IP Library › Granted Patent US 12,421,398
Granted Patent B2
US 12,421,398 · App. 17/680,444 · Granted Sep 23, 2025

Durable anti-reflective articles

Inventors: Jaymin Amin (Corning, NY); Shandon Dee Hart (Elmira, NY); Karl William Koch, III (Elmira, NY); Eric Louis Null (Corning, NY); Xu Ouyang (Painted Post, NY); Charles Andrew Paulson (Painted Post, NY); James Joseph Price (Corning, NY)
Assignee: CORNING INCORPORATED
C09D5/006C03C17/3417C03C17/3435C03C21/002G02B1/115C03C2217/734C03C2217/78Y10T428/24355Y10T428/265
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,421,398
App. No.
17/680,444
Granted
Sep 23, 2025
Kind
B2
Abstract

Embodiments of durable, anti-reflective articles are described. In one or more embodiments, the article includes a substrate and an anti-reflective coating disposed on the major surface. The article exhibits an average light transmittance of about 94% or greater over an optical wavelength regime and/or an average light reflectance of about 2% or less over the optical wavelength regime, as measured from an anti-reflective surface. In some embodiments, the article exhibits a maximum hardness of about 8 GPa or greater as measured by a Berkovich Indenter Hardness Test along an indentation depth of about 50 nm or greater and a b* value, in reflectance, in the range from about −5 to about 1 as measured on the anti-reflective surface only at all incidence illumination angles in the range from about 0 degrees to about 60 degrees under an International Commission on Illumination illuminant.

Claims (62)

1. An anti-reflective article comprising:

a substrate having a major surface; and

an anti-reflective coating having a thickness of about 0.2 μm to about 1 μm disposed on the major surface, the anti-reflective coating comprising an anti-reflective surface, wherein the anti-reflective coating comprises a plurality of layers, the plurality of layers comprising at least one low refractive index (RI) layer and at least one high RI layer, and wherein a total physical thickness of the high RI layers is greater than 28% of the total physical thickness of the anti-reflective coating,

wherein each low RI layer is oxide-containing and has a refractive index from about 1.3 to about 1.7 and each high RI layer has a refractive index of greater than about 1.7,

wherein the at least one low RI layer includes one low RI layer of SiO 2 disposed on and in direct contact with the major surface of the substrate, the one low RI layer has a physical thickness of greater than 10 nm to less than 150 nm,

wherein the anti-reflective coating exhibits an average reflectance of about 2% or less over an optical wavelength regime from about 400 nm to about 800 nm,

wherein the anti-reflective surface exhibits an average light transmission of about 90% or greater over the optical wavelength regime,

wherein the anti-reflective coating exhibits an average hardness of about 5 GPa or greater as measured by a Berkovich Indenter Hardness Test along an indentation depth of about 50 nm to about 1000 nm, and

wherein each high RI layer consists of SiO x N y or Si u Al y O x N y .

2. The article of claim 1 , wherein the substrate comprises a glass selected from the group consisting of soda lime glass, alkali aluminosilicate glass, alkali containing borosilicate glass and alkali aluminoborosilicate glass.

3. The article of claim 1 , wherein the substrate is a crystalline substrate or a glass ceramic substrate.

4. The article of claim 1 , wherein the article exhibits either one or both:

article transmittance color coordinates in the (L*, a*, b*) colorimetry system at normal incidence under a D65 or F2 illuminant exhibiting a reference point color shift of less than about 2 from a reference point as measured at the anti-reflective surface, the reference point comprising at least one of the color coordinates (a*=0, b*=0) and the transmittance color coordinates of the substrate, and

article reflectance color coordinates in the (L*, a*, b*) colorimetry system at normal incidence under a D65 or F2 illuminant exhibiting a color shift of less than about 5 from a reference point as measured at the anti-reflective surface, the reference point comprising at least one of the color coordinates (a*=0, b*=0), the coordinates (a*=−2, b*=−2), and the reflectance color coordinates of the substrate,

wherein, when the reference point is the color coordinates (a*=0, b*=0), the color shift is defined by √((a* article ) 2 +(b* article ) 2 ),

wherein, when the reference point is the color coordinates (a*=−2, b*=−2), the color shift is defined by √((a* article +2) 2+ (b* article +2) 2 ), and

wherein, when the reference point is the color coordinates of the substrate, the color shift is defined by √((a* article −a* substrate ) 2 + (b*, article−b* substrate) 2 ).

5. The article of claim 1 , wherein the article exhibits an abrasion resistance comprising any one of:

about 1% haze or less, as measured using a hazemeter having an aperture, wherein the aperture has a diameter of about 8 mm,

an average roughness Ra, as measured by atomic force microscopy, of about 12 nm or less,

a scattered light intensity of about 0.05 (in units of 1/steradian) or less, at a polar scattering angle of about 40 degrees or less, as measured at normal incidence in transmission using an imaging sphere for scatter measurements, with a 2 mm aperture at 600 nm wavelength,

a scattered light intensity of about 0.1 (in units of 1/steradian) or less, at a polar scattering angle of about 20 degrees or less, as measured at normal incidence in transmission using an imaging sphere for scatter measurements, with a 2 mm aperture at 600 nm wavelength,

wherein the abrasion resistance is measured after a 500-cycle abrasion using a Taber Test.

6. An electronic product incorporating the article according to claim 1 , wherein the article is a cover article configured to: (a) protect devices within the product, (b) provide a user interface for input, and/or (c) provide a display.

7. An article comprising:

a substrate having a major surface; and

an anti-reflective coating having a physical thickness of from about 0.2 μm to about 1 μm disposed on the major surface, the anti-reflective coating comprising an anti-reflective surface, wherein the anti-reflective coating comprises a plurality of layers, the plurality of layers comprising at least one low refractive index (RI) layer and at least one high RI layer, and wherein a total physical thickness of the high RI layers is greater than 30% of the total physical thickness of the anti-reflective coating,

wherein each high RI layer consists of SiO x N y or Si u Al y O x N y ,

wherein the at least one low RI layer includes one low RI layer of SiO 2 disposed on and in direct contact with the major surface of the substrate and a physical thickness of greater than 10 nm and less than 150 nm,

wherein each low RI layer is oxide-containing and has a refractive index from about 1.3 to about 1.7 and each high RI layer has a refractive index of greater than about 1.7,

wherein the anti-reflective coating exhibits an average reflectance of about 2% or less over an optical wavelength regime from about 400 nm to about 800 nm,

wherein the anti-reflective surface exhibits an average light transmission of about 90% or greater over the optical wavelength regime, and

wherein the anti-reflective coating exhibits an average hardness of about 8 GPa or greater as measured by a Berkovich Indenter Hardness Test along an indentation depth of about 50 nm to about 1000 nm.

8. The article of claim 7 , wherein the anti-reflective coating comprises five (5) layers to seven (7) layers.

9. The article of claim 7 , wherein the substrate is a crystalline substrate or a glass ceramic substrate.

10. An electronic product incorporating the article according to claim 7 , wherein the article is a cover article configured to: (a) protect devices within the product, (b) provide a user interface for input, and/or (c) provide a display.

11. An article comprising:

a substrate having a major surface; and

an anti-reflective coating having a physical thickness of from about 0.2 μm to about 1 μm disposed on the major surface, the anti-reflective coating comprising an anti-reflective surface, wherein the anti-reflective coating comprises a plurality of alternating low and high refractive index layers that ranges from five (5) layers to seven (7) layers and comprises a first low refractive index (RI) layer of SiO 2 disposed on and in direct contact with the major surface, at least one additional low RI layer of SiO 2 , and wherein a total physical thickness of the high RI layers is greater than about 30% of the total physical thickness of the anti-reflective coating,

wherein each high RI layer consists of SiO x N y or Si u Al y O x N y ,

wherein the first low RI layer of SiO 2 disposed on and in direct contact with the major surface of the substrate has an optical thickness from about 15 nm to about 200 nm,

wherein each low RI layer is oxide-containing and has a refractive index from about 1.3 to about 1.7 and each high RI layer has a refractive index of greater than about 1.9,

wherein the anti-reflective coating exhibits an average reflectance of about 2% or less over an optical wavelength regime from about 400 nm to about 800 nm, and

wherein the anti-reflective surface exhibits an average light transmission of about 90% or greater over the optical wavelength regime.

12. The article of claim 11 , wherein a total physical thickness of the high RI layers is ≥200 nm.

13. The article of claim 11 , wherein the anti-reflective coating has a physical thickness of from about 350 nm to about 1 μm.

14. The article of claim 11 , wherein the anti-reflective coating has a physical thickness from about 0.2 μm to about 325 nm.

15. The article of claim 11 , wherein the substrate comprises a glass-ceramic substrate.

16. The article of claim 11 , wherein the article exhibits either one or both:

article transmittance color coordinates in the (L*, a*, b*) colorimetry system at normal incidence under a D65 or F2 illuminant exhibiting a reference point color shift of less than about 2 from a reference point as measured at the anti-reflective surface, the reference point comprising at least one of the color coordinates (a*−0, b*=0) and the transmittance color coordinates of the substrate, and

article reflectance color coordinates in the (L*, a*, b*) colorimetry system at normal incidence under a D65 or F2 illuminant exhibiting a color shift of less than about 5 from a reference point as measured at the anti-reflective surface, the reference point comprising at least one of the color coordinates (a*=0, b*=0), the coordinates (a*=−2, b*=−2), and the reflectance color coordinates of the substrate,

wherein, when the reference point is the color coordinates (a*=0, b*=0), the color shift is defined by √((a* article ) 2+ (b* article ) 2 ),

wherein, when the reference point is the color coordinates (a*=−2, b*=−2), the color shift is defined by √((a* article +2) 2 + (b* article +2) 2 ), and

wherein, when the reference point is the color coordinates of the substrate, the color shift is defined by √((a* article −a* substrate ) 2 + (b* article −b* substrate ) 2 ).

17. The article of claim 11 , wherein the article exhibits an abrasion resistance comprising any one of:

about 1% haze or less, as measured using a hazemeter having an aperture, wherein the aperture has a diameter of about 8 mm,

an average roughness Ra, as measured by atomic force microscopy, of about 12 nm or less,

a scattered light intensity of about 0.05 (in units of 1/steradian) or less, at a polar scattering angle of about 40 degrees or less, as measured at normal incidence in transmission using an imaging sphere for scatter measurements, with a 2 mm aperture at 600 nm wavelength,

a scattered light intensity of about 0.1 (in units of 1/steradian) or less, at a polar scattering angle of about 20 degrees or less, as measured at normal incidence in transmission using an imaging sphere for scatter measurements, with a 2 mm aperture at 600 nm wavelength,

wherein the abrasion resistance is measured after a 500-cycle abrasion using a Taber Test.

18. An electronic product incorporating the article according to claim 11 , wherein the article is a cover article configured to: (a) protect devices within the product, (b) provide a user interface for input, and/or (c) provide a display.

19. The article of claim 11 , wherein the anti-reflective coating exhibits an average hardness of about 5 GPa or greater as measured by a Berkovich Indenter Hardness Test along an indentation depth of about 50 nm to about 1000 nm.

Continuity (7)
Continuation 14707106 · May 8, 2015
Provisional Application 62098819 · Dec 31, 2014
Provisional Application 62098836 · Dec 31, 2014
Provisional Application 62028014 · Jul 23, 2014
Provisional Application 62010092 · Jun 10, 2014
Provisional Application 61991656 · May 12, 2014
Related Publication 20220251396A1 · Aug 11, 2022
References Cited (400)
US 3922068A · Uetsuki · 1975 [cited by applicant]
US 3934961A · Itoh et al. · 1976 [cited by applicant]
US 3989350A · Cohen et al. · 1976 [cited by applicant]
US 4033667A · Fleming, Jr. · 1977 [cited by applicant]
US 4137365A · Fletcher et al. · 1979 [cited by applicant]
US 4298366A · Dabby et al. · 1981 [cited by applicant]
US 4310595A · Beall et al. · 1982 [cited by applicant]
US 4423925A · Dabby et al. · 1984 [cited by applicant]
US 4495684A · Sander et al. · 1985 [cited by applicant]
US 4519966A · Aldinger et al. · 1985 [cited by applicant]
US 4537814A · Itoh et al. · 1985 [cited by applicant]
US 4568140A · Van et al. · 1986 [cited by applicant]
US 4571519A · Kawabata et al. · 1986 [cited by applicant]
US 4705356A · Berning et al. · 1987 [cited by applicant]
US 4826734A · Jackson et al. · 1989 [cited by applicant]
US 4851095A · Scobey et al. · 1989 [cited by applicant]
US 4896928A · Perilloux et al. · 1990 [cited by applicant]
US 4995684A · Tustison et al. · 1991 [cited by applicant]
US 5071206A · Hood et al. · 1991 [cited by applicant]
US 5138219A · Krisl et al. · 1992 [cited by applicant]
US 5178911A · Gordon et al. · 1993 [cited by applicant]
US 5234769A · Shevlin · 1993 [cited by applicant]
US 5268217A · Kimock et al. · 1993 [cited by applicant]
US 5300951A · Yamazaki · 1994 [cited by applicant]
US 5332888A · Tausch et al. · 1994 [cited by applicant]
US 5390274A · Toyoda et al. · 1995 [cited by applicant]
US 5393574A · Sulzbach · 1995 [cited by applicant]
US 5478634A · Setoyama et al. · 1995 [cited by applicant]
US 5503912A · Setoyama et al. · 1996 [cited by applicant]
US 5506038A · Knapp et al. · 1996 [cited by applicant]
US 5508092A · Kimock et al. · 1996 [cited by applicant]
US 5549953A · Li · 1996 [cited by applicant]
US 5567363A · Jung et al. · 1996 [cited by applicant]
US 5597622A · Zoeller et al. · 1997 [cited by applicant]
US 5635245A · Kimock et al. · 1997 [cited by applicant]
US 5637353A · Kimock et al. · 1997 [cited by applicant]
US 5643638A · Otto et al. · 1997 [cited by applicant]
US 5718773A · Shiozaki · 1998 [cited by applicant]
US 5719705A · Machol · 1998 [cited by applicant]
US 5766783A · Utsumi et al. · 1998 [cited by applicant]
US 5772862A · Ando et al. · 1998 [cited by applicant]
US 5773148A · Charrue et al. · 1998 [cited by applicant]
US 5811191A · Neuman · 1998 [cited by applicant]
US 5846650A · Ko et al. · 1998 [cited by applicant]
US 5935716A · Mccurdy et al. · 1999 [cited by applicant]
US 5938898A · Ando et al. · 1999 [cited by applicant]
US 6045894A · Jonza et al. · 2000 [cited by applicant]
US 6074730A · Laird et al. · 2000 [cited by applicant]
US 6077569A · Knapp et al. · 2000 [cited by applicant]
US 6088166A · Lee · 2000 [cited by applicant]
US 6114043A · Joret · 2000 [cited by applicant]
US 6129980A · Tsukada et al. · 2000 [cited by applicant]
US 6132650A · Nakamura · 2000 [cited by applicant]
US 6165598A · Nelson · 2000 [cited by applicant]
US 6166125A · Sugiyama et al. · 2000 [cited by applicant]
US 6172812B1 · Haaland et al. · 2001 [cited by applicant]
US 6174599B1 · Boire et al. · 2001 [cited by applicant]
US 6217272B1 · Felsenthal et al. · 2001 [cited by applicant]
US 6238781B1 · Anderson et al. · 2001 [cited by applicant]
US 6250758B1 · Yoshihara et al. · 2001 [cited by applicant]
US 6267915B1 · Park et al. · 2001 [cited by applicant]
US 6303225B1 · Veerasamy · 2001 [cited by applicant]
US 6337771B1 · Chu et al. · 2002 [cited by applicant]
US 6344288B1 · Oyama et al. · 2002 [cited by applicant]
US 6355334B1 · Rondeau et al. · 2002 [cited by applicant]
US 6355344B1 · Mamish et al. · 2002 [cited by applicant]
US 6391400B1 · Russell et al. · 2002 [cited by applicant]
US 6395333B2 · Veerasamy · 2002 [cited by applicant]
US 6416872B1 · Maschwitz · 2002 [cited by applicant]
US 6495251B1 · Arbab et al. · 2002 [cited by applicant]
US 6503557B1 · Joret · 2003 [cited by applicant]
US 6524714B1 · Neuman et al. · 2003 [cited by applicant]
US 6535333B1 · Piepel et al. · 2003 [cited by applicant]
US 6570709B2 · Katayama et al. · 2003 [cited by applicant]
US 6572990B1 · Oyama et al. · 2003 [cited by applicant]
US 6580512B1 · Hussey et al. · 2003 [cited by applicant]
US 6583935B1 · Saif et al. · 2003 [cited by applicant]
US 6596368B1 · Liebig et al. · 2003 [cited by applicant]
US 6605358B1 · Stachowiak · 2003 [cited by applicant]
US 6652974B1 · Krisko · 2003 [cited by applicant]
US 6707610B1 · Woodard et al. · 2004 [cited by applicant]
US 6730352B2 · Stachowiak · 2004 [cited by applicant]
US 6746775B1 · Boire et al. · 2004 [cited by applicant]
US 6783253B2 · Thomsen et al. · 2004 [cited by applicant]
US 6785468B2 · Takasaki et al. · 2004 [cited by applicant]
US 6813096B2 · Ohta · 2004 [cited by applicant]
US 6838179B1 · Legrand · 2005 [cited by applicant]
US 6875468B2 · Kunz et al. · 2005 [cited by applicant]
US 6908480B2 · Jayaraman · 2005 [cited by applicant]
US 6924037B1 · Joret et al. · 2005 [cited by applicant]
US 6950236B2 · Hokazono et al. · 2005 [cited by applicant]
US 6986857B2 · Klemm et al. · 2006 [cited by applicant]
US 6998177B2 · Krzyzak et al. · 2006 [cited by applicant]
US 7005188B2 · Anderson et al. · 2006 [cited by applicant]
US 7018727B2 · Dzick · 2006 [cited by applicant]
US 7055954B2 · Marechal · 2006 [cited by applicant]
US 7156533B2 · Hoeing · 2007 [cited by applicant]
US 7166360B2 · Coustet et al. · 2007 [cited by applicant]
US 7189456B2 · King · 2007 [cited by applicant]
US 7229684B2 · Enniss et al. · 2007 [cited by applicant]
US 7332213B2 · Mimura et al. · 2008 [cited by applicant]
US 7351447B2 · Nishida et al. · 2008 [cited by applicant]
US 7378146B1 · Hedrick et al. · 2008 [cited by applicant]
US 7381469B2 · Moelle et al. · 2008 [cited by applicant]
US 7405005B2 · Watanabe · 2008 [cited by applicant]
US 7426328B2 · Zhou et al. · 2008 [cited by applicant]
US 7498058B2 · Harris et al. · 2009 [cited by applicant]
US 7521123B2 · Hattori et al. · 2009 [cited by applicant]
US 7541102B2 · Klippe et al. · 2009 [cited by applicant]
US 7569269B2 · Takada et al. · 2009 [cited by applicant]
US 7643719B1 · Zhou et al. · 2010 [cited by applicant]
US 7655298B2 · Thies et al. · 2010 [cited by applicant]
US 7724241B2 · Fukui et al. · 2010 [cited by applicant]
US 7736728B2 · Loboda et al. · 2010 [cited by applicant]
US 7736824B2 · Yoshikawa et al. · 2010 [cited by applicant]
US 7910215B2 · Reymond et al. · 2011 [cited by applicant]
US 7926939B2 · Kato et al. · 2011 [cited by applicant]
US 7978402B2 · Sweeney et al. · 2011 [cited by applicant]
US 8062749B2 · Shelestak et al. · 2011 [cited by applicant]
US 8067094B2 · Benson et al. · 2011 [cited by applicant]
US 8088502B2 · Martin et al. · 2012 [cited by applicant]
US 8118896B2 · Can et al. · 2012 [cited by applicant]
US 8187671B2 · Sol · 2012 [cited by applicant]
US 8236433B2 · Chiu et al. · 2012 [cited by applicant]
US 8273801B2 · Baikerikar et al. · 2012 [cited by applicant]
US 8304078B2 · Varshneya · 2012 [cited by applicant]
US 8312739B2 · Lee et al. · 2012 [cited by applicant]
US 8360574B2 · Ishak et al. · 2013 [cited by applicant]
US 8383214B2 · Schaepkens et al. · 2013 [cited by applicant]
US 8400592B2 · Hirakata et al. · 2013 [cited by applicant]
US 8409716B2 · Schultz et al. · 2013 [cited by applicant]
US 8425035B2 · Von Blanckenhagen · 2013 [cited by applicant]
US 8432611B1 · Wach · 2013 [cited by applicant]
US 8445112B2 · Di Stefano · 2013 [cited by applicant]
US 8446673B2 · Yoshihara · 2013 [cited by applicant]
US 8460804B2 · Henn et al. · 2013 [cited by applicant]
US 8508703B2 · Lee et al. · 2013 [cited by applicant]
US 8561429B2 · Allan et al. · 2013 [cited by applicant]
US 8568890B2 · Murata et al. · 2013 [cited by applicant]
US 8679631B2 · Murata · 2014 [cited by applicant]
US 8691351B2 · Asakura et al. · 2014 [cited by applicant]
US 8746880B2 · Fukagawa et al. · 2014 [cited by applicant]
US 8753744B2 · Borrelli et al. · 2014 [cited by applicant]
US 8784933B2 · Krzyak et al. · 2014 [cited by applicant]
US 8840257B2 · Kawagishi et al. · 2014 [cited by applicant]
US 8842365B2 · Koike et al. · 2014 [cited by applicant]
US 8854623B2 · Fontaine et al. · 2014 [cited by applicant]
US 9023457B2 · Carrilero et al. · 2015 [cited by applicant]
US 9041885B2 · Weber et al. · 2015 [cited by applicant]
US 9042019B2 · Su et al. · 2015 [cited by applicant]
US 9079802B2 · Bellman et al. · 2015 [cited by applicant]
US 9110230B2 · Koch et al. · 2015 [cited by applicant]
US 9249049B2 · Fujii · 2016 [cited by applicant]
US 9296648B2 · Henn et al. · 2016 [cited by applicant]
US 9335444B2 · Hart et al. · 2016 [cited by applicant]
US 9359261B2 · Bellman et al. · 2016 [cited by applicant]
US 9366784B2 · Bellman et al. · 2016 [cited by applicant]
US 9411180B2 · Gollier et al. · 2016 [cited by applicant]
US 9573842B2 · Gollier et al. · 2017 [cited by applicant]
US 9574262B2 · Henn et al. · 2017 [cited by applicant]
US 9663400B2 · O'Malley et al. · 2017 [cited by applicant]
US 9684097B2 · Koch et al. · 2017 [cited by applicant]
US 9701579B2 · Gollier et al. · 2017 [cited by applicant]
US 9726786B2 · Hart et al. · 2017 [cited by applicant]
US 9790593B2 · Adib et al. · 2017 [cited by applicant]
US 9957609B2 · Lee et al. · 2018 [cited by applicant]
US 10162084B2 · Hart et al. · 2018 [cited by applicant]
US 10416352B2 · Hart et al. · 2019 [cited by applicant]
US 10444408B2 · Bellman et al. · 2019 [cited by applicant]
US 10451773B2 · Hart et al. · 2019 [cited by applicant]
US 10921492B2 · Gregorski et al. · 2021 [cited by applicant]
US 10948629B2 · Hart et al. · 2021 [cited by applicant]
US 20010002295A1 · Anderson et al. · 2001 [cited by applicant]
US 20010016262A1 · Toyoshima et al. · 2001 [cited by applicant]
US 20010017452A1 · Bernard · 2001 [cited by applicant]
US 20010031365A1 · Anderson et al. · 2001 [cited by applicant]
US 20020009593A1 · Veerasamy · 2002 [cited by applicant]
US 20020017452A1 · Zimmermann et al. · 2002 [cited by applicant]
US 20020051274A1 · Kim et al. · 2002 [cited by applicant]
US 20020051294A1 · Katayama et al. · 2002 [cited by applicant]
US 20020136908A1 · Komatsu et al. · 2002 [cited by applicant]
US 20030019363A1 · Grover et al. · 2003 [cited by applicant]
US 20030031879A1 · Neuman et al. · 2003 [cited by applicant]
US 20030035044A1 · Nakayama et al. · 2003 [cited by applicant]
US 20030044652A1 · Wang · 2003 [cited by applicant]
US 20030116270A1 · Hawa et al. · 2003 [cited by applicant]
US 20030116872A1 · Klemm et al. · 2003 [cited by applicant]
US 20030179454A1 · Thomsen et al. · 2003 [cited by applicant]
US 20030193636A1 · Allen et al. · 2003 [cited by applicant]
US 20040004778A1 · Liu et al. · 2004 [cited by applicant]
US 20040005482A1 · Kobayashi et al. · 2004 [cited by applicant]
US 20040065968A1 · Klemm et al. · 2004 [cited by applicant]
US 20040147185A1 · Decroupet · 2004 [cited by applicant]
US 20040258947A1 · Moelle et al. · 2004 [cited by applicant]
US 20050008863A1 · Mimura et al. · 2005 [cited by applicant]
US 20050012569A1 · Sasaki · 2005 [cited by applicant]
US 20050074591A1 · Zagdoun · 2005 [cited by applicant]
US 20050084705A1 · Klippe et al. · 2005 [cited by applicant]
US 20050123772A1 · Coustet et al. · 2005 [cited by applicant]
US 20050196632A1 · Maschwitz et al. · 2005 [cited by applicant]
US 20050233091A1 · Kumar et al. · 2005 [cited by applicant]
US 20050263775A1 · Ikeda et al. · 2005 [cited by applicant]
US 20060008656A1 · Veerasamy · 2006 [cited by applicant]
US 20060017707A1 · Fukui et al. · 2006 [cited by applicant]
US 20060019119A1 · Spitsberg et al. · 2006 [cited by applicant]
US 20060093833A1 · Meyer et al. · 2006 [cited by applicant]
US 20060115651A1 · Merfeld et al. · 2006 [cited by applicant]
US 20060134436A1 · Maschwitz · 2006 [cited by applicant]
US 20060139783A1 · Decroupet · 2006 [cited by applicant]
US 20060154044A1 · Yamada et al. · 2006 [cited by applicant]
US 20060165963A1 · Fleury et al. · 2006 [cited by applicant]
US 20060197096A1 · Kerdiles et al. · 2006 [cited by applicant]
US 20060222863A1 · Nadaud et al. · 2006 [cited by applicant]
US 20060240266A1 · Schicht et al. · 2006 [cited by applicant]
US 20070018671A1 · Steck, Jr. · 2007 [cited by applicant]
US 20070018871A1 · Riley · 2007 [cited by applicant]
US 20070030569A1 · Lu et al. · 2007 [cited by applicant]
US 20070063147A1 · Yamazaki et al. · 2007 [cited by applicant]
US 20070097509A1 · Nevitt et al. · 2007 [cited by applicant]
US 20070128528A1 · Hess et al. · 2007 [cited by applicant]
US 20070146887A1 · Ikeda et al. · 2007 [cited by applicant]
US 20070188871A1 · Fleury et al. · 2007 [cited by applicant]
US 20070237918A1 · Jonza et al. · 2007 [cited by applicant]
US 20070247567A1 · Sato et al. · 2007 [cited by applicant]
US 20070285776A1 · Nakamura et al. · 2007 [cited by applicant]
US 20080024867A1 · Kawashima et al. · 2008 [cited by applicant]
US 20080032157A1 · Koeckert et al. · 2008 [cited by applicant]
US 20080239488A1 · Asakura et al. · 2008 [cited by applicant]
US 20090017314A1 · Nadaud et al. · 2009 [cited by applicant]
US 20090023254A1 · Lim et al. · 2009 [cited by applicant]
US 20090040440A1 · Park · 2009 [cited by applicant]
US 20090052041A1 · Watanabe · 2009 [cited by examiner]
US 20090086778A1 · Kameyama et al. · 2009 [cited by applicant]
US 20090086783A1 · Kameyama et al. · 2009 [cited by applicant]
US 20090104385A1 · Reymond et al. · 2009 [cited by applicant]
US 20090109537A1 · Bright et al. · 2009 [cited by applicant]
US 20090141357A1 · Kamura et al. · 2009 [cited by applicant]
US 20090155490A1 · Bicker et al. · 2009 [cited by applicant]
US 20090195865A1 · Kleideiter et al. · 2009 [cited by applicant]
US 20090197048A1 · Amin et al. · 2009 [cited by applicant]
US 20090217968A1 · Joshi et al. · 2009 [cited by applicant]
US 20090223437A1 · Ballard · 2009 [cited by applicant]
US 20090297877A1 · Chang et al. · 2009 [cited by applicant]
US 20090298669A1 · Akiba et al. · 2009 [cited by applicant]
US 20090324844A1 · Haoto et al. · 2009 [cited by applicant]
US 20100009154A1 · Allan et al. · 2010 [cited by applicant]
US 20100027383A1 · Suzuki et al. · 2010 [cited by applicant]
US 20100028607A1 · Lee et al. · 2010 [cited by applicant]
US 20100047521A1 · Amin et al. · 2010 [cited by applicant]
US 20100060979A1 · Harris et al. · 2010 [cited by applicant]
US 20100062245A1 · Martin et al. · 2010 [cited by applicant]
US 20100119486A1 · Sakamoto et al. · 2010 [cited by applicant]
US 20100127154A1 · Kameyama · 2010 [cited by applicant]
US 20100177380A1 · Nagahama et al. · 2010 [cited by applicant]
US 20100183857A1 · Nouvelot et al. · 2010 [cited by applicant]
US 20100196685A1 · Murata et al. · 2010 [cited by applicant]
US 20100215950A1 · Schultz et al. · 2010 [cited by applicant]
US 20100247745A1 · Rudmann et al. · 2010 [cited by applicant]
US 20100291353A1 · Dejneka et al. · 2010 [cited by applicant]
US 20100304090A1 · Henn et al. · 2010 [cited by applicant]
US 20100311868A1 · Bekiarian et al. · 2010 [cited by applicant]
US 20100313875A1 · Kennedy · 2010 [cited by applicant]
US 20100330350A1 · Osada et al. · 2010 [cited by applicant]
US 20110033635A1 · Nishimoto et al. · 2011 [cited by applicant]
US 20110033681A1 · Adachi et al. · 2011 [cited by applicant]
US 20110043719A1 · Thunhorst et al. · 2011 [cited by applicant]
US 20110100424A1 · Roche et al. · 2011 [cited by applicant]
US 20110114160A1 · Murashige et al. · 2011 [cited by applicant]
US 20110120554A1 · Chhajed et al. · 2011 [cited by applicant]
US 20110129287A1 · Lecoutre · 2011 [cited by applicant]
US 20110151173A1 · Ramadas et al. · 2011 [cited by applicant]
US 20110157703A1 · Broadway et al. · 2011 [cited by applicant]
US 20110177241A1 · Lee et al. · 2011 [cited by applicant]
US 20110235181A1 · Hayashibe et al. · 2011 [cited by applicant]
US 20110262742A1 · Takeuchi et al. · 2011 [cited by applicant]
US 20110262752A1 · Bawendi et al. · 2011 [cited by applicant]
US 20110262754A1 · Zehentmaier et al. · 2011 [cited by applicant]
US 20110290982A1 · Boutami et al. · 2011 [cited by applicant]
US 20110293929A1 · Maschwitz · 2011 [cited by applicant]
US 20110297979A1 · Diana et al. · 2011 [cited by applicant]
US 20120008217A1 · Ishak et al. · 2012 [cited by applicant]
US 20120027968A1 · Chang et al. · 2012 [cited by applicant]
US 20120040179A1 · Dave · 2012 [cited by applicant]
US 20120052271A1 · Gomez et al. · 2012 [cited by applicant]
US 20120099188A1 · Akozbek et al. · 2012 [cited by applicant]
US 20120099323A1 · Thompson · 2012 [cited by applicant]
US 20120107607A1 · Takaki et al. · 2012 [cited by applicant]
US 20120135153A1 · Osakabe et al. · 2012 [cited by applicant]
US 20120154921A1 · Yoshida et al. · 2012 [cited by applicant]
US 20120196103A1 · Murashige et al. · 2012 [cited by applicant]
US 20120212826A1 · Henn et al. · 2012 [cited by applicant]
US 20120219792A1 · Yamamoto et al. · 2012 [cited by applicant]
US 20120228641A1 · Thoumazet et al. · 2012 [cited by applicant]
US 20120235399A1 · Lochbihler · 2012 [cited by applicant]
US 20120247152A1 · Ohara et al. · 2012 [cited by applicant]
US 20120250314A1 · Maikowski et al. · 2012 [cited by applicant]
US 20120268809A1 · Guo et al. · 2012 [cited by applicant]
US 20120281292A1 · Baca et al. · 2012 [cited by applicant]
US 20120301676A1 · Ushida et al. · 2012 [cited by applicant]
US 20120321898A1 · Meinhardt et al. · 2012 [cited by applicant]
US 20120327568A1 · Shedletsky et al. · 2012 [cited by applicant]
US 20130013574A1 · Wu · 2013 [cited by applicant]
US 20130021669A1 · Xi et al. · 2013 [cited by applicant]
US 20130022798A1 · Fukawa et al. · 2013 [cited by applicant]
US 20130029118A1 · Kishi et al. · 2013 [cited by applicant]
US 20130057950A1 · Lin et al. · 2013 [cited by applicant]
US 20130059137A1 · Hevesi et al. · 2013 [cited by applicant]
US 20130120842A1 · Moens et al. · 2013 [cited by applicant]
US 20130128342A1 · Mitarai et al. · 2013 [cited by applicant]
US 20130135741A1 · Lee et al. · 2013 [cited by applicant]
US 20130135742A1 · Fukagawa et al. · 2013 [cited by applicant]
US 20130135750A1 · Walker et al. · 2013 [cited by applicant]
US 20130170044A1 · Mont et al. · 2013 [cited by applicant]
US 20130176615A1 · Uefuji et al. · 2013 [cited by applicant]
US 20130177751A1 · Oh et al. · 2013 [cited by applicant]
US 20130183489A1 · Cremer et al. · 2013 [cited by applicant]
US 20130187185A1 · Deshazer et al. · 2013 [cited by applicant]
US 20130189184A1 · Lub et al. · 2013 [cited by applicant]
US 20130209762A1 · Damm et al. · 2013 [cited by applicant]
US 20130260115A1 · Suzuki · 2013 [cited by examiner]
US 20130263784A1 · Lee et al. · 2013 [cited by applicant]
US 20130271836A1 · Fukaya et al. · 2013 [cited by applicant]
US 20130322270A1 · Ko · 2013 [cited by applicant]
US 20130334031A1 · Lee et al. · 2013 [cited by applicant]
US 20140022630A1 · Reymond et al. · 2014 [cited by applicant]
US 20140036175A1 · Morishima et al. · 2014 [cited by applicant]
US 20140049827A1 · Fujii et al. · 2014 [cited by applicant]
US 20140087101A1 · Tixhon et al. · 2014 [cited by applicant]
US 20140090864A1 · Paulson · 2014 [cited by applicant]
US 20140090974A1 · Ballet et al. · 2014 [cited by applicant]
US 20140091419A1 · Hasegawa et al. · 2014 [cited by applicant]
US 20140093711A1 · Paulson · 2014 [cited by applicant]
US 20140106141A1 · Bellman et al. · 2014 [cited by applicant]
US 20140106146A1 · Decker et al. · 2014 [cited by applicant]
US 20140106150A1 · Decker et al. · 2014 [cited by applicant]
US 20140111859A1 · Duraes et al. · 2014 [cited by applicant]
US 20140113083A1 · Lee et al. · 2014 [cited by applicant]
US 20140113120A1 · Thiel · 2014 [cited by applicant]
US 20140139978A1 · Kwong · 2014 [cited by applicant]
US 20140170765A1 · Ockenfuss · 2014 [cited by applicant]
US 20140174532A1 · Stewart et al. · 2014 [cited by applicant]
US 20140186615A1 · An et al. · 2014 [cited by applicant]
US 20140220327A1 · Adib et al. · 2014 [cited by applicant]
US 20140226208A1 · Gyorgy · 2014 [cited by applicant]
US 20140233104A1 · Nagahama et al. · 2014 [cited by applicant]
US 20140233106A1 · Vergoehl et al. · 2014 [cited by applicant]
US 20140247415A1 · Kleptsyn · 2014 [cited by applicant]
US 20140255616A1 · Paulson · 2014 [cited by applicant]
US 20140261615A1 · Nair et al. · 2014 [cited by applicant]
US 20140264321A1 · Liang et al. · 2014 [cited by applicant]
US 20140295330A1 · Pruneri et al. · 2014 [cited by applicant]
US 20140320806A1 · Cohen-Tannoudji et al. · 2014 [cited by applicant]
US 20140334006A1 · Adib et al. · 2014 [cited by applicant]
US 20140335330A1 · Bellman et al. · 2014 [cited by applicant]
US 20140347722A1 · Hevesi · 2014 [cited by applicant]
US 20140353618A1 · Shim et al. · 2014 [cited by applicant]
US 20140362444A1 · Paulson · 2014 [cited by applicant]
US 20140368029A1 · Park · 2014 [cited by applicant]
US 20140370264A1 · Ohara et al. · 2014 [cited by applicant]
US 20140376094A1 · Bellman et al. · 2014 [cited by applicant]
US 20140377522A1 · Koch et al. · 2014 [cited by applicant]
US 20150002809A1 · Cohen-Tannoudji et al. · 2015 [cited by applicant]
US 20150037554A1 · Gao et al. · 2015 [cited by applicant]
US 20150043058A1 · Saito · 2015 [cited by applicant]
US 20150062695A1 · Chu et al. · 2015 [cited by applicant]
US 20150062710A1 · Grillmayer et al. · 2015 [cited by applicant]
US 20150079398A1 · Amin et al. · 2015 [cited by applicant]
US 20150083464A1 · Zilbauer et al. · 2015 [cited by applicant]
US 20150116832A1 · Kamiuto et al. · 2015 [cited by applicant]
US 20150212245A1 · Ueda · 2015 [cited by applicant]
US 20150219798A1 · Sonoda et al. · 2015 [cited by applicant]
US 20150260888A1 · Yoshihara et al. · 2015 [cited by applicant]
US 20150284840A1 · Henn et al. · 2015 [cited by applicant]
US 20150293284A1 · Tatemura · 2015 [cited by applicant]
US 20150322270A1 · Amin et al. · 2015 [cited by applicant]
US 20150323705A1 · Hart et al. · 2015 [cited by applicant]
US 20150346403A1 · Jidai et al. · 2015 [cited by applicant]
US 20150355382A1 · Henn · 2015 [cited by examiner]
US 20150376057A1 · Koch et al. · 2015 [cited by applicant]
US 20160011348A1 · Hirakoso et al. · 2016 [cited by applicant]
US 20160018576A1 · Yamamoto et al. · 2016 [cited by applicant]
US 20160076135A1 · Cheah et al. · 2016 [cited by applicant]
US 20160083835A1 · Adib et al. · 2016 [cited by applicant]
US 20160372532A1 · Song et al. · 2016 [cited by applicant]
US 20170075039A1 · Hart et al. · 2017 [cited by applicant]
US 20170087144A1 · Rowe et al. · 2017 [cited by applicant]
US 20170184762A1 · Fujii et al. · 2017 [cited by applicant]
US 20170199307A1 · Hart et al. · 2017 [cited by applicant]
US 20170317217A1 · Ito et al. · 2017 [cited by applicant]
US 20170355172A1 · Paulson · 2017 [cited by applicant]
US 20170369992A1 · Adib et al. · 2017 [cited by applicant]
US 20180372919A1 · Suzuki et al. · 2018 [cited by applicant]
US 20190077352A1 · Bhatia et al. · 2019 [cited by applicant]
US 20200057177A1 · Hart et al. · 2020 [cited by applicant]
AU 0766773B2 · 2003 [cited by applicant]
AU 2002341016B2 · 2008 [cited by applicant]
CA 2141536A1 · 1994 [cited by applicant]
CN 1134555A · 1996 [cited by applicant]
CN 1423682A · 2003 [cited by applicant]
CN 1575970A · 2005 [cited by applicant]