Flat metal features for microelectronics applications
Advanced flat metals for microelectronics are provided. While conventional processes create large damascene features that have a dishing defect that causes failure in bonded devices, example systems and methods described herein create large damascene features that are planar. In an implementation, an annealing process creates large grains or large metallic crystals of copper in large damascene cavities, while a thinner layer of copper over the field of a substrate anneals into smaller grains of copper. The large grains of copper in the damascene cavities resist dishing defects during chemical-mechanical planarization (CMP), resulting in very flat damascene features. In an implementation, layers of resist and layers of a second coating material may be applied in various ways to resist dishing during chemical-mechanical planarization (CMP), resulting in very flat damascene features.
1. A method, comprising:
providing a substrate with at least one cavity at a surface;
coating the substrate with a barrier layer and a seed layer in the at least one cavity and on a field of the substrate;
applying a mask on the field of the substrate, wherein the mask is applied to the seed layer on the field;
filling the at least one cavity with a conductive layer to a level of a top of the seed layer on the field;
removing the mask from the field;
depositing a metal onto the conductive layer in the at least one cavity and onto the seed layer on the field of the substrate, wherein the conductive layer and metal over the at least one cavity is thicker than the metal over the field;
thermally annealing the substrate to generate larger grain metal crystals in the at least one cavity and smaller grain metal crystals in the metal over the field of the substrate;
applying an intermediate chemical mechanical polishing (CMP) process on the conductive layer in the at least one cavity and on the metal on the field of the substrate;
planarizing the conductive layer in the at least one cavity down to a level of the barrier layer covering the field of the substrate; and
removing the barrier layer from the field of the substrate to provide a flat conductive feature in the at least one cavity with a dishing defect of less than 3 nanometers per 10 microns width of the flat conductive feature.
2. The method of claim 1 , wherein a width dimension of the flat conductive feature is more than 25 microns and the dishing defect of the flat conductive feature is less than 10 nm.
3. The method of claim 1 , wherein a width dimension of the flat conductive feature is between 26-150 microns and the dishing defect of the flat conductive feature is less than 20 nm.
4. The method of claim 1 , wherein a grain size of the grain metal crystals in the conductive layer in the at least one cavity is more than 2 times the grain size of the grain metal crystals in the metal on the field.
5. The method of claim 1 , wherein a grain size of the grain metal crystals in the conductive layer in the cavity is more than 5 times the grain size of the grain metal crystals in the metal on the field.
6. The method of claim 1 , wherein a thickness of the conductive layer in the cavity is more than 2 times a thickness of the metal on the field.
7. The method of claim 1 , wherein a thickness of the conductive layer in the cavity is more than 5 times a thickness of the metal on the field.
8. The method of claim 1 , wherein the conductive layer in the cavity comprises a metal alloy.
9. The method of claim 1 , wherein the conductive layer comprises one of copper, nickel, silver, gold, platinum, tungsten, or aluminum or one of their respective alloys.
10. The method of claim 1 , wherein the thermally annealing is performed at a temperature between 25-200° C.
11. A method, comprising:
coating a substrate with a barrier layer and a first metallic seed layer in cavities of the substrate and on a field of the substrate;
applying a mask to the field of the substrate;
applying a second metallic seed layer in the cavities including vertical edges of the mask extending vertical sides of the cavities;
depositing a metal to overfill the cavities to a level higher than a top surface of the first metallic seed layer on the field;
removing the mask from the field;
thermally annealing the substrate, the barrier layer, the first metallic seed layer, the second metallic seed layer, and the metal to make small crystals of grained metal in the first metallic seed layer over the field and large crystals of grained metal in the cavities;
applying an intermediate chemical-mechanical planarization (CMP) process on the metal in the cavities and on the first metallic seed layer on the field;
planarizing the metal overfilling the cavities down to a level of the barrier layer on the field; and
removing the barrier layer from the field to provide wide metal features with a high degree of flatness in the cavities.
12. The method of claim 11 , wherein the second metallic seed layer has a thickness of at least 50 nanometers.
13. The method of claim 11 , further comprising thermally annealing the substrate, the barrier layer, the first metallic seed layer, the second metallic seed layer, and the metal while the mask is on the field.
14. The method of claim 13 , further comprising removing the mask with the intermediate chemical-mechanical planarization (CMP) process.
15. The method of claim 11 , wherein a width dimension of one of the wide metal features is greater than 25 microns and a dishing of the wide metal features is less than 10 nm.
16. The method of claim 11 , wherein a width dimension of one of the wide metal features is between 26-150 microns and a dishing of the wide metal features is less than 20 nm.
17. The method of claim 11 , wherein the thermally annealing is performed at a temperature between 85-200° C.
18. The method of claim 11 , wherein the method is carried out at a low temperature and the thermally annealing is performed at an ambient room temperature or a temperature around 25° C.