crack propagating from the modified layer,
wherein, in a cross-sectional view, the metal shield layer includes a first metal shield layer and a second metal shield layer with a space region therebetween in a location where the crack propagates,
each of the first metal shield layer and the second metal shield layer includes a major axis that is parallel to the active surface and a minor axis that is perpendicular to the active surface in the cross-sectional view, and
a length of the major axis is about 50 μm to about 100 μm, and a length of the minor axis is about 0.5 μm to about 1 μm,
wherein the method comprises forming a plurality of vertical metal structures directly on the metal shield layer, the plurality of vertical metal structures extending in a minor-axial direction that is perpendicular to the active surface, and
wherein, prior to the dicing, the metal shield layer is a continuous thin flat plate-type structure having a bottom side surface in direct contact with an upper surface of the semiconductor substrate, and all other side surfaces in direct contact with a semiconductor device layer formed on the semiconductor substrate, except for a portion of one of the side surface contacting the plurality of vertical metal structures, and
wherein the plurality of vertical metal structures continuously extend in the minor-axial direction through a plurality of dielectric layers and metal wiring layers.
13. The method of claim 12 , wherein,
the forming of the modified layer by irradiating the laser comprises preventing a spot generated due to leakage or scattering of the laser from spreading to the adjacent integrated circuit regions using the first metal shield layer and the second metal shield layer.
14. The method of claim 12 , wherein,
the adjacent integrated circuit regions include a first integrated circuit region and a second integrated circuit region that are adjacent to each other, and
in the forming of the semiconductor chips, in a plane view, the first metal shield layer has a rectangular shape arranged along a circumference of the first integrated circuit region, and the second metal shield layer has a rectangular shape arranged along a circumference of the second integrated circuit region that is adjacent to the first integrated circuit region.
15. The method of claim 12 , wherein,
in the providing of the semiconductor substrate, the first metal shield layer and the second metal shield layer have substantially same shape and same material as each other.
16. The method of claim 15 , wherein
the first metal shield layer and the second metal shield layer include aluminum.