Acoustic wave device with interdigital transducer electrodes having two bus bars
An acoustic wave device has a layer of piezoelectric material and two interdigital transducer electrodes disposed on an upper surface of the layer of piezoelectric material. Each interdigital transducer electrode of the two interdigital transducer electrodes includes a first bus bar, a second bus bar arranged in parallel to the first bus bar and having a smaller width than the first bus bar, and a plurality of electrode fingers extending from the second bus bar towards the respective other interdigital transducer electrode. The electrode fingers of the two interdigital transducer electrodes are interleaved. The second bus bar of each interdigital transducer electrode is connected with the first bus bar of the same interdigital transducer electrode via a plurality of bridges. Each bridge extends collinearly with one of the electrode fingers of the same interdigital transducer electrode. Each bridge has a width smaller than a smallest width of the electrode finger with which it is collinear.
1 . An acoustic wave device comprising:
a layer of piezoelectric material; and
two interdigital transducer electrodes disposed on an upper surface of the layer of piezoelectric material, each interdigital transducer electrode of the two interdigital transducer electrodes including a first bus bar, a second bus bar arranged in parallel to the first bus bar and having a smaller width than the first bus bar, a plurality of electrode fingers extending from the second bus bar towards the respective other interdigital transducer electrode, the electrode fingers of the two interdigital transducer electrodes being interleaved, the second bus bar of each interdigital transducer electrode being connected with the first bus bar of the same interdigital transducer electrode via a plurality of bridges, each bridge extending collinearly with one of the electrode fingers of the same interdigital transducer electrode, each bridge having a width smaller than a smallest width of the electrode finger with which it is collinear.
2 . The acoustic wave device of claim 1 wherein the width of the bridge of each electrode finger is between 50% and 80% of the width of a central portion of that electrode finger.
3 . The acoustic wave device of claim 2 wherein the width of the bridge of each electrode finger is between 60% and 75% of the width of the central portion of that electrode finger.
4 . The acoustic wave device of claim 1 wherein each electrode finger is composed mainly of a central portion and further includes at least one flared portion having a greater width than the central portion.
5 . The acoustic wave device of claim 4 wherein the at least one flared portion has a length of between 0.5 L and 2 L, L being a periodic distance between two electrode fingers of the same electrode.
6 . The acoustic wave device of claim 4 wherein each electrode finger includes a proximal flared portion which is closer to the second bus bar from which that electrode finger extends than the central portion of that electrode finger.
7 . The acoustic wave device of claim 6 wherein each electrode finger includes an intermediate portion between the second bus bar and the proximal flared portion, the intermediate portion being of the same width as the central portion of that electrode finger.
8 . The acoustic wave device of claim 1 wherein each electrode finger includes a distal flared portion at its distal end facing the other interdigital transducer electrode.
9 . The acoustic wave device of claim 8 wherein each second bus bar of each of the interdigital transducer electrode includes a dummy electrode finger extending from the second bus bar towards a corresponding one of the flared portions at the distal ends of the electrode fingers of the other interdigital transducer electrode.
10 . The acoustic wave device of claim 9 wherein the width of each of the dummy electrode fingers is smaller than the width of the corresponding flared portion of the electrode finger it faces.
11 . The acoustic wave device of claim 9 wherein a length of the dummy electrode finger is between 0.05 L and 0.25 L, L being a periodic distance between two electrode fingers of the same electrode.
12 . The acoustic wave device of claim 9 wherein a length of each dummy electrode finger is between 0.05 and 0.25 times the length of the flared portion it faces, and the width of each dummy electrode finger is between 0.15 L and 0.25 L.
13 . The acoustic wave device of claim 9 wherein a first silicon-comprising structure is arranged over a first area of the interdigital transducer electrodes where the electrode fingers of the two electrodes are interwoven.
14 . The acoustic wave device of claim 13 wherein a second silicon-comprising structure is arranged over a second area of one or both of the interdigital transducer electrodes, the second area including at least the second bus bar, the dummy electrode fingers, and at least a part of the first bus bar.
15 . The acoustic wave device of claim 14 wherein the second silicon-comprising structure has a width, in a direction parallel to the electrode fingers, of between 0.75 L and 1.0 L, and/or a depth between 0.007 L and 0.015 L.
16 . The acoustic wave device of claim 1 wherein a gap between the first bus bar and the second bus bar is between 0.3 L and 1.0 L.
17 . The acoustic wave device of claim 1 wherein a width of the second bus bar is between 0.05 L and 0.25 L.
18 . The acoustic wave device of claim 1 wherein at least one trench is formed in the piezoelectric layer, the trench being arranged in parallel to the first and second bus bars, the at least one trench causing the surface of the piezoelectric layer to be lower between the electrode fingers compared to areas without the at least one trench.
19 . The acoustic wave device of claim 18 wherein two parallel trenches are formed, each trench being formed in a respective region of distal ends of one of the interdigital transducers electrodes.
20 . The acoustic wave device of claim 1 wherein the interdigital transducer electrodes are formed in at least a first and a second IDT electrode layers having different densities, and the second IDT electrode layer is disposed on an other side of the first IDT electrode layer as the piezoelectric layer, and includes aluminum, copper, magnesium, tungsten, titanium, platinum and/or ruthenium.
21 . A radio frequency module comprising:
a module package; and
an acoustic device within the module package, the acoustic device including a layer of piezoelectric material and two interdigital transducer electrodes disposed on an upper surface of the layer of piezoelectric material, each interdigital transducer electrode of the two interdigital transducer electrodes including a first bus bar, a second bus bar arranged in parallel to the first bus bar and having a smaller width than the first bus bar, a plurality of electrode fingers extending from the second bus bar towards the respective other interdigital transducer electrode, the electrode fingers of the two interdigital transducer electrodes being interleaved, the second bus bar of each interdigital transducer electrode being connected with the first bus bar of the same interdigital transducer electrode via a plurality of bridges, each bridge extending collinearly with one of the electrode fingers of the same interdigital transducer electrode, each bridge having a width smaller than a smallest width of the electrode finger with which it is collinear.
22 . A wireless communication device comprising:
one or more antennas; and
a radio frequency module including an acoustic device, the acoustic device having a layer of piezoelectric material and two interdigital transducer electrodes disposed on an upper surface of the layer of piezoelectric material, each interdigital transducer electrode of the two interdigital transducer electrodes including a first bus bar, a second bus bar arranged in parallel to the first bus bar and having a smaller width than the first bus bar, a plurality of electrode fingers extending from the second bus bar towards the respective other interdigital transducer electrode, the electrode fingers of the two interdigital transducer electrodes being interleaved, the second bus bar of each interdigital transducer electrode being connected with the first bus bar of the same interdigital transducer electrode via a plurality of bridges, each bridge extending collinearly with one of the electrode fingers of the same interdigital transducer electrode, each bridge having a width smaller than a smallest width of the electrode finger with which it is collinear.