Granted Patent
B2
US 12,385,138 · App. 18/351,681 · Granted Aug 12, 2025
Plasma-enhanced deposition of film stacks
Inventors:
Jason Dirk Haverkamp (Tualatin, OR); Pramod Subramonium (Beaverton, OR); Joseph L. Womack (Tigard, OR); Dong Niu (West Linn, OR); Keith Fox (Tigard, OR); John B. Alexy (West Linn, OR); Patrick G. Breiling (Tigard, OR); Jennifer L. Petraglia (Lake Oswego, OR); Mandyam A. Sriram (San Jose, CA); George Andrew Antonelli (Portland, OR); Bart J. van Schravendijk (Palo Alto, CA)
Assignee:
Novellus Systems, Inc.
C23C16/50C23C16/24C23C16/345C23C16/402C23C16/4401C23C16/45512C23C16/45523C23C16/45565C23C16/45574C23C16/509C23C16/52C23C16/54H01J37/32137H01J37/32155H01L21/02123H01L21/02164H01L21/022H01L21/02274H01L21/6719H01L21/67201H01L21/67207
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Abstract
A method of depositing a film stack including films of different compositions in a process station using a plasma is described. The method includes: in a first plasma-activated film deposition phase, depositing a first film having a first film composition on a substrate, and, in a second plasma-activated deposition phase, depositing a second film having a second film composition on the first film, where the second film composition is different from the first film composition. Deposition of the first film can include delivering at least two first deposition phase reactants to the process station via a delivery line; and deposition of the second film can include delivering at least two second deposition phase reactants to the process station via the same delivery line that was used during deposition of the first film. The method may also include a step of purging the delivery line.
Claims (15)
1. A method for depositing, on a substrate, a film stack including films of different compositions in a process station using a plasma, the method comprising:
(a) in a first plasma-activated film deposition phase, depositing a first film having a first film composition on the substrate;
(b) in a second plasma-activated deposition phase, depositing a second film having a second film composition on the first film, wherein the second film composition is different from the first film composition, and wherein the second film comprises a different set of elements from the first film, wherein (a) comprises delivering at least two first deposition phase reactants to the process station via a delivery line; and (b) comprises delivering at least two second deposition phase reactants to the process station via the same delivery line that was used in (a); and
(c) purging the delivery line between (a) and (b) to remove the first deposition phase reactants from the delivery line.
2. The method of claim 1 , wherein the at least two first deposition phase reactants comprise a silicon-containing reactant and an oxygen-containing reactant, and wherein the at least two second deposition phase reactants comprise a silicon-containing reactant and a nitrogen-containing reactant.
3. The method of claim 1 , wherein the at least two first deposition phase reactants comprise a silicon-containing reactant and ammonia (NH 3 ), and the at least two second deposition phase reactants comprise a silicon-containing reactant and oxygen (O 2 ).
4. The method of claim 1 , wherein the at least two first deposition phase reactants comprise silane (SiH 4 ) and ammonia (NH 3 ), and the at least two second deposition phase reactants comprise TEOS (tetraethyl orthosilicate) and oxygen (O 2 ).
5. The method of claim 1 , wherein the first film and the second film are each selected from the group consisting of silicon nitride and silicon oxide.
6. The method of claim 1 , further comprising: sustaining the plasma while transitioning a composition of the plasma from a first plasma composition of the first plasma-activated film deposition phase to a second plasma composition of the second plasma-activated film deposition phase, wherein the second plasma composition is different from the first plasma composition.
7. The method of claim 6 , wherein sustaining the plasma includes maintaining a constant plasma volume.
8. The method of claim 6 , wherein sustaining the plasma includes maintaining a constant delivered power to the plasma.
9. The method of claim 1 , further comprising:
purging the process station with a purging gas after the first film deposition phase and before the second film deposition phase while sustaining the plasma during the purging of the process station.
10. The method of claim 1 , wherein (a) comprises generating a plasma using a low-frequency plasma source and a high-frequency plasma source, and wherein the low-frequency plasma source power is decreased from a higher power used during the first film deposition phase to a lower power or to zero power during purging of the process station after the first film deposition phase.
11. The method of claim 1 , further comprising repeating (a)-(c).
Continuity (8)
Provisional Application
61394707
· Oct 19, 2010
Provisional Application
61382465
· Sep 13, 2010
Provisional Application
61382468
· Sep 13, 2010
Provisional Application
61317656
· Mar 25, 2010
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