Granted Patent B2

US 10,622,236 · App. 15/883,473 · Granted Apr 14, 2020

Inventors: Tsung-Sheng Kuo (New Taipei, TW); Yang-Ann Chu (Hsin-Chu, TW); Alan Yang (Hsin-Chu, TW); Vic Huang (Hsin-Chu, TW); Hsu-Shui Liu (Pingjhen, TW); Jiun-Rong Pai (Jhubei, TW)

Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.

H01L21/677H01L21/67733H01L21/67736H01L21/67772H01L21/681H01L21/683

Abstract

Claims (75)

1. An apparatus for handling wafer carriers in a semiconductor fabrication facility (FAB), comprising:

a table configured to receive a wafer carrier having a first door and operable to hold a plurality of wafers;

an opening mechanism configured to open the first door of the wafer carrier;

a door storage space configured to store the first door; and

a transport tool configured to transport the wafer carrier to a load port located on a floor of the FAB, wherein the apparatus is physically coupled to a ceiling of the FAB and is located lower than the transport tool and higher than the load port.

2. The apparatus of claim 1 , wherein:

the wafer carrier is lowered by the transport tool onto a top surface of the table; and

the apparatus further comprises a controller configured to control the table to load the wafer carrier whose door has been stored in the door storage space, into a processing tool to process at least one wafer in the wafer carrier.

3. The apparatus of claim 2 , wherein:

the controller is further configured to control the table to unload the wafer carrier after the at least one wafer is processed; and

the apparatus further comprises a closing mechanism configured to

retrieve a second door having a same model as the first door from the door storage space, and

close the second door onto the wafer carrier that has been unloaded.

4. The apparatus of claim 2 , further comprising:

a light shutter located over the table and configured to capture light information of a wafer transport path between the light shutter and the table; and

a first sensor configured to determine whether there is an obstacle on the wafer transport path based on the light information, wherein the first sensor is further configured to inform a second sensor on the transport tool when there is an obstacle on the wafer transport path, to stop the transport tool from transporting wafer carriers to the apparatus.

5. The apparatus of claim 1 , wherein the opening mechanism comprises:

a vacuum pin configured to hold the first door;

a latch key configured to open the first door; and

a moving mechanism configured to move the first door away from the wafer carrier along a first direction, wherein:

the door storage space includes at least one storage unit for door storage; and

the moving mechanism is further configured to:

move the first door, along a second direction that is different from the first direction, to the at least one storage unit that is not attached with any door, and

attach the first door to the at least one storage unit by an alignment pin.

6. The apparatus of claim 5 , further comprising:

a plurality of buffering spaces configured to buffer wafer carriers, whose doors have been opened and stored in the door storage space, before any wafer in the buffered wafer carriers is processed by the processing tool; and

a controller configured to control the table to move the wafer carrier into one of the plurality of buffering spaces along at least one of: the first direction and a third direction that is different from the first direction.

7. The apparatus of claim 1 , further comprising one or more holding mechanisms configured to hold the apparatus to the ceiling of the FAB.

8. The apparatus of claim 1 , wherein the load port is associated with a processing tool configured to perform a semiconductor manufacturing process on at least one wafer in the wafer carrier.

9. The apparatus of claim 1 , wherein a bottom portion of the apparatus is higher than a top portion of the load port.

10. The apparatus of claim 1 , wherein the apparatus is right above the load port.

11. A method for handling wafer carriers by a device located on a floor of a FAB, comprising:

receiving a wafer carrier having a first door and operable to hold a plurality of wafers;

opening the first door of the wafer carrier along a first direction;

storing the first door in a door storage space of the device;

loading the wafer carrier whose door has been stored in the door storage space, into a processing tool to process at least one wafer in the wafer carrier;

moving the wafer carrier, along at least one of: the first direction and a second direction that is different from the first direction, into a buffering space in the device; and

buffering the wafer carrier, whose door has been opened and stored in the door storage space, in the buffering space before any wafer in the wafer carrier is processed.

12. The method of claim 11 , further comprising:

unloading the wafer carrier that has been loaded;

retrieving a second door having a same model as the first door from the door storage space, and

closing the second door onto the wafer carrier that has been unloaded.

13. The method of claim 11 , wherein the wafer carrier is transported by a transport tool that is physically coupled to a ceiling of the FAB and is located higher than the device.

14. The method of claim 13 , further comprising:

capturing light information of a wafer transport path through which the wafer carrier is received;

determining whether there is an obstacle on the wafer transport path based on the light information; and

informing the transport tool when there is an obstacle on the wafer transport path, to stop the transport tool from transporting wafer carriers to the device.

15. The method of claim 11 , wherein:

opening the first door further comprises:

holding the first door,

opening the first door when the first door is being held, and

moving the first door away from the wafer carrier along the first direction;

the door storage space includes at least one storage unit for door storage.

16. The method of claim 15 , further comprising:

moving the first door, along a third direction that is different from the first direction, to the at least one storage unit that is not attached with any door; and

attaching the first door onto the at least one storage unit.

17. A method for handling wafer carriers by a device in a FAB, comprising:

receiving a wafer carrier having a first door and operable to hold a plurality of wafers;

opening the first door of the wafer carrier;

storing the first door in a door storage space of the device; and

sending the wafer carrier, via a transport tool, to a load port located on a floor of the FAB, wherein the device is physically coupled to a ceiling of the FAB and is located lower than the transport tool and higher than the load port.

18. The method of claim 17 , wherein the wafer carrier is to be loaded by the load port for a processing tool to perform a semiconductor manufacturing process on at least one wafer in the wafer carrier.

19. The method of claim 18 , further comprising:

receiving the wafer carrier that has been unloaded by the load port after wafer processing;

retrieving a second door having a same model as the first door from the door storage space; and

closing the second door onto the wafer carrier that has been unloaded by the load port.

20. The method of claim 17 , wherein:

opening the first door of the wafer carrier comprises:

holding the first door,

opening the first door when the first door is being held, and

moving the first door away from the wafer carrier along a first direction;

the door storage space includes at least one storage unit for door storage; and

the method further comprises:

moving the first door, along a second direction that is different from the first direction, to the at least one storage unit that is not attached with any door, and

attaching the first door to the at least one storage unit by an alignment pin.

Assignments (1)

Continuity (2)

Cited By (55)

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