IP Library › Granted Patent US 12,351,914
Granted Patent B2
US 12,351,914 · App. 17/814,206 · Granted Jul 8, 2025

Deposition of films using molybdenum precursors

Inventors: Joshua Collins (Sunnyvale, CA); Griffin John Kennedy (Livermore, CA); Hanna Bamnolker (Cupertino, CA); Patrick A. Van Cleemput (Duvall, WA); Seshasayee Varadarajan (Lake Oswego, OR)
Assignee: Lam Research Corporation
C23C16/45553C23C16/08C23C16/308C23C16/34C23C16/45525C23C16/52H01L21/28568H01L21/02175H01L21/0228
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Quick Facts
Patent No.
US 12,351,914
App. No.
17/814,206
Granted
Jul 8, 2025
Kind
B2
Abstract

Provided herein are low resistance metallization stack structures for logic and memory applications and related methods of fabrication. In some embodiments, thin metal oxynitride or metal nitride nucleation layers are deposited followed by deposition of a pure metal conductor. The nucleation layer is amorphous, which templates large pure metal film grain growth and reduced resistivity. Further, certain embodiments of the methods described below convert most or all of the metal oxynitride nucleation layer to a pure metal layer, further lowering the resistivity.

Claims (20)

1. A method comprising:

forming a nucleation layer having a first thickness by exposing a substrate in a reaction chamber to a molybdenum-containing precursor and a first reducing agent, wherein the molybdenum-containing precursor is a molybdenum oxychloride or a molybdenum chloride, wherein the first reducing agent comprises a boron-containing reducing agent, and wherein the molybdenum-containing precursor reacts with the boron-containing reducing agent to form the nucleation layer having the first thickness; and

forming a bulk layer by exposing the nucleation layer having the first thickness to a molybdenum oxychloride and a hydrogen (H 2 ) reducing agent.

2. The method of claim 1 , wherein the molybdenum-containing precursor is a molybdenum oxychloride.

3. The method of claim 2 , wherein the molybdenum-containing precursor is molybdenum dichloride dioxide (MoO 2 Cl 2 ).

4. The method of claim 1 , wherein the nucleation layer is formed using atomic layer deposition (ALD).

5. The method of claim 1 , wherein the bulk layer is formed by chemical vapor deposition (CVD).

6. The method of claim 1 , wherein the first reducing agent is a borane.

7. The method of claim 1 , wherein the molybdenum oxychloride used in forming the bulk layer is molybdenum dichloride dioxide (MoO 2 Cl 2 ).

8. The method of claim 1 , wherein the bulk layer has a higher purity than the nucleation layer.

9. A method comprising:

forming an elemental nucleation layer on a substrate, wherein forming the elemental nucleation layer comprises reacting a molybdenum-containing precursor with a first reducing agent, wherein the molybdenum-containing precursor comprises at least one of a molybdenum oxychloride or a molybdenum chloride and wherein the first reducing agent comprises at least one of a silicon-containing reducing agent, a boron-containing reducing agent, or a nitrogen-containing reducing agent; and

forming a bulk layer by exposing the substrate to a molybdenum oxychloride and a hydrogen (H 2 ) reducing agent.

10. The method of claim 9 , wherein the molybdenum-containing precursor is molybdenum dichloride dioxide (MoO 2 Cl 2 ).

11. The method of claim 9 , wherein the elemental nucleation layer is formed using atomic layer deposition (ALD).

12. The method of claim 9 , wherein the bulk layer is formed by chemical vapor deposition (CVD).

13. The method of claim 9 , wherein the molybdenum oxychloride used in forming the bulk layer is molybdenum dichloride dioxide (MoO 2 Cl 2 ).

14. The method of claim 9 , wherein the first reducing agent comprises a silicon-reducing agent.

15. The method of claim 9 , wherein the first reducing agent comprises a nitrogen-reducing agent.

16. The method of claim 9 , wherein the first reducing agent comprises a boron-reducing agent.

Continuity (3)
Continuation 17310293
Provisional Application 62797860 · Jan 28, 2019
Related Publication 20220356579A1 · Nov 10, 2022
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