Semiconductor device structure having gate dielectric layers with different dielectric compositions and method of forming the same
A semiconductor device structure includes a semiconductor substrate, a first device formed in the first region of the semiconductor substrate and a second device formed in the second region of the semiconductor substrate. The first device includes a first gate structure on the semiconductor substrate. The first gate structure includes a first gate dielectric layer on the semiconductor substrate and a first gate layer on the first gate dielectric layer. The second device includes a second gate structure on the semiconductor substrate. The second gate structure includes a second gate dielectric layer on the semiconductor substrate and a second gate layer on the second gate dielectric layer. The first gate dielectric layer of the first device and the second gate dielectric layer of the second device have different dielectric material compositions.
1 . A semiconductor device structure, comprising:
a semiconductor substrate;
a first device formed in a first region of the semiconductor substrate, the first device comprising a first gate structure on the semiconductor substrate, wherein the first gate structure comprises:
a first gate dielectric layer on the semiconductor substrate, wherein the first gate dielectric layer is a single dielectric material layer; and
a first gate layer on the first gate dielectric layer; and
a second device formed in a second region of the semiconductor substrate, the second device comprising a second gate structure on the semiconductor substrate, wherein the second gate structure comprises:
a second gate dielectric layer on the semiconductor substrate; and
a second gate layer on the second gate dielectric layer,
wherein the first gate dielectric layer of the first device and the second gate dielectric layer of the second device have different dielectric material compositions,
wherein the second gate dielectric layer comprises a hafnium oxide (HfOx) layer and a lanthanum oxide (LaOx) layer stacked in sequence over the substrate;
a third device formed in a third region of the semiconductor substrate, the third device comprising a third gate structure on the semiconductor substrate, wherein the third gate structure comprises:
a third gate dielectric layer on the semiconductor substrate; and
a third gate layer on the third gate dielectric layer,
wherein the third gate dielectric layer and the first gate dielectric layer have different dielectric material compositions, and the third gate dielectric layer and the second gate dielectric layer have different dielectric material compositions,
wherein the third gate dielectric layer comprises a hafnium oxide (HfOx) layer, a first lanthanum oxide (LaOx) layer, and a second lanthanum oxide (LaOx) layer stacked in sequence over the substrate.
2 . The semiconductor device structure as claimed in claim 1 , wherein the first gate dielectric layer has a first dielectric constant, the second gate dielectric layer has a second dielectric constant, and the first dielectric constant is different from the second dielectric constant.
3 . The semiconductor device structure as claimed in claim 1 , wherein the first device and the second device are high-voltage metal oxide semiconductor (MOS) devices.
4 . The semiconductor device structure as claimed in claim 1 , wherein a first dielectric constant of the first gate dielectric layer and a second dielectric constant of the second gate dielectric layer are equal to or greater than 20.
5 . The semiconductor device structure as claimed in claim 4 , wherein the second dielectric constant of the second gate dielectric layer is greater than the first dielectric constant of the first gate dielectric layer.
6 . The semiconductor device structure as claimed in claim 1 , wherein the first gate dielectric layer has a first thickness, the second gate dielectric layer has a second thickness, and the first thickness is equal to the second thickness.
7 . The semiconductor device structure as claimed in claim 1 , wherein the first gate dielectric layer has a first thickness, the second gate dielectric layer has a second thickness, and the first thickness is different from the second thickness.
8 . The semiconductor device structure as claimed in claim 1 , wherein a first thickness of the first gate dielectric layer is in a range from 1 angstrom to 50 angstrom, and a second thickness of the second gate dielectric layer is in a range from 1 angstrom to 50 angstrom.
9 . The semiconductor device structure as claimed in claim 1 , wherein the second gate dielectric layer comprises multiple dielectric material layers.
10 . The semiconductor device structure as claimed in claim 9 , wherein the first gate dielectric layer and the second gate dielectric layer have a different number of the dielectric material layers.
11 . The semiconductor device structure as claimed in claim 9 , wherein the first gate dielectric layer and the second gate dielectric layer include the same number of the dielectric material layers.
12 . The semiconductor device structure as claimed in claim 1 , wherein the first gate layer of the first gate structure is a single n-type metal material layer, and the second gate layer of the second gate structure comprises multiple conductive material layers.
13 . The semiconductor device structure as claimed in claim 1 , wherein each of the first gate layer of the first gate structure and the second gate layer of the second gate structure comprises multiple conductive material layers.
14 . The semiconductor device structure as claimed in claim 13 , wherein the first gate layer of the first gate structure and the second gate layer of the second gate structure have a different number of the conductive material layers.
15 . The semiconductor device structure as claimed in claim 13 , wherein the first gate layer of the first gate structure and the second gate layer of the second gate structure include the same number of the conductive material layers.
16 . The semiconductor device structure as claimed in claim 13 , wherein the first gate layer of the first gate structure and the second gate layer of the second gate structure each comprises:
one or more p-type conductive material layers formed above the semiconductor substrate; and
a n-type metal material layer formed on the one or more p-type conductive material layers.
17 . The semiconductor device structure as claimed in claim 16 , wherein a thickness of the p-type metal material layer is in a range from 1 angstrom to 50 angstrom, and a thickness of the n-type metal material layer is in a range from 1 angstrom to 500 angstrom.
18 . The semiconductor device structure as claimed in claim 1 , wherein the first gate dielectric layer includes hafnium oxide (HfOx), lanthanum oxide (LaOx), hafnium silicon oxide (HfSiO), hafnium silicon oxynitride (HfSiON), hafnium tantalum oxide (HfTaO), hafnium titanium oxide (HfTiO), hafnium zirconium oxide (HfZrO), or a combination thereof.
19 . The semiconductor device structure as claimed in claim 1 , wherein the first gate dielectric layer has a first dielectric constant, the second gate dielectric layer has a second dielectric constant, and the third gate dielectric layer has a third dielectric constant, wherein the first dielectric constant, the second dielectric constant, and the third dielectric constant are different from each other.
20 . The semiconductor device structure as claimed in claim 1 , wherein each of the first dielectric constant, the second dielectric constant, and the third dielectric constant is equal to or greater than 20.
21 . The semiconductor device structure as claimed in claim 1 , wherein the first gate dielectric layer has a first thickness, the second gate dielectric layer has a second thickness, and the third gate dielectric layer has a third thickness, wherein the first thickness, the second thickness and the third thickness are different from each other.
22 . The semiconductor device structure as claimed in claim 1 , wherein at least one of the first gate dielectric layer, the second gate dielectric layer, and the third gate dielectric layer comprises multiple dielectric material layers.
23 . The semiconductor device structure as claimed in claim 22 , wherein the third gate dielectric layer and the second gate dielectric layer have a different number of the dielectric material layers.
24 . The semiconductor device structure as claimed in claim 1 , wherein one of the first gate layer, the second gate layer, and the third gate layer is a single n-type metal material layer, and the other gate layers comprise multiple conductive material layers.
25 . The semiconductor device structure as claimed in claim 1 , wherein the first gate layer, the second gate layer, and the third gate layer each has a different number of conductive material layers.
26 . The semiconductor device structure as claimed in claim 1 , wherein the first device further comprises a first source region and a first drain region at opposite sides of the first gate structure, and the second device further comprises a second source region and a second drain region at opposite sides of the second gate structure.
27 . The semiconductor device structure as claimed in claim 1 , wherein the first gate dielectric layer is in direct contact with the substrate, and the first gate dielectric layer has a dielectric constant equal to or greater than 20.
28 . A method of forming a semiconductor device structure, comprising:
providing a semiconductor substrate having a first region and a second region; and
forming a first device in the first region and a second device in the second region, wherein the first device comprises a first gate structure on the semiconductor substrate, the second device comprises a second gate structure on the semiconductor substrate, and forming the first gate structure comprises:
forming a first gate dielectric layer on the semiconductor substrate; and
forming a first gate layer on the first gate dielectric layer; and
forming the second gate structure comprises:
forming a second gate dielectric layer on the semiconductor substrate; and
forming a second gate layer on the second gate dielectric layer,
wherein the first gate dielectric layer of the first device and the second gate dielectric layer of the second device have different dielectric material compositions;
forming a third device in a third region of the semiconductor substrate, the third device comprising a third gate structure on the semiconductor substrate, wherein forming the third gate structure comprises:
forming a third gate dielectric layer on the semiconductor substrate; and
forming a third gate layer on the third gate dielectric layer,
wherein the third gate dielectric layer and the first gate dielectric layer have different dielectric material compositions, and the third gate dielectric layer and the second gate dielectric layer have different dielectric material compositions,
wherein the third gate dielectric layer comprises a hafnium oxide (HfOx) layer, a first lanthanum oxide (LaOx) layer, and a second lanthanum oxide (LaOx) layer stacked in sequence over the substrate.
29 . The method of forming the semiconductor device structure as claimed in claim 28 , wherein the first gate dielectric layer has a first dielectric constant, the second gate dielectric layer has a second dielectric constant, and the first dielectric constant is different from the second dielectric constant.
30 . The method of forming the semiconductor device structure as claimed in claim 28 , wherein the first device and the second device are high-voltage metal oxide semiconductor (MOS) devices.
31 . The method of forming the semiconductor device structure as claimed in claim 28 , wherein a first dielectric constant of the first gate dielectric layer and a second dielectric constant of the second gate dielectric layer are equal to or greater than 20.
32 . The method of forming the semiconductor device structure as claimed in claim 31 , wherein the second dielectric constant of the second gate dielectric layer is greater than the first dielectric constant of the first gate dielectric layer.
33 . The method of forming the semiconductor device structure as claimed in claim 28 , wherein the first gate dielectric layer has a first thickness, the second gate dielectric layer has a second thickness, and the first thickness is equal to the second thickness.
34 . The method of forming the semiconductor device structure as claimed in claim 28 , wherein the first gate dielectric layer has a first thickness, the second gate dielectric layer has a second thickness, and the first thickness is different from the second thickness.
35 . The semiconductor device structure as claimed in claim 28 , wherein the dielectric material layers of the second gate dielectric layer comprise different materials.