Semiconductor device
A semiconductor device includes a transistor including a first metallic-layer as a gate electrode above a front face of a substrate. A first wiring layer includes first to third elongate members constituted of the same material as the first metallic layer and extending in a first direction, and first and second connecting members constituted of the same material as the first metallic layer, extending in a second direction, and connecting the first to third elongate members. A second wiring layer is provided above the first metallic layer, and includes fourth to sixth elongate members extending in the first or second direction, and third and fourth connecting members constituted of the same material as that of the fourth to sixth elongate members, extending in the other of the first and second directions, and connecting the fourth to sixth elongate members. The first and second wiring layers are connected to each other.
1 . A semiconductor device comprising:
a substrate;
a transistor including a first metallic layer as a gate electrode above a front face of the substrate;
a first wiring layer including first to third elongate members constituted of a same material as that of the first metallic layer and extending in a first direction in a plane substantially parallel to the front face of the substrate, and first and second connecting members constituted of the same material as that of the first metallic layer, extending in a second direction intersecting with the first direction, and connecting ends portions of the first to third elongate members; and
a second wiring layer provided above the first metallic layer, and including fourth to sixth elongate members extending in one of the first and second directions, and third and fourth connecting members constituted of a same material as that of the fourth to sixth elongate members, extending in the other of the first and second directions, and connecting end portions of the fourth to sixth elongate members, wherein
one end portions of the first and second wiring layers are electrically connected to each other,
the first connecting member connects one ends of the first and second elongate members to each other,
the second connecting member connects another end of the second elongate member and one end of the third elongate member to each other,
the third connecting member connects one ends of the fourth and fifth elongate members to each other,
the fourth connecting member connects another end of the fifth elongate member and one end of the sixth elongate member to each other, and
another end of the first elongate member and another end of the fourth elongate member are electrically connected to each other.
2 . The device of claim 1 , further comprising a contact electrically connecting the another end of the first elongate member and the another end of the fourth elongate member to each other.
3 . The device of claim 1 , wherein the first to sixth elongate members and the first to fourth connecting members are resistive elements.
4 . The device of claim 1 , wherein
the first to third elongate members and the first and second connecting members have a meandering shape or a spiral shape in a planar view as viewed from above the front face of the substrate, and
the fourth to sixth elongate members and the third and fourth connecting members also have a meandering shape or a spiral shape in the planar view as viewed from above the front face of the substrate.
5 . The device of claim 1 , wherein the second wiring layer includes a plurality of lines electrically separated from each other.
6 . The device of claim 1 , wherein the first wiring layer is constituted of a film stack including Ti, TiN, and W.
7 . The device of claim 6 , wherein the second wiring layer is constituted of W.
8 . The device of claim 1 , further comprising
a third wiring layer provided above the second wiring layer, and including seventh to ninth elongate member extending in one of the first and second directions, and fifth and sixth connecting members constituted of a same material as that of the seventh to ninth elongate members, extending in the other of the first and second directions, and connecting end portions of the seventh to ninth elongate members, wherein
end portions of the second and third wiring layers are electrically connected to each other.
9 . The device of claim 8 , wherein the seventh to ninth elongate members and the fifth and sixth connecting members have a meandering shape or a spiral shape in a planar view as viewed from above the front face of the substrate.
10 . The device of claim 8 , wherein the third wiring layer includes a plurality of lines electrically separated from each other.
11 . The device of claim 8 , wherein the third wiring layer is constituted of W.
12 . The device of claim 8 , further comprising a first insulating film provided around the second wiring layer or the third wiring layer and constituted of a silicon nitride film.
13 . The device of claim 12 , wherein a metallic nitride film is provided on front faces of the second and third wiring layers.
14 . The device of claim 1 , further comprising a capacitive element including a first electrode and a second electrode provided in a same layer as that of the second wiring layer, and a silicon nitride film provided between the first electrode and the second electrode.
15 . The device of claim 1 , further comprising a second insulating film provided between wiring layers above the transistor and constituted of a silicon dioxide film.
16 . The device of claim 1 , further comprising a memory cell array provided above the second wiring layer.