FINFET device with wrapped-around epitaxial structure and manufacturing method thereof
A semiconductor device includes a substrate and two fins protruding from the substrate. Each fin includes two source/drain (S/D) regions and a channel region. Each fin includes a top surface that remains flat across the S/D regions and the channel region. The semiconductor device also includes a gate stack engaging each fin at the respective channel region, a first dielectric layer on sidewalls of the gate stack, a first epitaxial layer over top and sidewall surfaces of the S/D regions of the two fins, and a second epitaxial layer over top and sidewall surfaces of the first epitaxial layer.
1. A semiconductor device comprising:
a substrate;
an isolation feature disposed on the substrate;
first and second fins protruding from the substrate and upwardly through the isolation feature, wherein each fin includes two source/drain (S/D) regions and a channel region, and each fin includes a top surface that remains flat across the S/D regions and the channel region;
a gate stack engaging each fin at the respective channel region;
a first dielectric layer on sidewalls of the gate stack;
a first epitaxial layer having a first portion over top and sidewall surfaces of the S/D regions of the first fin and a second portion over top and sidewall surfaces of the S/D regions of the second fin, wherein the first and second portions of the first epitaxial layer are spaced apart;
a second epitaxial layer having a first portion over top and sidewall surfaces of the first portion of the first epitaxial layer and a second portion over top and sidewall surfaces of the second portion of the first epitaxial layer, wherein the first and second portions of the second epitaxial layer are spaced apart, wherein the second epitaxial layer includes silicon germanium, wherein the second epitaxial layer is in physical contact with the isolation feature;
a contact feature disposed over the second epitaxial layer; and
a germano-silicide layer disposed vertically between the contact feature and the second epitaxial layer.
2. The semiconductor device of claim 1 , where the gate stack is a metal gate stack, further comprising:
a second dielectric layer disposed above the channel regions of the first and second fins, wherein the second dielectric layer is directly under both the first dielectric layer and the gate stack.
3. The semiconductor device of claim 2 , wherein the first dielectric layer comprises a nitride, and the second dielectric layer comprises an oxide.
4. The semiconductor device of claim 2 , wherein the second dielectric layer is in physical contact with the first epitaxial layer.
5. The semiconductor device of claim 1 , wherein a portion of the second epitaxial layer is laterally stacked between the first and second fins.
6. The semiconductor device of claim 1 , wherein the contact feature is disposed over at least a top surface and a side surface of the second epitaxial layer.
7. The semiconductor device of claim 1 , wherein a portion of the contact feature between the first and second fins extends under the top surface of each of the first and second fins.
8. The semiconductor device of claim 1 , further comprising:
a third dielectric layer in physical contact with sidewalls of the contact feature, wherein the third dielectric layer is spaced apart from the second epitaxial layer.
9. The semiconductor device of claim 1 , wherein the first epitaxial layer also includes silicon germanium.
10. A semiconductor device comprising:
a substrate;
an isolation structure over the substrate;
first and second fins extending from the substrate and through the isolation structure, wherein each fin includes two source/drain (S/D) regions and a channel region;
a gate stack engaging each fin at the respective channel region;
a first epitaxial layer over top and sidewall surfaces of the S/D regions of the first and second fins, wherein portions of the first epitaxial layer over the first and second fins laterally merge;
a second epitaxial layer over top and sidewall surfaces of the first epitaxial layer, wherein a portion of the second epitaxial layer is below a bottom surface of the first epitaxial layer between the first and second fins;
a contact feature disposed over the second epitaxial layer; and
a silicide feature disposed between the contact feature and the second epitaxial layer.
11. The semiconductor device of claim 10 , wherein the second epitaxial layer extends continuously from a position above the first fin to a position above the second fin.
12. The semiconductor device of claim 10 , wherein the first epitaxial layer is divided by the second epitaxial layer into a first portion wrapping the first fin and a second portion wrapping the second fin.
13. The semiconductor device of claim 10 , further comprising:
a dielectric layer below the bottom surface of the first epitaxial layer and above the isolation structure.
14. The semiconductor device of claim 10 , wherein each fin has a substantially flat top surface extending from the respective S/D regions to the channel region.
15. The semiconductor device of claim 10 , wherein the contact feature is disposed over top and sidewall surfaces of the second epitaxial layer.
16. The semiconductor device of claim 10 , wherein the contact feature is in physical contact with the isolation structure.
17. A semiconductor device comprising:
a substrate;
an isolation structure over the substrate;
a fin extending from the substrate and through the isolation structure;
a metal gate stack over a channel region of the fin;
a first epitaxial layer over top and sidewall surfaces of a source/drain (S/D) region of the fin;
an oxide layer directly under the metal gate stack, wherein the first epitaxial layer physically contacts the oxide layer;
a second epitaxial layer over top and sidewall surfaces of the first epitaxial layer;
a conductive feature over top and sidewall surfaces of the second epitaxial layer, wherein the conductive feature physically contacts the isolation structure; and
a silicide feature interposing the conductive feature and the second epitaxial layer.
18. The semiconductor device of claim 17 , wherein a top surface of the fin in the channel region and the S/D region is substantially flat.
19. The semiconductor device of claim 17 , wherein the second epitaxial layer includes germanium, and the silicide feature is a germano-silicide feature.
20. The semiconductor device of claim 17 , wherein a top surface of the first epitaxial layer is above a top surface of the oxide layer.