Patent Assignment
Reel/Frame 032325/0433
Merger
Recorded: 2014-02-21
Pages: 26
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROPERTY DEPT M/S 4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(95)
Gas Replenishment Method and Apparatus for Excimer Lasers
Patent:
5,440,578 →
Application:
08/093,353 →
Laser Having Improved Beam Quality and Reduced Operating Cost
Patent:
5,748,656 →
Application:
08/583,302 →
Maintenance Strategy Control System and Monitoring Method for Gas Discharge Lasers
Patent:
5,646,954 →
Application:
08/599,744 →
External High Voltage Control for a Laser System
Patent:
5,657,334 →
Application:
08/601,907 →
Low Cost Corona Pre-Ionizer for a Laser
Patent:
5,719,896 →
Application:
08/625,500 →
Pulse Power Generating Circuit with Energy Recovery
Patent:
5,729,562 →
Application:
08/739,873 →
Excimer Laser with Greater Spectral Bandwidth and Beam Stability
Patent:
5,898,725 →
Application:
08/786,186 →
Method and Apparatus for Eliminating Reflected Energy Due to Stage Mismatch in Nonlinear Magnetic Compression Modules
Patent:
5,914,974 →
Application:
08/803,890 →
Very Narrow Band Krf Laser
Patent:
5,835,520 →
Application:
08/842,305 →
Compact Excimer Laser Insulator with Integral Pre-Ionizer
Patent:
5,818,865 →
Application:
08/857,395 →
Aerodynamic Chamber Design for High Pulse Repetition Rate Excimer Lasers
Patent:
5,771,258 →
Application:
08/857,608 →
Very Narrow Band Laser
Patent:
5,856,991 →
Application:
08/869,239 →
Very Narrow Band Laser
Patent:
5,970,082 →
Application:
08/886,715 →
Excimer Laser with Magnetic Bearings Supporting Fan
Patent:
5,848,089 →
Application:
08/893,904 →
Wavelength Reference for Excimer Laser
Patent:
5,978,391 →
Application:
08/896,384 →
Pulse Laser with Pulse Energy Trimmer
Patent:
5,852,621 →
Application:
08/897,665 →
Wavelength Shift Correction Technique for a Laser
Patent:
6,078,599 →
Application:
08/898,630 →
Stepper or Scanner Having Two Energy Monitors for a Laser
Patent:
6,141,081 →
Application:
08/908,862 →
Process for Selecting Operating Range for Narrow Band Excimer Laser
Patent:
5,887,014 →
Application:
08/915,030 →
Multi-Pass Spectrometer
Patent:
5,835,210 →
Application:
08/926,948 →
Protective Overcoat for Replicated Diffraction Gratings
Patent:
6,162,495 →
Application:
08/939,611 →
Narrow Band Excimer Laser
Patent:
5,982,800 →
Application:
08/947,474 →
Narrow Band Laser with Etalon Based Output Coupler
Patent:
5,901,163 →
Application:
08/987,127 →
Current Reversal Prevention Circuit for a Pulsed Gas Discharge Laser
Patent:
5,940,421 →
Application:
08/990,848 →
Excimer Laser Having Power Supply with Fine Digital Regulation
Patent:
5,982,795 →
Application:
08/995,832 →
Fluorine Control System for Excimer Lasers
Patent:
5,978,406 →
Application:
09/016,525 →
Pulse Energy Control for Excimer Laser
Patent:
6,005,879 →
Application:
09/034,870 →
Laser Chamber with Minimized Acoustic and Shock Wave Disturbances
Patent:
5,978,405 →
Application:
09/036,158 →
Reliable, Modular, Production Quality Narrow-Band Krf Excimer Laser
Patent:
5,991,324 →
Application:
09/041,474 →
Magnetic Modulator Voltage and Temperature Timing Compensation Circuit
Patent:
6,016,325 →
Application:
09/069,019 →
Laser-Illuminated Stepper or Scanner with Energy Sensor Feedback
Patent:
6,067,306 →
Application:
09/081,374 →
Narrow Band Excimer Laser with Gas Additive
Patent:
6,014,398 →
Application:
09/082,139 →
Laser Chamber Incorporating Ceramic Insulators Coated with Dielectric Material
Patent:
6,014,397 →
Application:
09/089,330 →
Plasma Focus High Energy Photon Source
Patent:
6,051,841 →
Application:
09/093,416 →
High Voltage Cable Interlock Circuit
Patent:
5,949,806 →
Application:
09/100,311 →
Beam Expander for Ultraviolet Lasers
Patent:
6,163,559 →
Application:
09/102,241 →
Flexible Seal for a Laser System
Patent:
6,059,295 →
Application:
09/108,899 →
Automatic Fluorine Control System
Patent:
6,028,880 →
Application:
09/109,596 →
Multiplexer for Laser Lithography
Patent:
6,229,639 →
Application:
09/112,631 →
High Pulse Rate Pulse Power System
Patent:
5,936,988 →
Application:
09/118,773 →
Compact Ductless Cooling with Heat Exchangers
Blower Assembly for a Pulsed Laser System Incorporating Ceramic Bearings
Patent:
6,208,675 →
Application:
09/141,068 →
Twisted Blade Tangential Fan for Excimer Laser
Patent:
6,195,378 →
Application:
09/143,040 →
Tangential Fan for Excimer Laser
Patent:
6,061,376 →
Application:
09/143,633 →
Excimer Laser with Pulse Multiplier
Patent:
6,067,311 →
Application:
09/148,514 →
Reliable Modular Production Quality Narrow-Band High Rep Rate Excimer Laser
Patent:
6,128,323 →
Application:
09/157,067 →
Line Narrowing Apparatus with High Transparency Prism Beam Expander
Patent:
5,978,409 →
Application:
09/162,341 →
Wavelength System for an Excimer Laser
Patent:
5,978,394 →
Application:
09/165,593 →
Shock Wave Dissipating Laser Chamber
Patent:
6,212,211 →
Application:
09/169,195 →
Gas Laser Chamber/Optics Support Structure
Patent:
6,109,574 →
Application:
09/174,155 →
Long Life Fused Silica Ultraviolet Optical Elements
Patent:
6,058,739 →
Application:
09/183,220 →
Excimer Laser with Pulse and Beam Multiplier
Patent:
6,314,119 →
Application:
09/183,860 →
Fluorine Control System with Fluorine Monitor
Patent:
6,240,117 →
Application:
09/191,446 →
Aerodynamic Electrode SUPP0RT Bar
Patent:
6,188,709 →
Application:
09/198,081 →
Narrow Band Laser with Etalon Based Output Coupler
Patent:
6,028,879 →
Application:
09/204,111 →
Wavelength Reference for Laser
Patent:
6,396,582 →
Application:
09/206,526 →
High Pulse Rate Pulse Power System with Resonant Power Supply
Patent:
6,028,872 →
Application:
09/211,825 →
Durable Etalon Based Output Coupler
Patent:
6,137,821 →
Application:
09/217,340 →
Compact High Resolution Grating Spectrometer
Patent:
6,061,129 →
Application:
09/236,148 →
Narrow Band Uv Laser with Visible Light Guide Laser
Patent:
6,301,284 →
Application:
09/241,240 →
Double Pass Etalon Spectrometer
Patent:
6,243,170 →
Application:
09/245,134 →
Grating Assembly with Bi-Directional Bandwidth Control
Patent:
6,094,448 →
Application:
09/248,466 →
Reflective Overcoat for Replicated Diffraction Gratings
Patent:
5,999,318 →
Application:
09/265,288 →
Plasma Focus High Energy Photon Source
Patent:
6,064,072 →
Application:
09/268,243 →
Reliable, Modular, Production Quality Narrow-Band High Rep Rate Arf Excimer Laser
Patent:
6,330,261 →
Application:
09/271,041 →
Gas Discharge Laser with Magnetic Bearings and Magnetic Reluctance Centering for Fan Drive
Patent:
6,104,735 →
Application:
09/290,851 →
Gas Discharge Laser with Roller Bearings and Stable Magnetic Axial Positioning
Patent:
6,026,103 →
Application:
09/290,852 →
Gas Module Valve Automated Test Fixture
Patent:
6,164,116 →
Application:
09/306,053 →
Line Narrowed Laser with Spatial Filter
Tangential Fan with Cutoff Assembly and Vibration Control for Electric Discharge Laser
Patent:
6,034,984 →
Application:
09/310,786 →
Gas Discharge Laser with Gas Temperature Control
Patent:
6,034,978 →
Application:
09/310,872 →
Soldered Fan Assembly for Electric Discharge Laser
Patent:
6,023,486 →
Application:
09/311,680 →
Narrow Band Gas Discharge Laser with Gas Additive
Patent:
6,188,710 →
Application:
09/361,551 →
Automatic Fluorine Control System
Patent:
6,151,349 →
Application:
09/368,208 →
High Pulse Rate Pulse Power System with Fast Rise Time and Low Current
Patent:
6,151,346 →
Application:
09/370,739 →
Laser Chamber with Fully Integrated Electrode Feedthrough Main Insulator
Patent:
6,208,674 →
Application:
09/386,938 →
Smart Laser with Automated Beam Quality Control
Patent:
6,212,217 →
Application:
09/390,579 →
Bandwidth Estimating Technique for Narrow Band Laser
Patent:
6,317,448 →
Application:
09/405,615 →
Single Chamber Gas Discharge Laser with Line Narrowed Seed Beam
Patent:
6,359,922 →
Application:
09/421,701 →
Virtual Laser Operator
Patent:
6,618,425 →
Application:
09/442,140 →
Deep Ultraviolet Catadioptric Anamorphic Telescope
Patent:
6,356,576 →
Application:
09/450,919 →
High Power Gas Discharge Laser with Line Narrowing Unit
Arf Laser with Low Pulse Energy and High Rep Rate
Patent:
6,553,049 →
Application:
09/451,750 →
Long-Pulse Pulse Power System for Gas Discharge Laser
Patent:
6,782,031 →
Application:
09/451,995 →
Portable Laser Beam Monitor
Patent:
6,396,062 →
Application:
09/454,693 →
High Speed Magnetic Modulator Voltage and Temperature Timing Compensation Circuit
Patent:
6,327,286 →
Application:
09/465,427 →
High Pulse Rate Pulse Power System with Liquid Cooling
Patent:
6,240,112 →
Application:
09/470,288 →
Narrow Band Laser with Fine Wavelength Control
Patent:
6,192,064 →
Application:
09/470,724 →
Electric discharge laser with acoustic chirp correction
Patent:
6,317,447 →
Application:
09/490,835 →
Laser Discharge Chamber Passivation by Plasma
Patent:
6,644,324 →
Application:
09/518,970 →
Gas Discharge Laser Long Life Electrodes
Patent:
6,466,602 →
Application:
09/590,961 →
Bandwidth Control Techique for a Laser
Patent:
6,721,340 →
Application:
09/608,543 →
Gas Laser Chamber with Vertical Vibration Isolator
Patent:
6,425,559 →
Application:
09/675,492 →
Extreme Repetition Rate Gas Discharge Laser
Patent:
6,442,181 →
Application:
09/684,629 →
Wavemeter for Gas Discharge Laser
Patent:
41,457 →
Application:
11/091,005 →