IP Library › Granted Patent US 12,444,579
Granted Patent B2
US 12,444,579 · App. 17/913,008 · Granted Oct 14, 2025

Mid-ring erosion compensation in substrate processing systems

Inventors: Hui Ling Han (Alameda, CA); Seetharaman Ramachandran (San Jose, CA)
Assignee: LAM RESEARCH CORPORATION
H01J37/32642H01J37/32082H01L21/68735H01J2237/024H01J2237/24578H01J2237/24585H01J2237/334
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Quick Facts
Patent No.
US 12,444,579
App. No.
17/913,008
Granted
Oct 14, 2025
Kind
B2
Abstract

A substrate processing system includes a substrate support assembly to support a semiconductor substrate during processing of the semiconductor substrate in the substrate processing system. A first edge ring is arranged around the substrate support assembly. The first edge ring is movable relative to the substrate support assembly. A second edge ring is arranged around the substrate support assembly and under the first edge ring. A controller is configured to compensate a height of the first edge ring based on erosion of the first and second edge rings.

Claims (24)

1. A substrate processing system comprising:

a substrate support assembly to support a semiconductor substrate during processing of the semiconductor substrate in the substrate processing system;

a first edge ring arranged around the substrate support assembly, the first edge ring being movable relative to the substrate support assembly;

a second edge ring arranged around the substrate support assembly and under the first edge ring; and

a controller configured to compensate a height of the first edge ring based on erosion of the first and second edge rings, wherein the controller is configured to:

determine a first number of hours for which the first edge ring is exposed to RF power supplied during the processing of the semiconductor substrate;

determine a first rate at which the first edge ring erodes due to the processing of the semiconductor substrate;

determine a second number of hours for which the second edge ring is exposed to the RF power;

determine a second rate at which the second edge ring erodes due to the processing of the semiconductor substrate and due to a movement of the first edge ring; and

determine a first amount by which to compensate the height of the first edge ring based on the first number of hours and the first rate;

determine a second amount by which to compensate the height of the first edge ring based on the second number of hours and the second rate;

compensate the height of the first edge ring based on the first and second amounts, wherein the compensated height is equal to a sum of the first and second amounts; and

move the first edge ring relative to the substrate support assembly during the processing of the semiconductor substrate according to the compensated height.

2. The substrate processing system of claim 1 wherein the controller is further configured to:

determine a shift in height of a tunable edge sheath of plasma used during the processing relative to a previously used first edge ring preceding the first edge ring;

determine a tuning factor to compensate the height of the first edge ring based on the shift in height of the tunable edge sheath of plasma and based on a last compensation amount used to compensate a height of the previously used first edge ring preceding the first edge ring;

determine the first amount by which to compensate the height of the first edge ring based on the first number of hours, the first rate, and the tuning factor; and

determine the second amount by which to compensate the height of the first edge ring based on the second number of hours, the second rate, and the tuning factor.

3. The substrate processing system of claim 2 wherein the controller is further configured to determine the shift in height of the tunable edge sheath of plasma based on normalized ratios of edge to center etch rates or based on a shift of critical dimension on the semiconductor substrate.

4. The substrate processing system of claim 2 wherein the tuning factor is a ratio of the shift in height of the tunable edge sheath of plasma to the last compensation amount used to compensate the height of the previously used first edge ring preceding the first edge ring.

5. The substrate processing system of claim 1 wherein the controller is further configured to determine the first rate based on process performance on the semiconductor substrate relative to plasma on time.

6. The substrate processing system of claim 1 wherein the controller is further configured to:

determine a correlation between a number of hours for which the second edge ring is exposed to the RF power and an erosion rate of the second edge ring; and

determine the second rate based on the correlation.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 20, 2022
From: HAN, HUI LING; RAMACHANDRAN, SEETHARAMAN
To: LAM RESEARCH CORPORATION
Reel/Frame 061153/0356 →
Continuity (1)
Related Publication 20230162953A1 · May 25, 2023
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