IP Library › Granted Patent US 10,333,623
Granted Patent B1
US 10,333,623 · App. 16/016,657 · Granted Jun 25, 2019

Optical transceiver

Inventors: Yu-Kuang Liao (Hsinchu, TW); Cheng-Chun Tsai (Hsinchu, TW); Chen-Hua Yu (Hsinchu, TW); Fang-Cheng Chen (Hsin-Chu, TW); Wen-Chih Chiou (Miaoli County, TW); Ping-Jung Wu (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H04B10/40G02B6/428G02B6/4283H01L33/56H01L33/62
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Quick Facts
Patent No.
US 10,333,623
App. No.
16/016,657
Filed
Jun 25, 2018
Granted
Jun 25, 2019
Kind
B1
Art Unit
2637
USPC
398/139
Abstract

An optical transceiver including a photonic integrated circuit component, an electric integrated circuit component and an insulating encapsulant is provided. The photonic integrated circuit component includes at least one optical input/output portion configured to transmit and receive optical signal. The electric integrated circuit component is disposed on and electrically connected to the photonic integrated circuit component. The insulating encapsulant covers the at least one optical input/output portion of the photonic integrated circuit component. The insulating encapsulant laterally encapsulates the electric integrated circuit component. The insulating encapsulant is optically transparent to the optical signal.

Claims (38)

1. An optical transceiver, comprising:

a photonic integrated circuit component comprising at least one optical input/output portion configured to transmit and receive optical signal, the photonic integrated circuit component comprising a first semiconductor substrate and a first interconnection structure on the first semiconductor substrate;

an electric integrated circuit component, disposed on and electrically connected to the photonic integrated circuit component, the electric integrated circuit component comprising a second semiconductor substrate and a second interconnection structure on the second semiconductor substrate, and the second interconnection structure being bonded with a portion of the first interconnection structure; and

an insulating encapsulant, covering the first interconnection structure and the at least one optical input/output portion of the photonic integrated circuit component, the insulating encapsulant encapsulating the electric integrated circuit component, and the insulating encapsulant being optically transparent to the optical signal.

2. The optical transceiver as claimed in claim 1 , wherein the second interconnection structure of the electric integrated circuit component is hybrid bonded with the portion of the first interconnection structure of the photonic integrated circuit component.

3. The optical transceiver as claimed in claim 1 , wherein the insulating encapsulant physically contacts sidewalls of the second interconnection structure and the second semiconductor substrate.

4. The optical transceiver as claimed in claim 1 , wherein the insulating encapsulant comprises a plurality of stacked dielectric layers, and the plurality of stacked dielectric layers are optically transparent to the optical signal.

5. The optical transceiver as claimed in claim 1 , wherein sidewalls of the insulating encapsulant are substantially aligned with sidewalls of the second semiconductor substrate and sidewalls of the second interconnection structure.

6. The optical transceiver as claimed in claim 1 further comprising:

a redistribution circuit layer disposed on the electric integrated circuit component and the insulating encapsulant, wherein the redistribution circuit layer is electrically connected to at least one through via of the electric integrated circuit component.

7. The optical transceiver as claimed in claim 6 further comprising:

a light source; and

an optical fiber adapter, wherein the light source and the optical fiber adapter are disposed on and electrically connected to the redistribution circuit layer and are located above the at least one optical input/output portion of the photonic integrated circuit component.

8. An optical transceiver, comprising:

a photonic integrated circuit component comprising an electrical bonding portion and at least one optical input/output portion configured to transmit and receive optical signal;

an electric integrated circuit component disposed on the electrical bonding portion of the photonic integrated circuit component and electrically connected to the photonic integrated circuit component;

an insulating encapsulant disposed on the optical input/output portion of the photonic integrated circuit component, wherein the electric integrated circuit component being encapsulated by the insulating encapsulant, and the insulating encapsulant being optically transparent to the optical signal; and

a redistribution circuit layer disposed on the electric integrated circuit component and the insulating encapsulant, wherein the redistribution circuit layer is electrically connected to the electric integrated circuit component.

9. The optical transceiver as claimed in claim 8 , wherein the electric integrated circuit component is hybrid bonded with the electrical bonding portion of the photonic integrated circuit component.

10. The optical transceiver as claimed in claim 8 , wherein the insulating encapsulant physically contacts sidewalls of the electric integrated circuit component.

11. The optical transceiver as claimed in claim 8 , wherein the insulating encapsulant comprises a plurality of stacked dielectric layers.

12. The optical transceiver as claimed in claim 8 , wherein a material of the insulating encapsulant comprises silicon oxide, silicon nitride, and/or tetraethoxysilane (TEOS).

13. The optical transceiver as claimed in claim 8 further comprising:

a light source; and

an optical fiber adapter, wherein the light source and the optical fiber adapter are disposed on the redistribution circuit layer and are located above the at least one optical input/output portion of the photonic integrated circuit component.

14. An optical transceiver, comprising:

a photonic integrated circuit component comprising an active surface, a rear surface opposite to the active surface, sidewalls, and at least one optical input/output portion configured to transmit and receive optical signal, the sidewalls connecting the active surface and the rear surface, and the at least one optical input/output portion being distributed on the active surface;

an electric integrated circuit component disposed on the rear surface of the photonic integrated circuit component, the electric integrated circuit component being electrically connected to the photonic integrated circuit component; and

an insulating encapsulant, covering the rear surface of the photonic integrated circuit component, the insulating encapsulant encapsulating the electric integrated circuit component, and outer sidewalls of the insulating encapsulant being substantially aligned with the sidewalls of the photonic integrated circuit component.

15. The optical transceiver as claimed in claim 14 , wherein the electric integrated circuit component is hybrid bonded with the rear surface of the photonic integrated circuit component.

16. The optical transceiver as claimed in claim 14 , wherein the insulating encapsulant physically contacts sidewalls of the electric integrated circuit component.

17. The optical transceiver as claimed in claim 14 , wherein the insulating encapsulant comprises a plurality of stacked dielectric layers, and the plurality of stacked dielectric layers are optically transparent to the optical signal.

18. The optical transceiver as claimed in claim 14 , wherein a material of the insulating encapsulant comprises silicon oxide, silicon nitride, and/or tetraethoxysilane (TEOS).

19. The optical transceiver as claimed in claim 14 further comprising:

a redistribution circuit layer disposed on the electric integrated circuit component and the insulating encapsulant, wherein the redistribution circuit layer is electrically connected to at least one through via of the electric integrated circuit component.

20. The optical transceiver as claimed in claim 14 further comprising:

a light source; and

an optical fiber adapter, wherein the light source and the optical fiber adapter are disposed on the active surface of the photonic integrated circuit component and are located above the at least one optical input/output portion of the photonic integrated circuit component.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 17, 2018
From: LIAO, YU-KUANG; TSAI, CHENG-CHUN; YU, CHEN-HUA; CHEN, FANG-CHENG; CHIOU, WEN-CHIH; WU, PING-JUNG
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 046363/0523 →
Cited By (31)
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