IP Library › Granted Patent US 12,354,871
Granted Patent B2
US 12,354,871 · App. 18/188,325 · Granted Jul 8, 2025

Ultrathin atomic layer deposition film accuracy thickness control

Inventors: Jun Qian (Sherwood, OR); Hu Kang (Tualatin, OR); Adrien LaVoie (Newberg, OR); Seiji Matsuyama (Toyama, JP); Purushottam Kumar (Hillsboro, OR)
Assignee: Lam Research Corporation
H01L21/0228C23C16/02C23C16/401C23C16/45525C23C16/45542C23C16/45553H01J37/32449H01J37/32743H01J37/32899H01L21/02164H01L21/02211H01L21/02274H01J37/32834H01J2237/1825H01J2237/201H01J2237/20278H01J2237/332
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Quick Facts
Patent No.
US 12,354,871
App. No.
18/188,325
Granted
Jul 8, 2025
Kind
B2
Abstract

Methods for depositing films by atomic layer deposition using aminosilanes are provided.

Claims (22)

1. A method of depositing a silicon-containing film on a substrate, the method comprising:

providing the substrate;

exposing the substrate to an aminosilane;

exposing the substrate to a reactant to react with the aminosilane and form at least a portion of a silicon-containing film;

alternating between exposing of the substrate to the aminosilane and the exposing of the substrate to the reactant in cycles until a desired thickness of the silicon-containing film is deposited; and

prior to exposing the substrate to the aminosilane, exposing the substrate to a soak gas containing only one or more gases used when exposing the substrate to the reactant.

2. The method of claim 1 , wherein the aminosilane is selected from the group consisting of di(isopropylamido) silane and di(sec-butylamino) silane.

3. The method of claim 1 , wherein a plasma is ignited during the exposing of the substrate to the reactant.

4. The method of claim 3 , wherein the plasma is generated in a chamber housing the substrate.

5. The method of claim 3 , wherein the plasma is generated remotely.

6. The method of claim 1 , wherein the silicon-containing film comprises silicon oxide.

7. The method of claim 1 , wherein the silicon-containing film comprises oxygen-doped silicon carbide.

8. The method of claim 1 , wherein a chamber housing the substrate is purged between exposing the substrate to the aminosilane and exposing the substrate to the reactant.

9. The method of claim 1 , wherein the reactant is selected from the group consisting of oxygen, nitrous oxide, and combinations thereof.

10. The method of claim 1 , wherein the soak gas is selected from the group consisting of argon, nitrogen, oxygen, nitrous oxide, and combinations thereof.

11. The method of claim 1 , wherein a proportion of gases in the soak gas is substantially the same as a proportion of gases during the exposing of the substrate to the reactant in the cycles.

12. The method of claim 1 , wherein the soak gas is helium-free.

13. The method of claim 1 , wherein flow rate of the soak gas is within about 10% of a maximum flow rate achievable by a chamber housing the substrate.

14. The method of claim 1 , wherein flow rate of the soak gas is at least about 15 slm.

15. The method of claim 1 , wherein flow rate of the soak gas is at least about 25% to about 200% of the flow rate of the reactant used when exposing the substrate to the reactant during the cycles.

16. The method of claim 1 , wherein the substrate is exposed to the soak gas for a duration between about 5 seconds and about 60 seconds.

17. The method of claim 1 , wherein exposing the substrate to the soak gas is performed in a non-plasma environment.

Continuity (4)
Continuation 17305938 · Jul 16, 2021
Continuation 16457635 · Jun 28, 2019
Continuation 14664545 · Mar 20, 2015
Related Publication 20230298884A1 · Sep 21, 2023
References Cited (400)
US 4500563A · Ellenberger et al. · 1985 [cited by applicant]
US 5094984A · Liu et al. · 1992 [cited by applicant]
US 5223443A · Chinn et al. · 1993 [cited by applicant]
US 5230929A · Caporiccio et al. · 1993 [cited by applicant]
US 5318928A · Gegenwart et al. · 1994 [cited by applicant]
US 5344454A · Clarke et al. · 1994 [cited by applicant]
US 5496608A · Matsuda et al. · 1996 [cited by applicant]
US 5593914A · Evans, Jr. et al. · 1997 [cited by applicant]
US 5670432A · Tsai · 1997 [cited by applicant]
US 5856003A · Chiu · 1999 [cited by applicant]
US 5874368A · Laxman et al. · 1999 [cited by applicant]
US 5916365A · Sherman · 1999 [cited by applicant]
US 5932286A · Beinglass et al. · 1999 [cited by applicant]
US 6069058A · Hong · 2000 [cited by applicant]
US 6100202A · Lin et al. · 2000 [cited by applicant]
US 6156149A · Cheung et al. · 2000 [cited by applicant]
US 6218293B1 · Kraus et al. · 2001 [cited by applicant]
US 6270572B1 · Kim et al. · 2001 [cited by applicant]
US 6346741B1 · Buskirk et al. · 2002 [cited by applicant]
US 6391803B1 · Kim et al. · 2002 [cited by applicant]
US 6399221B1 · Marks et al. · 2002 [cited by applicant]
US 6416822B1 · Chiang et al. · 2002 [cited by applicant]
US 6428859B1 · Chiang et al. · 2002 [cited by applicant]
US 6465272B1 · Davis, Jr. et al. · 2002 [cited by applicant]
US 6468924B2 · Lee et al. · 2002 [cited by applicant]
US 6482726B1 · Aminpur et al. · 2002 [cited by applicant]
US 6509601B1 · Lee et al. · 2003 [cited by applicant]
US 6528430B2 · Kwan et al. · 2003 [cited by applicant]
US 6541398B2 · Grill et al. · 2003 [cited by applicant]
US 6551893B1 · Zheng et al. · 2003 [cited by applicant]
US 6569501B2 · Chiang et al. · 2003 [cited by applicant]
US 6576053B1 · Kim et al. · 2003 [cited by applicant]
US 6576345B1 · Van Cleemput et al. · 2003 [cited by applicant]
US 6602784B2 · Sneh · 2003 [cited by applicant]
US 6632478B2 · Gaillard et al. · 2003 [cited by applicant]
US 6645574B1 · Lee et al. · 2003 [cited by applicant]
US 6689220B1 · Nguyen · 2004 [cited by applicant]
US 6723595B2 · Park · 2004 [cited by applicant]
US 6730614B1 · Lim et al. · 2004 [cited by applicant]
US 6743738B2 · Todd · 2004 [cited by applicant]
US 6756318B2 · Nguyen et al. · 2004 [cited by applicant]
US 6765303B1 · Krivokapic et al. · 2004 [cited by applicant]
US 6809421B1 · Hayasaka et al. · 2004 [cited by applicant]
US 6828218B2 · Kim et al. · 2004 [cited by applicant]
US 6835417B2 · Saenger et al. · 2004 [cited by applicant]
US 6861356B2 · Matsuse et al. · 2005 [cited by applicant]
US 6884466B2 · Kaloyeros et al. · 2005 [cited by applicant]
US 6930058B2 · Hill et al. · 2005 [cited by applicant]
US 6930060B2 · Chou et al. · 2005 [cited by applicant]
US 6943092B2 · Kim · 2005 [cited by applicant]
US 6962876B2 · Ahn et al. · 2005 [cited by applicant]
US 6987240B2 · Jennings et al. · 2006 [cited by applicant]
US 7001844B2 · Chakravarti et al. · 2006 [cited by applicant]
US 7041335B2 · Chung · 2006 [cited by applicant]
US 7077904B2 · Cho et al. · 2006 [cited by applicant]
US 7081271B2 · Chung et al. · 2006 [cited by applicant]
US 7084076B2 · Park et al. · 2006 [cited by applicant]
US 7097886B2 · Moghadam et al. · 2006 [cited by applicant]
US 7109129B1 · Papasouliotis · 2006 [cited by applicant]
US 7115166B2 · Vaartstra et al. · 2006 [cited by applicant]
US 7115528B2 · Vaartstra et al. · 2006 [cited by applicant]
US 7122222B2 · Xiao et al. · 2006 [cited by applicant]
US 7122464B2 · Vaartstra · 2006 [cited by applicant]
US 7125815B2 · Vaartstra · 2006 [cited by applicant]
US 7132353B1 · Xia et al. · 2006 [cited by applicant]
US 7141278B2 · Koh et al. · 2006 [cited by applicant]
US 7148155B1 · Tarafdar et al. · 2006 [cited by applicant]
US 7151039B2 · Lee et al. · 2006 [cited by applicant]
US 7172792B2 · Wang et al. · 2007 [cited by applicant]
US 7176084B2 · Lee et al. · 2007 [cited by applicant]
US 7205187B2 · Leith et al. · 2007 [cited by applicant]
US 7223649B2 · Oh et al. · 2007 [cited by applicant]
US 7235484B2 · Nguyen et al. · 2007 [cited by applicant]
US 7241686B2 · Marcadal et al. · 2007 [cited by applicant]
US 7244668B2 · Kim · 2007 [cited by applicant]
US 7250083B2 · Sneh · 2007 [cited by applicant]
US 7259050B2 · Chen et al. · 2007 [cited by applicant]
US 7261919B2 · Mehregany et al. · 2007 [cited by applicant]
US 7294582B2 · Haverkort et al. · 2007 [cited by applicant]
US 7297641B2 · Todd et al. · 2007 [cited by applicant]
US 7300885B2 · Hasebe et al. · 2007 [cited by applicant]
US 7314835B2 · Ishizaka et al. · 2008 [cited by applicant]
US 7341959B2 · Brcka · 2008 [cited by applicant]
US 7351668B2 · Chou et al. · 2008 [cited by applicant]
US 7361538B2 · Luan et al. · 2008 [cited by applicant]
US 7361611B2 · Chakravarti et al. · 2008 [cited by applicant]
US 7390743B2 · Shin · 2008 [cited by applicant]
US 7393561B2 · Paranjpe · 2008 [cited by applicant]
US 7399388B2 · Moghadam et al. · 2008 [cited by applicant]
US 7419888B2 · Yang et al. · 2008 [cited by applicant]
US 7435454B2 · Brcka · 2008 [cited by applicant]
US 7435684B1 · Lang et al. · 2008 [cited by applicant]
US 7462571B2 · Hasebe et al. · 2008 [cited by applicant]
US 7482247B1 · Papasouliotis et al. · 2009 [cited by applicant]
US 7488694B2 · Kim et al. · 2009 [cited by applicant]
US 7507676B2 · Chou et al. · 2009 [cited by applicant]
US 7510984B2 · Saito et al. · 2009 [cited by applicant]
US 7521331B2 · Park et al. · 2009 [cited by applicant]
US 7524762B2 · Marcadal et al. · 2009 [cited by applicant]
US 7544615B2 · Vaartstra · 2009 [cited by applicant]
US 7572052B2 · Ravi et al. · 2009 [cited by applicant]
US 7592231B2 · Cheng et al. · 2009 [cited by applicant]
US 7595010B2 · Chakravarti et al. · 2009 [cited by applicant]
US 7601648B2 · Chua et al. · 2009 [cited by applicant]
US 7615438B2 · Ahn et al. · 2009 [cited by applicant]
US 7615449B2 · Chung et al. · 2009 [cited by applicant]
US 7622369B1 · Lee et al. · 2009 [cited by applicant]
US 7622383B2 · Kim et al. · 2009 [cited by applicant]
US 7629267B2 · Wan et al. · 2009 [cited by applicant]
US 7632757B2 · Matsuura · 2009 [cited by applicant]
US 7633125B2 · Lu et al. · 2009 [cited by applicant]
US 7638170B2 · Li · 2009 [cited by applicant]
US 7645484B2 · Ishizaka · 2010 [cited by applicant]
US 7651729B2 · Kim et al. · 2010 [cited by applicant]
US 7651730B2 · Hasebe · 2010 [cited by applicant]
US 7651953B2 · Todd et al. · 2010 [cited by applicant]
US 7651959B2 · Fukazawa et al. · 2010 [cited by applicant]
US 7682657B2 · Sherman · 2010 [cited by applicant]
US 7687409B2 · Ahn et al. · 2010 [cited by applicant]
US 7713592B2 · Nguyen et al. · 2010 [cited by applicant]
US 7745346B2 · Hausmann et al. · 2010 [cited by applicant]
US 7758920B2 · Hasebe et al. · 2010 [cited by applicant]
US 7776733B2 · Hasegawa · 2010 [cited by applicant]
US 7790633B1 · Tarafdar et al. · 2010 [cited by applicant]
US 7825039B2 · Takahashi et al. · 2010 [cited by applicant]
US 7863190B1 · Papasouliotis et al. · 2011 [cited by applicant]
US 7906168B2 · Hasebe et al. · 2011 [cited by applicant]
US 7919416B2 · Lee et al. · 2011 [cited by applicant]
US 7923068B2 · Dickey et al. · 2011 [cited by applicant]
US 7923378B2 · Hasebe et al. · 2011 [cited by applicant]
US 7959985B2 · Ishizaka et al. · 2011 [cited by applicant]
US 7964241B2 · Hasebe et al. · 2011 [cited by applicant]
US 7964513B2 · Todd et al. · 2011 [cited by applicant]
US 7972980B2 · Lee et al. · 2011 [cited by applicant]
US 7981473B2 · Kim et al. · 2011 [cited by applicant]
US 7989365B2 · Park et al. · 2011 [cited by applicant]
US 8034673B2 · Kadonaga et al. · 2011 [cited by applicant]
US 8080290B2 · Hasebe et al. · 2011 [cited by applicant]
US 8101531B1 · Li et al. · 2012 [cited by applicant]
US 8119424B2 · Mather et al. · 2012 [cited by applicant]
US 8119544B2 · Hasebe et al. · 2012 [cited by applicant]
US 8133797B2 · Van Schravendijk et al. · 2012 [cited by applicant]
US 8178448B2 · Nodera et al. · 2012 [cited by applicant]
US 8227032B2 · Dussarrat et al. · 2012 [cited by applicant]
US 8257789B2 · Matsunaga et al. · 2012 [cited by applicant]
US 8278224B1 · Mui et al. · 2012 [cited by applicant]
US 8334218B2 · Van et al. · 2012 [cited by applicant]
US 8338312B2 · Sato et al. · 2012 [cited by applicant]
US 8357619B2 · Hasebe et al. · 2013 [cited by applicant]
US 8366953B2 · Kohno et al. · 2013 [cited by applicant]
US 8383525B2 · Raisanen et al. · 2013 [cited by applicant]
US 8394466B2 · Hong et al. · 2013 [cited by applicant]
US 8524612B2 · Li et al. · 2013 [cited by applicant]
US 8592328B2 · Hausmann et al. · 2013 [cited by applicant]
US 8633050B2 · Pierreux · 2014 [cited by applicant]
US 8637411B2 · Swaminathan et al. · 2014 [cited by applicant]
US 8647993B1 · Lavoie et al. · 2014 [cited by applicant]
US 8669185B2 · Onizawa et al. · 2014 [cited by applicant]
US 8728955B2 · Lavoie et al. · 2014 [cited by applicant]
US 8728956B2 · Lavoie et al. · 2014 [cited by applicant]
US 8829636B2 · Ohchi et al. · 2014 [cited by applicant]
US 8846484B2 · Lee et al. · 2014 [cited by applicant]
US 8956983B2 · Swaminathan et al. · 2015 [cited by applicant]
US 8999859B2 · Swaminathan et al. · 2015 [cited by applicant]
US 9023693B1 · Lin et al. · 2015 [cited by applicant]
US 9076646B2 · Sims et al. · 2015 [cited by applicant]
US 9214334B2 · Swaminathan et al. · 2015 [cited by applicant]
US 9230800B2 · Lavoie et al. · 2016 [cited by applicant]
US 9234276B2 · Varadarajan · 2016 [cited by applicant]
US 9257274B2 · Kang et al. · 2016 [cited by applicant]
US 9287113B2 · Kang et al. · 2016 [cited by applicant]
US 9355839B2 · Swaminathan et al. · 2016 [cited by applicant]
US 9355886B2 · Swaminathan et al. · 2016 [cited by applicant]
US 9373500B2 · Swaminathan et al. · 2016 [cited by applicant]
US 9406693B1 · Pang et al. · 2016 [cited by applicant]
US 9502238B2 · Danek et al. · 2016 [cited by applicant]
US 9564312B2 · Henri et al. · 2017 [cited by applicant]
US 9570274B2 · Swaminathan et al. · 2017 [cited by applicant]
US 9570290B2 · Swaminathan et al. · 2017 [cited by applicant]
US 9611544B2 · Lavoie et al. · 2017 [cited by applicant]
US 9627221B1 · Zaitsu et al. · 2017 [cited by applicant]
US 9673041B2 · Swaminathan et al. · 2017 [cited by applicant]
US 9685320B2 · Kang et al. · 2017 [cited by applicant]
US 9704713B1 · Guo et al. · 2017 [cited by applicant]
US 9773643B1 · Singhal et al. · 2017 [cited by applicant]
US 9786570B2 · Kang et al. · 2017 [cited by applicant]
US 9793110B2 · Kang et al. · 2017 [cited by applicant]
US 9875891B2 · Henri et al. · 2018 [cited by applicant]
US 9892917B2 · Swaminathan et al. · 2018 [cited by applicant]
US 9997357B2 · Arghavani et al. · 2018 [cited by applicant]
US 10008428B2 · Kang et al. · 2018 [cited by applicant]
US 10037884B2 · Ou et al. · 2018 [cited by applicant]
US 10043655B2 · Swaminathan et al. · 2018 [cited by applicant]
US 10043657B2 · Swaminathan et al. · 2018 [cited by applicant]
US 10062563B2 · Kumar et al. · 2018 [cited by applicant]
US 10269559B2 · Abel et al. · 2019 [cited by applicant]
US 10361076B2 · Kang et al. · 2019 [cited by applicant]
US 10373806B2 · Singhal et al. · 2019 [cited by applicant]
US 10559468B2 · Arghavani et al. · 2020 [cited by applicant]
US 10566187B2 · Qian · 2020 [cited by examiner]
US 10679848B2 · Kumar et al. · 2020 [cited by applicant]
US 10741458B2 · Kang et al. · 2020 [cited by applicant]
US 11011379B2 · Arghavani et al. · 2021 [cited by applicant]
US 11101129B2 · Qian · 2021 [cited by examiner]
US 11646198B2 · Qian · 2023 [cited by examiner]
US 20010041250A1 · Werkhoven et al. · 2001 [cited by applicant]
US 20020066411A1 · Chiang et al. · 2002 [cited by applicant]
US 20020076507A1 · Chiang et al. · 2002 [cited by applicant]
US 20020153101A1 · Nguyen et al. · 2002 [cited by applicant]
US 20020175393A1 · Baum et al. · 2002 [cited by applicant]
US 20030008070A1 · Seutter et al. · 2003 [cited by applicant]
US 20030024477A1 · Okuda et al. · 2003 [cited by applicant]
US 20030143839A1 · Raaijmakers et al. · 2003 [cited by applicant]
US 20030200917A1 · Vaartstra · 2003 [cited by applicant]
US 20030216006A1 · Li et al. · 2003 [cited by applicant]
US 20040033698A1 · Lee et al. · 2004 [cited by applicant]
US 20040043633A1 · Vaartstra · 2004 [cited by applicant]
US 20040053515A1 · Comita et al. · 2004 [cited by applicant]
US 20040067308A1 · Zheng et al. · 2004 [cited by applicant]
US 20040121164A1 · Iacovangelo et al. · 2004 [cited by applicant]
US 20040129212A1 · Gadgil et al. · 2004 [cited by applicant]
US 20040146644A1 · Xiao et al. · 2004 [cited by applicant]
US 20040151845A1 · Nguyen et al. · 2004 [cited by applicant]
US 20040157472A1 · Sugino et al. · 2004 [cited by applicant]
US 20040171280A1 · Conley, Jr. et al. · 2004 [cited by applicant]
US 20040219746A1 · Vaartstra et al. · 2004 [cited by applicant]
US 20040219784A1 · Kang et al. · 2004 [cited by applicant]
US 20040231799A1 · Lee et al. · 2004 [cited by applicant]
US 20050005851A1 · Keshner et al. · 2005 [cited by applicant]
US 20050009368A1 · Vaartstra · 2005 [cited by applicant]
US 20050042865A1 · Cabral, Jr. et al. · 2005 [cited by applicant]
US 20050079661A1 · Cho et al. · 2005 [cited by applicant]
US 20050109276A1 · Iyer et al. · 2005 [cited by applicant]
US 20050118837A1 · Todd et al. · 2005 [cited by applicant]
US 20050142795A1 · Ahn et al. · 2005 [cited by applicant]
US 20050158983A1 · Hoshi et al. · 2005 [cited by applicant]
US 20050159017A1 · Kim et al. · 2005 [cited by applicant]
US 20050181535A1 · Yun et al. · 2005 [cited by applicant]
US 20050184397A1 · Gates et al. · 2005 [cited by applicant]
US 20050196977A1 · Saito et al. · 2005 [cited by applicant]
US 20050208718A1 · Lim et al. · 2005 [cited by applicant]
US 20050230047A1 · Collins et al. · 2005 [cited by applicant]
US 20050233553A1 · Kountz et al. · 2005 [cited by applicant]
US 20050255714A1 · Iyer et al. · 2005 [cited by applicant]
US 20050260347A1 · Narwankar et al. · 2005 [cited by applicant]
US 20050276099A1 · Horng et al. · 2005 [cited by applicant]
US 20050276930A1 · Gates et al. · 2005 [cited by applicant]
US 20050282346A1 · Barth et al. · 2005 [cited by applicant]
US 20050287775A1 · Hasebe et al. · 2005 [cited by applicant]
US 20060003557A1 · Cabral, Jr. et al. · 2006 [cited by applicant]
US 20060009041A1 · Iyer et al. · 2006 [cited by applicant]
US 20060030148A1 · Seutter et al. · 2006 [cited by applicant]
US 20060032442A1 · Hasebe · 2006 [cited by applicant]
US 20060032443A1 · Hasebe et al. · 2006 [cited by applicant]
US 20060084283A1 · Paranjpe et al. · 2006 [cited by applicant]
US 20060088985A1 · Haverkort et al. · 2006 [cited by applicant]
US 20060105106A1 · Balseanu et al. · 2006 [cited by applicant]
US 20060165890A1 · Kaushal et al. · 2006 [cited by applicant]
US 20060178019A1 · Senzaki et al. · 2006 [cited by applicant]
US 20060183055A1 · O'Neill et al. · 2006 [cited by applicant]
US 20060199357A1 · Wan et al. · 2006 [cited by applicant]
US 20060216418A1 · Matsuura · 2006 [cited by applicant]
US 20060228868A1 · Ahn et al. · 2006 [cited by applicant]
US 20060244100A1 · Ahn et al. · 2006 [cited by applicant]
US 20060276020A1 · Yoon · 2006 [cited by examiner]
US 20060286774A1 · Singh et al. · 2006 [cited by applicant]
US 20060286776A1 · Ranish et al. · 2006 [cited by applicant]
US 20060286818A1 · Wang et al. · 2006 [cited by applicant]
US 20070010071A1 · Matsuura · 2007 [cited by applicant]
US 20070026540A1 · Nooten et al. · 2007 [cited by applicant]
US 20070032047A1 · Hasebe et al. · 2007 [cited by applicant]
US 20070048455A1 · Koh et al. · 2007 [cited by applicant]
US 20070065576A1 · Singh et al. · 2007 [cited by applicant]
US 20070065578A1 · McDougall · 2007 [cited by applicant]
US 20070087574A1 · Gupta et al. · 2007 [cited by applicant]
US 20070087581A1 · Singh et al. · 2007 [cited by applicant]
US 20070116887A1 · Faguet · 2007 [cited by applicant]
US 20070119370A1 · Ma et al. · 2007 [cited by applicant]
US 20070134942A1 · Ahn et al. · 2007 [cited by applicant]
US 20070137572A1 · Matsuura et al. · 2007 [cited by applicant]
US 20070145483A1 · Ono · 2007 [cited by applicant]
US 20070163488A1 · Tois et al. · 2007 [cited by applicant]
US 20070167028A1 · Chou et al. · 2007 [cited by applicant]
US 20070215036A1 · Park et al. · 2007 [cited by applicant]
US 20070218701A1 · Shimizu et al. · 2007 [cited by applicant]
US 20070231487A1 · Ishizaka · 2007 [cited by applicant]
US 20070232082A1 · Balseanu et al. · 2007 [cited by applicant]
US 20070243693A1 · Nemani et al. · 2007 [cited by applicant]
US 20070245959A1 · Paterson et al. · 2007 [cited by applicant]
US 20070251444A1 · Gros-Jean et al. · 2007 [cited by applicant]
US 20070259110A1 · Mahajani et al. · 2007 [cited by applicant]
US 20070281495A1 · Mallick et al. · 2007 [cited by applicant]
US 20070298585A1 · Lubomirsky et al. · 2007 [cited by applicant]
US 20080014759A1 · Chua et al. · 2008 [cited by applicant]
US 20080038936A1 · Todd et al. · 2008 [cited by applicant]
US 20080063791A1 · Hasebe et al. · 2008 [cited by applicant]
US 20080075881A1 · Won et al. · 2008 [cited by applicant]
US 20080081470A1 · Clark · 2008 [cited by applicant]
US 20080085610A1 · Wang et al. · 2008 [cited by applicant]
US 20080087890A1 · Ahn et al. · 2008 [cited by applicant]
US 20080113097A1 · Mahajani et al. · 2008 [cited by applicant]
US 20080119098A1 · Palley et al. · 2008 [cited by applicant]
US 20080123394A1 · Lee et al. · 2008 [cited by applicant]
US 20080131601A1 · Kim et al. · 2008 [cited by applicant]
US 20080138996A1 · Nishizuka · 2008 [cited by applicant]
US 20080139003A1 · Pirzada et al. · 2008 [cited by applicant]
US 20080142483A1 · Hua et al. · 2008 [cited by applicant]
US 20080207007A1 · Thridandam et al. · 2008 [cited by applicant]
US 20080213479A1 · Chou et al. · 2008 [cited by applicant]
US 20080233762A1 · Hong · 2008 [cited by applicant]
US 20080242116A1 · Clark · 2008 [cited by applicant]
US 20080260969A1 · Dussarrat et al. · 2008 [cited by applicant]
US 20080274302A1 · Hasebe et al. · 2008 [cited by applicant]
US 20080311760A1 · Nodera et al. · 2008 [cited by applicant]
US 20080317972A1 · Hendriks et al. · 2008 [cited by applicant]
US 20090001510A1 · Matz et al. · 2009 [cited by applicant]
US 20090018668A1 · Galbraith · 2009 [cited by applicant]
US 20090039349A1 · Honda · 2009 [cited by applicant]
US 20090041952A1 · Yoon et al. · 2009 [cited by applicant]
US 20090065896A1 · Hwang · 2009 [cited by applicant]
US 20090075490A1 · Dussarrat · 2009 [cited by applicant]
US 20090085095A1 · Kamath et al. · 2009 [cited by applicant]
US 20090148625A1 · Yeom et al. · 2009 [cited by applicant]
US 20090155606A1 · Yoon et al. · 2009 [cited by applicant]
US 20090155968A1 · Min et al. · 2009 [cited by applicant]
US 20090163012A1 · Clark et al. · 2009 [cited by applicant]
US 20090191687A1 · Hong et al. · 2009 [cited by applicant]
US 20090191722A1 · Hasebe et al. · 2009 [cited by applicant]
US 20090203197A1 · Hanawa et al. · 2009 [cited by applicant]
US 20090203227A1 · Hasebe et al. · 2009 [cited by applicant]
US 20090208880A1 · Nemani et al. · 2009 [cited by applicant]
US 20090278224A1 · Kim et al. · 2009 [cited by applicant]
US 20090286381A1 · Van Schravendijk et al. · 2009 [cited by applicant]
US 20090286402A1 · Xia et al. · 2009 [cited by applicant]
US 20100022078A1 · Rockenberger et al. · 2010 [cited by applicant]
US 20100022099A1 · Van Nooten et al. · 2010 [cited by applicant]
US 20100025824A1 · Chen et al. · 2010 [cited by applicant]
US 20100048011A1 · Yeh et al. · 2010 [cited by applicant]
US 20100051578A1 · Chang et al. · 2010 [cited by applicant]
US 20100051579A1 · Kobayashi · 2010 [cited by applicant]
US 20100078316A1 · Edakawa et al. · 2010 [cited by applicant]
US 20100081293A1 · Mallick et al. · 2010 [cited by applicant]
US 20100096687A1 · Balseanu et al. · 2010 [cited by applicant]
US 20100096688A1 · Balseanu et al. · 2010 [cited by applicant]
US 20100099236A1 · Kwon et al. · 2010 [cited by applicant]
US 20100099271A1 · Hausmann et al. · 2010 [cited by applicant]
US 20100102417A1 · Ganguli et al. · 2010 [cited by applicant]
US 20100120262A1 · Vorsa et al. · 2010 [cited by applicant]
US 20100124618A1 · Kobayashi et al. · 2010 [cited by applicant]
US 20100124621A1 · Kobayashi et al. · 2010 [cited by applicant]
US 20100136260A1 · Matsunaga et al. · 2010 [cited by applicant]
US 20100136313A1 · Shimizu et al. · 2010 [cited by applicant]
US 20100144162A1 · Lee et al. · 2010 [cited by applicant]
US 20100167555A1 · Maula et al. · 2010 [cited by applicant]
US 20100190353A1 · Nguyen et al. · 2010 [cited by applicant]
US 20100197129A1 · Ishikawa · 2010 [cited by applicant]
US 20100216268A1 · Katayama et al. · 2010 [cited by applicant]
US 20100221925A1 · Lee et al. · 2010 [cited by applicant]
US 20100244114A1 · Konno et al. · 2010 [cited by applicant]
US 20100255218A1 · Oka et al. · 2010 [cited by applicant]
US 20100304047A1 · Yang et al. · 2010 [cited by applicant]
US 20100304574A1 · Nodera et al. · 2010 [cited by applicant]
US 20100310791A1 · Shimazu et al. · 2010 [cited by applicant]
US 20110003445A1 · Murata et al. · 2011 [cited by applicant]
US 20110008972A1 · Damjanovic et al. · 2011 [cited by applicant]
US 20110014795A1 · Lee et al. · 2011 [cited by applicant]
US 20110014796A1 · Hayashi · 2011 [cited by applicant]
US 20110014798A1 · Mallick et al. · 2011 [cited by applicant]
US 20110042744A1 · Cheng et al. · 2011 [cited by applicant]
US 20110064969A1 · Chen et al. · 2011 [cited by applicant]
US 20110086516A1 · Lee et al. · 2011 [cited by applicant]
US 20110121354A1 · Schmid et al. · 2011 [cited by applicant]
US 20110124187A1 · Afzali-Ardakani et al. · 2011 [cited by applicant]
US 20110135842A1 · Faguet et al. · 2011 [cited by applicant]
US 20110139176A1 · Cheung et al. · 2011 [cited by applicant]
US 20110143548A1 · Cheung et al. · 2011 [cited by applicant]
US 20110151142A1 · Seamons et al. · 2011 [cited by applicant]
US 20110151246A1 · Ramon Moreno et al. · 2011 [cited by applicant]
US 20110151674A1 · Tang et al. · 2011 [cited by applicant]
US 20110151678A1 · Ashtiani et al. · 2011 [cited by applicant]
US 20110159202A1 · Matsushita et al. · 2011 [cited by applicant]
US 20110159673A1 · Hanawa et al. · 2011 [cited by applicant]
US 20110171775A1 · Yamamoto et al. · 2011 [cited by applicant]
US 20110176967A1 · Okuda et al. · 2011 [cited by applicant]
US 20110198756A1 · Thenappan et al. · 2011 [cited by applicant]
US 20110201210A1 · Sato et al. · 2011 [cited by applicant]
US 20110215445A1 · Yang et al. · 2011 [cited by applicant]
US 20110223765A1 · Rajagopalan · 2011 [cited by examiner]
US 20110256726A1 · LaVoie et al. · 2011 [cited by applicant]
US 20110256734A1 · Hausmann et al. · 2011 [cited by applicant]
US 20110262642A1 · Xiao · 2011 [cited by examiner]
US 20110298099A1 · Lee et al. · 2011 [cited by applicant]
US 20110309475A1 · Lee · 2011 [cited by applicant]
US 20120009802A1 · LaVoie et al. · 2012 [cited by applicant]
US 20120009803A1 · Jung et al. · 2012 [cited by applicant]
US 20120021252A1 · Lee · 2012 [cited by applicant]
US 20120028454A1 · Swaminathan et al. · 2012 [cited by applicant]
US 20120028469A1 · Onizawa et al. · 2012 [cited by applicant]
US 20120058282A1 · Hong et al. · 2012 [cited by applicant]
US 20120064682A1 · Jang et al. · 2012 [cited by applicant]