Patent Assignment
Reel/Frame 006344/0708
Assignment of Assignors Interest.
Recorded: 1993-01-12
Pages: 3
Assignor
EPSILON TECHNOLOGY, INC.
Executed: 1993-01-04
Assignee
ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC.
3411 E. HARBOUR DRIVE, PHOENIX, ARIZONA, 85034
Covered Properties
(18)
Rotatable Substrate Supporting Mechanism with Temperature Sensing Device for Use in Chemical Vapor Deposition Equipment
Patent:
4,821,674 →
Application:
07/032,474 →
Apparatus and Method for Automated Wafer Handling
Patent:
4,813,732 →
Application:
07/037,098 →
Wafer Handling System with Bernoulli Pick-Up
Application:
07/048,630 →
Heating System for Reaction Chamber of Chemical Vapor Deposition Equipment
Patent:
4,836,138 →
Application:
07/063,409 →
Reaction Chambers for Cvd Systems
Patent:
4,846,102 →
Application:
07/065,945 →
Improved Gas Injectors for Reaction Chambers in Cvd Systems
Patent:
5,221,556 →
Application:
07/066,019 →
Chemical Vapor Deposition System
Patent:
4,828,224 →
Application:
07/108,771 →
Substrate Loading Apparatus for a Cvd Process
Patent:
5,092,728 →
Application:
07/315,332 →
Substrate Handling and Transporting Apparatus
Patent:
5,020,475 →
Application:
07/315,723 →
Heating System for Substrates
Patent:
4,975,561 →
Application:
07/319,260 →
Method for Improving the Reactant Gas Flow in a Reaction Chambers
Patent:
5,096,534 →
Application:
07/329,778 →
Rotatable Substrate Supporting Susciptor with Temperature Sensors
Patent:
4,996,942 →
Application:
07/330,200 →
Susceptor with Temperature Sensing Device
Patent:
4,993,355 →
Application:
07/339,310 →
Gas Injectors for Reaction Chambers in Cvd Systems
Application:
07/364,708 →
Chemical Vapor Deposition System
Application:
07/468,572 →
Apparatus for Improving the Reactant Gas Flow in a Reaction Chamber
Patent:
5,044,315 →
Application:
07/468,630 →
Drive Shaft Apparatus for a Susceptor
Patent:
5,117,769 →
Application:
07/539,062 →
Wafer Handling System with Bernoulli Pick-Up
Patent:
5,080,549 →
Application:
07/547,463 →
Related Assignments
(5)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignors Interest.
Oct 15, 1987
From: DE BOER, WIEBE B.
To: EPSILON TECHNOLOGY, INC., 2300 W. HUNTINGTON ROAD, CITY OF TEMPE, ARIZONA A CORP. OF ARIZONA
Reel/Frame 004811/0825 →
Assignment of Assignors Interest.
Oct 15, 1987
From: CRABB, RICHARD; ROBINSON, MC DONALD; HAWKINS, MARK R.; GOODWIN, DENNIS L.
To: EPSILON TECHNOLOGY, INC., 2300 W. HUNTINGTON ROAD, CITY OF TEMPE, ARIZONA A CORP. OF ARIZONA
Reel/Frame 004811/0827 →
Assignment of Assignors Interest.
Oct 15, 1987
From: OZIAS, ALBERT E.
To: EPSILON TECHNOLOGY, INC., 2300 W. HUNTINGTON ROAD, CITY OF TEMPE, ARIZONA A CORP. OF ARIZONA
Reel/Frame 004811/0829 →
Security Agreement
Jun 23, 1997
From: EPSILON TECHNOLOGY, INC., D/B/A ASM EPITAXY
To: IMPERIAL BANK
Reel/Frame 008553/0195 →
Change of Name
Jun 13, 2000
From: ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC.
To: ASM AMERICA, INC.
Reel/Frame 010881/0362 →